A PFAS detoxification system 1 includes a concentrating device 11 configured to concentrate a resist waste liquid containing PFAS discharged from a lithography apparatus 111 of a semiconductor manufacturing apparatus 100. Further, the PFAS detoxification system 1 includes a sulfuric acid processing tub 12 configured to decompose and volatilize a concentrate concentrated by the concentrating device 11.

A water purification system that allows for bypassing one or more stages of purification during periods of high demand. Bypass can be selectively implemented as a function of fluid particulate levels and/or reservoir level.

Provided is a hollow fiber membrane module that allows reducing pressure loss of a dry gas and a moist gas. A hollow fiber membrane module has: a hollow fiber membrane bundle; a case in which the hollow fiber membrane bundle is accommodated; a pair of sealing and fixing parts that fixes the hollow fiber membrane bundle to the case; intra-membrane channels; and extra-membrane channels. Moisture in the moist gas is supplied into the dry gas by virtue of the membrane separation effect of the hollow fiber membranes. A first channel is provided, which runs through the case from one end side to the other end side and through which part of the dry gas flows without passing through the intra-membrane channels.

A device controls temperature of soft water and/or permeate for dialysis applications based on the principle of reverse osmosis. The device, which can be used in a dialysis system, includes a buffer tank for heat which is coupled in terms of heat flow to a heat source and/or heat sink and receives or contains a fluid heat transfer medium. A soft water heat exchanger is connected on the primary side to the buffer tank by a pump circuit for the heat transfer medium, which is connected on the secondary side to the soft water supply line. A permeate heat exchanger is connected on the primary side to the buffer tank by a pump circuit for the heat transfer medium, which is connected on the secondary side to the permeate extraction line.

A water purifier having a composite filter is able to discharge residential water in addition to being able to take in raw water and output purified water, and is integrated with a reverse osmosis filter member (spiral filter member).

A membrane-based air separation module includes an inlet configured to receive supply air, a first hollow fiber membrane configured to substantially remove water from the supply air to form an anhydrous air stream, and a permeate port configured to exhaust the water removed by the first hollow fiber membrane from the air separation module. The air separation module also includes a second hollow fiber membrane positioned downstream of the first hollow fiber membrane configured to receive the anhydrous air stream and substantially remove oxygen from the anhydrous air stream, an oxygen-enriched air outlet configured to exhaust the oxygen removed by the second hollow fiber membrane from the air separation module, and a nitrogen-enriched air outlet configured to supply a stream of nitrogen-enriched air to a fuel tank of an aircraft.

A water filtration system may include a first receptacle configured to store source water, a second receptacle configured to store supply water, an RO filter disposed between the first receptacle and the second receptacle, and a bypass line configured to provide water from the RO filter back to the first receptacle for an initial predetermined amount of time, after which the bypass line is closed and the filtered water is provided to the second receptacle.

Ultrapure water supply apparatuses, substrate processing systems, and substrate processing methods are provided. An ultrapure water supply apparatus includes: a first supply device that produces first ultrapure water; a second supply device that produces second ultrapure water; a first reserved supply device that provides the second supply device with a portion of fluid in the first supply device; and a second reserved supply device that provides the first supply device with a portion of fluid in the second supply device. The first supply device includes a first front-side filtering part, a first rear-side filtering part, and a first connection part. The second supply device includes a second front-side filtering part, a second rear-side filtering part, and a second connection part. Each of the first and second reserved supply devices connects the first connection part and the second connection part to each other.

A reverse osmosis water purifier that monitors Total Dissolved Solids (TDS) at the onset of entering the water filtration system and downstream upon exiting the system. A comparison of the TDS levels is made to each other or predetermined levels, and action is taken regarding whether to bypass the RO filter, or continue filtering through the RO membrane, or combine the two fluid streams. A microbiological barrier filter is introduced in-line with the egress port of a reverse osmosis filter, and downstream of the bypass water circuit. The microbiological filter is utilized to remove microbiological contaminants from the output water, either directly from the RO filter output, or the bypass filter circuit, or both.

Disclosed is a hollow fiber membrane module. The hollow fiber membrane module includes a housing including a first fluid inlet, a first fluid outlet, a second fluid inlet and a second fluid outlet, and hollow fiber membrane bundles, each hollow fiber membrane bundle including a plurality of hollow fiber membranes, disposed within the housing so that a first fluid flows inside the hollow fiber membranes and a second fluid flows outside the hollow fiber membranes, and each hollow fiber membrane bundle further includes porous tubes having both ends closed and including a plurality of pores formed on the side surfaces thereof. The hollow fiber membrane module removes a region, into which a fluid flowing outside a hollow fiber membrane bundle has difficulty in permeating, thus allowing the fluid to uniformly flow. Therefore, even if hollow flow membranes are highly integrated, performance of the hollow fiber membrane module may be maximized.