The present invention includes methods, devices and systems for isolating a nucleic acid from a fluid comprising cells. In various aspects, the methods, devices and systems may allow for a rapid procedure that requires a minimal amount of material and/or results in high purity nucleic acid isolated from complex fluids such as blood or environmental samples.

The present invention provides a dielectric particle sorting apparatus. The dielectric particle sorting apparatus comprises: a chamber; a bottom electrode in the chamber; and a top electrode disposed at the top of the chamber so as to be spaced from the bottom electrode therein, wherein dielectric particles are positioned on the bottom electrode so that, when an alternating-current electric field is applied, the dielectric particles are electrified to be induced to flow upward, and thus the dielectric particles are sorted, and voltage and frequency are controlled so that the dielectric particles are controlled by particle size, weight, density, permittivity or surface area.

Disclosed are a transfer module capable of effectively discharging very fine particles present on a wall surface or a bottom surface and semiconductor manufacturing equipment including the transfer module. The transfer module configured to transfer a substrate in the semiconductor manufacturing equipment includes a frame body, a track disposed on the frame body, a transfer robot configured to travel along the track, and a particle collection device provided in the frame body. The particle collection device includes a stacked substrate in which three-phase electrodes are disposed to be spaced apart from each other in a horizontal direction and a vertical direction and a three-phase power supply configured to supply three-phase power to the three-phase electrodes.