The present invention relates to an air filter housing for supplying air to a space, said air filter housing being configured to be arranged in a ceiling of said space, said housing having a mouth facing downward, said mouth comprising a sealing surface configured to receive a panel type air filter comprising a frame and a filter medium held within said frame, such that a sealing connection between said sealing surface and said frame is achieved, characterized in that said filter housing further comprises at least one resilient member arranged below the sealing surface such that when a panel type air filter is inserted into the mouth, the resilient member will be deformed by the filter frame as the filter passes the resilient member, and resume its original shape once the filter has passed, such that the filter is retained between the sealing surface and the resilient member. The present invention further relates to the use of a filter housing in a cleanroom, and to a method of mounting a panel type air filter in an air filter housing.

A plurality of air data may be collected by a sensor within a data center. The plurality of air data is received by a processor. At least a portion of the received plurality of air data corresponding to at least one zone within the data center may be determined to satisfy a threshold. Coordinates of a geographical location associated with the zone that includes the sensor may be transmitted to a robotic filter. The robotic filter can be dispatched to the transmitted geographic location to filter the zone.

A removable inner frame assembly for use with a filter element and a main frame includes an inner frame, a bottom sealant layer, and a top sealant layer. The filter element has a lower edge extending from an outer perimeter of the filter element. The inner frame has a plurality of U-shaped sides. The first end of each side is connected to a second end of another side. The bottom sealant layer is affixed to a bottom surface of the bottom of each side of the inner frame. The bottom sealant layer is configured to allow the removable inner frame assembly to be releasably coupled to the main frame. The top sealant layer is located within the u-shaped channel formed by each side of the inner frame and is configured to receive the lower edge of the filter element.

A method of fabricating a semiconductor device includes providing a wafer inside a process chamber, performing an ALD (atomic layer deposition) process inside the process chamber to deposit titanium nitride on the wafer, providing a process gas used for the ALD process to a scrubber, filtering a first powder contained in the process gas, using a filter unit disposed in the scrubber and including a plurality of filters, adsorbing a second powder remaining in the process gas after passing through the filter unit, using a fin structure extending in a vertical direction inside the filter unit, and exhausting the process gas, from which the first and second powders are removed, from the scrubber.

There is provided a contaminant processing device that purifies and measures particles or chemical gases generated in a semiconductor line. The contaminant processing device includes a body unit including different first surface and second surface, a driving unit installed in the body unit and configured to drive inside a semiconductor line, a position sensor installed in the body unit and configured to sense a position within the semiconductor line, a purification unit installed in the body unit and configured to penetrate the first surface and the second surface, wherein the purification unit includes a flow path disposed between the first surface and the second surface, a chemical gas detection sensor installed in the flow path, measuring a chemical gas entering through the first surface and a controller that receives a concentration of the chemical gas from the chemical gas detection sensor, receives position data from the position sensor, and checks the concentration of the chemical gas according to a position within the semiconductor line.

An indoor air cleaning system is disclosed and includes a gas detection module, an air cleaning device and a central control and regulation device. The gas detection module includes a microcontroller and a central control communication interface component for detecting and outputting air pollution data. The microcontroller processes the air pollution data and outputs a regulation signal based on the calculations. The air cleaning device includes a fan, a filtering element and a driving control component. The gas detection module is disposed inside the air cleaning device. The central control and regulation device is connected with the central control communication interface component under handshake communication protocol of wired communication or wireless communication to provide an control command to the gas detection module for activation operation of the fan. Consequently, the gas state in the indoor field is cleaned completely to meet the clean room requirement.

A portable airborne pathogen control apparatus and system. Aspects of the present disclosure provide for a portable airborne pathogen control apparatus configured to be selectively positioned within an interior room and configured to enable a floor-to-ceiling flow of air within the interior room. The portable airborne pathogen control apparatus may comprise a housing with an air intake disposed at a lower area of a base housing and an air outlet disposed at an upper area of an elongated duct extending from the base housing. A blower fan housed within an interior chamber of the housing may be configured to direct a floor-to-ceiling flow of air through the interior chamber from the air intake to the air outlet. A volume of air directed through the interior chamber of the housing may be disinfected using one or more UV-C emitters and/or cold plasma generator(s) housing in the interior chamber of the housing.

An exhaust fan for preventing air pollution includes a main body and at least one gas detection module. The main body is configured to form an airflow-guiding path and includes a gas guider and a filtration and purification component disposed in the airflow-guiding path. The gas guider introduces an air convection for guiding an air pollution source contained in an air to pass through the filtration and purification component so as to filter and purify the air pollution source. The at least one gas detection module is disposed in the airflow-guiding path for detecting the air pollution source and transmitting gas detection data.

The present invention generally relates to an air filter, and in particular, the present invention relates to an air filter with a porous copper layer, having natural antimicrobial property, for improving the quality of air breathed in by people.

Systems, methods, and other embodiments for removing contaminated materials such as asbestos from railcars (i.e., train cars and subway cars) for subsequent recycling of the railcars. In particular, a collapsible inner containment structure having a HEPA negative air pressure is used. A door on the inner containment structure is opened at one end of the inner containment structure and a railcar is transported into a work area located within the inner containment structure. The door is then closed so that the inner containment structure can maintain the negative pressure within the inner containment structure. The contaminated materials such as asbestos are removed from the inside of the railcar using a mixture of pressurized water and media.