A fluid device includes a substrate which has a pair of substrate plates stacked in a thickness direction thereof, wherein the substrate is provided with a flow path which is formed by covering a groove portion provided in one substrate plate of the pair of substrate plates with the other substrate plate, wherein the flow path includes a merging portion, and a supply flow path, a discharge flow path, and a branch flow path which extend radially from the merging portion, wherein a discharge valve is provided between the merging portion and the discharge flow path, wherein a branch valve is provided between the merging portion and the branch flow path, wherein the merging portion is filled with a solution by causing the solution to flow from the supply flow path toward the discharge flow path in a state in which the branch valve is closed, and wherein in the merging portion, a dimension of a region adjacent to the discharge valve in the thickness direction is smaller than a dimension of a region adjacent to the supply flow path in the thickness direction and a dimension of a region adjacent to the branch valve in the thickness direction.

An apparatus for recirculating fluids in semiconductor systems. The apparatus including a base portion, an inlet portion coupled to a first end of the base portion, and a nozzle coupled to a second end of the base portion. The nozzle including a helical groove extending from a position near a nozzle base portion to a position near a tip of the nozzle portion. The helical groove extending from an exterior surface through the nozzle portion to an interior surface of the nozzle portion. Methods of using the apparatus in a semiconductor recirculation system are also disclosed.

An apparatus for recirculating fluids in semiconductor systems. The apparatus including a base portion, an inlet portion coupled to a first end of the base portion, and a nozzle coupled to a second end of the base portion. The nozzle including a helical groove extending from a position near a nozzle base portion to a position near a tip of the nozzle portion. The helical groove extending from an exterior surface through the nozzle portion to an interior surface of the nozzle portion. Methods of using the apparatus in a semiconductor recirculation system are also disclosed.

A MEMS multiplexing system including: first and second fluid inputs; and a mixing network. The mixing network including: a first channel to receive the first fluid input; a second channel to receive the second fluid input; a multiplexing valve communicating with the first channel and the second channel, the multiplexing valve to cause the transport of the first fluid into the second channel so as to form a first interleaved fluid downstream from the multiplexing valve in the second channel and to cause the transport of the second fluid into the first channel so as to form a second interleaved fluid downstream from the multiplexing valve in the first channel; and the first channel and the second channel intersecting downstream from the valve so as to force mixing of the first interleaved fluid and the second interleaved fluid.

There is provided an inline saturator system and method for gas exchange with an aqueous-phase liquid. The system comprises a pressure vessel, configured to receive a first liquid and a first gas from external sources and to discharge a second liquid and a second gas from the pressure vessel, and a gas infusion device situated within the pressure vessel. The gas infusion device is configured to receive the first liquid and first gas, to facilitate gas exchange therebetween, producing the second liquid and the second gas, and to discharge the second liquid and second gas into the pressure vessel. The system further includes a recirculation system configured to direct a portion of liquid within the pressure vessel back into the saturator device, where injection of the redirected liquid into the gas infusion device forces the first liquid into the gas infusion device for the gas exchange.

An apparatus for mixing fluids, with particular application in the mixing of air and water for facilitating aerobic biological reactions for breaking down organic material. The apparatus includes gas-lift pump effected recirculation through a mixing chamber (in which a toroidal vortex is established) into a reactor vessel having an upper agitation region and a lower separation region. An embodiment for use with compostable materials includes an assembly for handling settleable solids and maintaining suspension of buoyant materials; a foam suppression device and an overflow reservoir.

To provide a nanobubble generating nozzle that is compact and capable of generating nanobubbles with high efficiency. The problem is solved by a nanobubble generating nozzle and a nanobubble generator including this nanobubble generating nozzle. The nanobubble generating nozzle includes an introduction part for introducing a mixed fluid of a liquid and a gas into an interior thereof, a jetting part for feeding out the mixed fluid containing nanobubbles of the gas, and a nanobubble generating structure part for generating nanobubbles of the gas, between the introduction part and the jetting part. The nanobubble generating structure part includes a plurality of flow paths having different cross-sectional areas through which the mixed fluid of the liquid and the gas is passed, in an axial direction of the nanobubble generating nozzle.

Disclosed are methods for continuous production of ozone strong water, the methods comprising the steps of injecting an acidification agent into a pressurized feed water to maintain a pH value of the pressurized feed water below 7, diffusing a two-phase mixture of O.sub.2-O.sub.3 gas and recirculated water into a body of acidic pressurized water to dissolve ozone into the acidic pressurized water. The disclosed methods include simultaneously maintaining a start-up mode in an upper portion of the dissolution column that favors high efficiency of ozone mass transfer into the acidic pressurized water and a steady state mode in a lower portion of the dissolution column that favors a high concentration of dissolved ozone in the acidic pressurized water coexistent in the body of the acidic pressurized water, wherein an ozone concentration gradient is formed along a height of the body of the acidic pressurized water.

Disclosed are systems for continuous production of ozone strong water, the systems comprising an injection device that injects an acidification agent into a pressurized feed liquid, a diffuser device that injects ozone into a body of the acidic pressurized feed water, and injection nozzles each controlled by a valve that adjust a flow rate of the ozone strong water discharged from a dissolution column to match a flow rate of the acidic pressurized feed water fed to the dissolution column, thereby maintaining a start-up mode in an upper portion of the dissolution column that favors a high efficiency of ozone mass transfer and a steady-state mode in a lower portion of the dissolution column that favors a high dissolved ozone concentration coexistent in the body of the acidic pressurized liquid, wherein a concentration gradient of dissolved ozone is formed along a height of the body of the acidic pressurized liquid.

The present invention is directed to a fluid mixing system. In an embodiment, the fluid mixing system includes a first vessel; a second vessel disposed within the first vessel; a mixer disposed outside of the first vessel in fluid communication with the second vessel; and a media introduction port disposed outside of the first vessel in fluid communication with the mixer.