One aspect of the present invention is an acidic gas separation device including: an electrolyte layer; a pair of electrodes provided with the electrolyte layer interposed between the pair of electrodes; and a voltage application unit that applies a voltage between the pair of electrodes, wherein the pair of electrodes are gas permeable electrodes, and the electrolyte layer contains: at least one selected from the group consisting of high molecular weight redox compounds having a radicalization rate of 90% or more, high molecular weight redox compounds having a quinone group in a molecule, and high molecular weight redox compounds having an imino group in a molecule; and a nonvolatile electrolytic solution.

Provided is an exhaust gas treatment apparatus that treats exhaust gas generated from semiconductor process and directed to a vacuum pump. Exhaust gas treatment apparatus includes a plasma generating unit for generating plasma, a reaction chamber in which perfluoride is decomposed by the plasma to generate a decomposition gas, and gas supplying unit for supplying the decomposition gas from the reaction chamber to a processing chamber in which the exhaust gas from the semiconductor process is introduced and treated exhaust gas is discharged to the vacuum pump. Decomposition gas reacts with the exhaust gas in the processing chamber to suppress generation of salt in solid state by a component of the exhaust gas.

A gas treatment system includes a first scrubber, a regenerative catalytic oxidizer (RCO) that treats gas that passes through the first scrubber, a second scrubber that treats the gas that passed through the regenerative catalytic oxidizer, and a dielectric barrier discharge (DBD) plasma reactor that treats the gas that passed through the second scrubber. The regenerative catalytic oxidizer includes a two-bed regenerative catalytic reactor.

This invention relates to methods and systems for reducing the concentration of SOx and/or NOx in gas streams.

The disclosure provides a device for purification, sterilization and deodorization of air. The device includes a housing, a sterilization and disinfection device, a fan, a deodorization device, and a photocatalyst reactor. The housing is in a barrel shape and includes a side wall including a plurality of air inlets. The fan is disposed on one end of the housing. The deodorization device, the photocatalyst reactor and the sterilization and disinfection device are disposed in the housing.

Ionization systems and methods include moving air into contact with one or more ion generators and then past an ozone removal assembly to remove at least some ozone from the air. The air may be moved by a fan and may be filtered before contacting the one or more ion generators. The amount of one or more of the following of the air may be measured: the amount of ions, particulates, temperature, humidity, and other relevant factors. The ionization amount may be adjusted based on one or more of the measured amounts. The one or more ion generators and ozone removal assembly may be constructed as part of a single unit so they can be removed and replaced easily.

The present disclosure relates to a method for treating exhaust gas including a plasma reaction operation of reacting exhaust gas containing a volatile organic compound (VOC) with low-temperature plasma to generate exhaust gas containing a VOC-derived intermediate, and a combustion operation of combusting the exhaust gas containing the VOC-derived intermediate to produce carbon dioxide and water.

There is provided a dielectric barrier electrical discharge apparatus, system and method. The apparatus comprises at least two electrodes arranged in use to provide at least one anode and at least one cathode an electric field thereby being establishable therebetween, the at least two electrodes being separated to allow a fluid to be present between the electrodes in use. At least one of the electrodes has a dielectric portion connected to at least part of said electrode, and a sub-macroscopic structure is connected to at least one of the electrodes or dielectric portion.

Disclosed is a device including a chamber configured as a tubular body, the chamber being connected to a ground power source; a power supply device disposed outside the chamber and configured to continuously apply voltage having a magnitude set as direct current or alternating current; an emitter configured as a hollow tubular body having a plurality of cusps formed on an outer surface thereof and configured to generate plasma, the emitter being disposed in the chamber, elongated in a direction parallel to a flow direction of the processing target gas, electrically connected to the power supply device, and configured to generate nonthermal plasma; a rod configured to electrically connect the emitter and the power supply device and support the emitter; and an insulator configured to electrically insulate the rod and the chamber and prevent arcing from occurring between the rod and the chamber.

A gas treatment device treats, at atmospheric pressure, the gases pumped by at least one rough pumping device. The gas treatment device includes a treatment chamber and at least one discharge pipe to connect a discharge of the at least one rough pumping device to an inlet of the treatment chamber. The gas treatment device further includes at least one auxiliary pumping device to lower the pressure in the at least one discharge pipe, situated less than 1 meter from the inlet of the treatment chamber, such as less than 50 cm.