The present invention relates to a photocatalytic portable air purifier that may maximize an air quality improvement effect by having a design structure optimized for a photocatalytic reaction and use a photocatalytic method to ensure convenient use and safety.

A method for controlling the semiconductor process environment is provided. The method includes placing a cleaning member in a processing chamber of a semiconductor processing tool. The method also includes creating a vacuum in the processing chamber. Furthermore, the method includes eliminating at least one compound from the residues in the processing chamber by the cleaning member. The cleaning member is configured to facilitate physical adsorption, catalysis, or chemical reactions with the residues in the processing chamber.