Entrained metal hydride particle are removed from a flow of hydrogen from a Mg-based hydride storage unit using not only a particle filter but improvements for reducing or eliminating drastic changes in flow. In addition to or alternative to removal of entrained metal hydride particles, methane produced by reaction of hydrogen with steel in a metal hydride system preferably operated above 350 C. is removed downstream of the Mg-based hydride storage unit using an adsorption cartridge, preferably containing activated carbon.

Entrained metal hydride particle are removed from a flow of hydrogen from a Mg-based hydride storage unit using not only a particle filter but improvements for reducing or eliminating drastic changes in flow. In addition to or alternative to removal of entrained metal hydride particles, methane produced by reaction of hydrogen with steel in a metal hydride system preferably operated above 350 C. is removed downstream of the Mg-based hydride storage unit using an adsorption cartridge, preferably containing activated carbon.

A dual filter (100) for removing one or more components from a fluid flow is provided. The dual filter (100) comprises a first filter media (112a) and a second filter media (112b) respectively disposed in a first conduit (114a) and a second conduit (114b), and at least one manifold (120, 130) coupled to a pair of openings (116a,b) of the conduits (114a, b) wherein the at least one manifold (120, 130) is adapted to monitor and control the fluid flow through one of the filter media (112a,b).

The invention concerns an optimization method for a pressure swing adsorption process for separating CO.sub.2 from a feed gas by adapting the ratio of rinse steam to purge steam at a fixed amount of total steam.

A process gas preparation device for a process gas for treating a process material in a process apparatus and a procedure for preparing process gas to treat a process material in a process apparatus during a drying phase and a cooling phase. The device includes a process gas dehumidifier and a relative humidity sensor to measure the relative humidity of the process gas arranged upstream of the process gas dehumidifier.

The invention provides a process of purifying a fluid useful in a manufacturing process, particularly in the manufacture of silicon wafers, by removing one or more impurities; and apparatus for use in the process.

The adsorption based air separation unit includes an adsorber vessel containing media which selectively adsorbs water vapor and nitrogen preferentially over oxygen. The vessel includes an air entry spaced from an oxygen discharge. At least one dry air tap from the adsorber vessel is located between the entry and the discharge. When the adsorption media is fresh, air entering the adsorber vessel passes through enough of the adsorber vessel to have much of its water vapor removed and only some of its nitrogen removed. The vessel can include multiple taps sequentially further from the entry which can be selectively opened as the adsorption media becomes saturated with water vapor and nitrogen, so that dry air with much of its nitrogen still present can be further tapped from the adsorber vessel. The adsorber vessel thus facilitates production of both oxygen and dry air, such as for use as medical grade air.

An air separation unit includes an air inlet with a reversible blower downstream therefrom and an adsorption bed filled with adsorption media downstream of the reversible blower. The adsorption bed contains an adsorption media which preferentially adsorbs nitrogen over oxygen. An oxygen and argon output is located downstream of the absorption bed. At least a portion of the mixed gas of oxygen and argon is routed to a modular argon separator which separates out at least a portion of the argon to provide high purity oxygen to a high purity oxygen outlet. The argon separator can be configured as a molecular sieve filter to separate the argon from the oxygen or the argon separator can be in the form of a gas cooler and condenser which condenses liquid oxygen for storage and discharge as substantially pure oxygen.

A pressure swing absorption apparatus, including: at least four beds that each include an absorbent material, wherein the at least four beds are configured to rotate and are grouped such that members of one group only have fluid interconnections with members of another group; and a control system that controls a flow rate of a fluid communication between at least two of the beds by adjusting a phase angle difference between the at least two of the beds.

A driving system for a reversing blower adsorption based air separation unit is configured to not only drive the reversing blower cyclically in a forward and in a reverse direction, but also to allow the reversing blower to coast during a portion of its operating cycle. While coasting, a pressure differential across the blower acts alone to switch the reversing blower between a forward and a reverse direction of operation. Less power is thus required. When coasting, the blower can also be configured to output power such as the drive motor functioning as an electric generator or by having a mechanical power input be driven by the blower for power generation and/or energy storage. Such a system beneficially utilizes the energy associated with the pressure differential across the blower for energy harvesting and to further accelerate cycle times for the reversing blower adsorption based air separation unit.