In a method and apparatus (10) for air disinfection a unipolar corona discharge zone (26) is formed between an ionizing portion (15) of a first electrode (14) and a non-ionizing second electrode (18) by applying high DC voltage (22′, 22″) across the first and second electrodes and water molecules in an air flow (25) conveyed through the corona discharge zone are converted to hydrogen peroxide molecules. An electric field (27, 27′, 27″) is generated across the air flow close to the corona discharge zone for preventing ions escaping from the corona discharge zone into the atmosphere. This allows a higher corona discharge current to be applied than would be permitted if ions were able to escape into the atmosphere, which results in a higher yield of hydrogen peroxide and increases the efficiency of disinfection. It also helps to prevent dust from settling on the ionizing portion (15).

Methods and apparatus for treating an exhaust gas in a foreline of a substrate processing system are provided herein. In some embodiments, a method for treating an exhaust gas in an exhaust conduit of a substrate processing system includes: flowing an exhaust gas from a process chamber into a plasma source via a foreline; injecting a reagent into the foreline; forming a plasma in the plasma source from the exhaust gas and the reagent; and injecting a cleaning gas into the foreline, wherein the cleaning gas and the reagent are different gases.

Systems, methods, and apparatus are contemplated in which a tube cell that produces a dielectric barrier discharge (DBD) is individually configured to minimize the mixing of unwanted byproducts of the generated plasma with an exhaust air stream. The tube cell generates a DBD within a tube cell, such that oxidants or radicals are generated in an environment substantially separated from the exhaust stream. The generated oxidants are directed to intersect with the exhaust stream to minimize the generation of unwanted byproducts. The tube cells are further shaped and arranged in tube cell arrays to alter the flow dynamics of the exhaust stream and the oxidant or radical streams, including mixing of the streams.

An ionization device may be configured to be portable, and to rest on a surface such as a floor or desk top. The ionization device includes an air-intake port, an ion generator, an ozone catalyst for removing at least some ozone from air, and an air discharge. Air enters the device through the air-intake port, and at least some of the air is ionized to remove particulates. The air is then moved past or through the ozone catalyst to remove at least some of the ozone from the air. A controller may be used to monitor particulates, temperature, humidity, and/or other relevant factors and/or to adjust the ionization level.

Embodiments of point-of-use (POU) abatement device and methods of abating a plurality of gas streams from a corresponding plurality of processing chambers are provided herein. In some embodiments, a compact POU abatement device includes a plurality of inlets respectively coupled to a plurality of process chambers in which each of the process chambers gas streams is isolated from the other gas streams. In some embodiments, the compact POU abatement device can include a plurality of oxidation devices and a corresponding plurality of wet scrubber columns each directly coupled to ones of the plurality of inlets to receive a gas stream from a corresponding process chamber.

A miniature gas detection and purification device is disclosed for a user to carry with him, and includes a main body, a purification module, a gas guider and a gas detection module. The gas detection module detects the gas in the environment surrounding the user to obtain a gas detection datum, and controls the gas guider to be operated according to the gas detection datum, so that gas is inhaled into the main body and flows through the purification module for filtration and purification, and the gas purified is finally guided to an area nearby the user.

An air purification device includes a reactor having a hollow shape and extending in one direction, a discharge plasma generator comprising a first electrode disposed on an outer wall of the reactor and a second electrode disposed inside the reactor, where the discharge plasma generator is configured to generate a discharge plasma in a discharge region, a plurality of dielectric particles disposed on a packed-bed of the reactor, a liquid supplier which supplies a liquid into the reactor, and a liquid recoverer which recovers the liquid discharged from the reactor.

Disclosed apparatuses, systems, and materials relate to the disassociation of feedstock species (such as those in gaseous form) into constituent components, and may include an energy generator configured to provide a microwave energy. A first chamber defines a first volume and is configured to guide the microwave energy along the first chamber as a sinusoidal wave having an energy maxima at a point along the first chamber. A second chamber contains a plasma plume and is positioned substantially proximal to the first chamber, and is configured to enable propagation of the microwave energy through the first chamber and the second chamber such that the microwave energy demonstrates, at a radial center of the second chamber, a coaxial energy maxima configured to ignite the plasma plume contained in the second chamber. Carbon-containing materials may be formed by controlling flow parameters of the feedstock species into the first or second chamber.

A helmet includes a helmet body and a gas detection and purification device. The gas detection and purification device in includes a body, a purification module, a gas-guiding unit, a gas detection module, and a power module. The gas detection module calculates the gas detection data obtained by the gas detection module so as to control the gas-guiding unit to start or stop operation based on the gas detection data. When the gas-guiding unit is in operation, the gas-guiding unit guides the gas into the body and to pass through the purification module for being filtered and purified to become a purified gas, and the gas-guiding unit discharges the purified gas out of the body to the nose portion, or the mouth portion, or both the nose portion and the mouth portion of the wearer for providing the wearer with the purified gas to breath.

A method for trapping noble gas atoms and molecules in oxide nanocages that includes providing oxide nanocages on a metallic substrate, ionizing a noble gas to form noble gas cations, applying a voltage to the metallic substrate, contacting the oxide nanocages with the noble gas cations, and deionizing the cations to form noble gas atoms and molecules that are trapped within the oxide nanocages. In one embodiment of the present device, polygonal prism organosilicate cages on a ruthenium thin film can trap noble gases.