In an etch process chamber, oscillators are positioned a predetermined distance away from an outer wall and coupled to a microwave generator. An inner wall of the process chamber on which particulates such as polymers adhere from the etch process is vibrated via operations of the oscillators. A gas flows into the cavity defined by the inner wall to collect the displaced particulates, which is then pumped out of the cavity to clean the process chamber. A controller identifies the polymer recipe used during the etch process and selects an oscillation program from memory. A microwave generator, controlled by the controller, is directed to generate microwaves at preselected frequencies determined from the program. The microwave frequencies are communicated to the oscillators, which then vibrate the inner wall at such received frequencies.

A MOF production system and method of making are detailed for continuous and controlled synthesis of MOFs and MOF composites. The system can provide optimized yields of MOFs and MOF composites greater than or equal to 95%.

A MOF production system and method of making are detailed for continuous and controlled synthesis of MOFs and MOF composites. The system can provide optimized yields of MOFs and MOF composites greater than or equal to 95%.

A tapered fiber optoacoustic emitter includes a nanosecond laser configured to emit laser pulses and an optic fiber. The optic fiber includes a tip configured to guide the laser pulses. The tip has a coating including a diffusion layer and a thermal expansion layer, wherein the diffusion layer includes epoxy and zinc oxide nanoparticles configured to diffuse the light while restricting localized heating. The thermal expansion layer includes carbon nanotubes (CNTs) and Polydimethylsiloxane (PDMS) configured to convert the laser pulses to generate ultrasound. The frequency of the ultrasound is tuned with a thickness of the diffusion layer and a CNT concentration of the expansion layer.

A tapered fiber optoacoustic emitter includes a nanosecond laser configured to emit laser pulses and an optic fiber. The optic fiber includes a tip configured to guide the laser pulses. The tip has a coating including a diffusion layer and a thermal expansion layer, wherein the diffusion layer includes epoxy and zinc oxide nanoparticles configured to diffuse the light while restricting localized heating. The thermal expansion layer includes carbon nanotubes (CNTs) and Polydimethylsiloxane (PDMS) configured to convert the laser pulses to generate ultrasound. The frequency of the ultrasound is tuned with a thickness of the diffusion layer and a CNT concentration of the expansion layer.

A continuous acoustic chemical microreactor system is disclosed. The system includes a continuous process vessel (CPV) and an acoustic agitator coupled to the CPV and configured to agitate the CPV along an oscillation axis. The CPV includes a reactant inlet configured to receive one or more reactants into the CPV, an elongated tube coupled at a first end to the reactant inlet and configured to receive the reactants from the reactant inlet, and a product outlet coupled to a second end of the elongated tube and configured to discharge a product of a chemical reaction among the reactants from the CPV. The acoustic agitator is configured to agitate the CPV along the oscillation axis such that the inner surface of the elongated tube accelerates the one or more reactants in alternating upward and downward directions along the oscillation axis.

Apparatus features a container and a transducer. The container is made of a selected material and has a container wall with a selected thickness, and configured to hold a fluid therein. The transducer is configured on the outside of the container wall, and is also configured to provide a standing wave into the fluid. The selected thickness and material of the container wall is chosen to ensure about a ½ wavelength of a desired frequency exists within the container wall, so as to substantially reduce back reflections toward the transducer due to any mismatch in acoustic impedance at the interface between the container wall and the fluid, and so as to substantially maximize the amount of energy delivered to the fluid, thus improving the operating efficiency of the apparatus.

Apparatus features a container and a transducer. The container is made of a selected material and has a container wall with a selected thickness, and configured to hold a fluid therein. The transducer is configured on the outside of the container wall, and is also configured to provide a standing wave into the fluid. The selected thickness and material of the container wall is chosen to ensure about a ½ wavelength of a desired frequency exists within the container wall, so as to substantially reduce back reflections toward the transducer due to any mismatch in acoustic impedance at the interface between the container wall and the fluid, and so as to substantially maximize the amount of energy delivered to the fluid, thus improving the operating efficiency of the apparatus.

A method of enhancing yield and transfer rate of a packed bed in a reactor chamber of a vessel includes steps of applying acoustic energy to the packed bed, measuring impedance of the packed bed deriving a natural resonance frequency of the packed bed from the measured impedance and applying the acoustic energy to the packed bed at the derived natural resonance frequency of the packed bed.

A method of enhancing yield and transfer rate of a packed bed in a reactor chamber of a vessel includes steps of applying acoustic energy to the packed bed, measuring impedance of the packed bed deriving a natural resonance frequency of the packed bed from the measured impedance and applying the acoustic energy to the packed bed at the derived natural resonance frequency of the packed bed.