A centrifuge for cleaning a reaction vessel unit, having a rotor for holding at least one reaction vessel unit with its opening(s) directed outwardly, a motor for rotating the rotor around a rotation axis, a housing having a substantially cylindrical inner surface, wherein a drain is provided for discharging fluid expelled from the reaction vessel unit, wherein a gap is provided between the inner surface and the rotor so that by rotating the rotor a wind is generated which drives the expelled fluid on the inner surface to the drain wherein an aspiration pump is connected to the drain for discharging fluid.

An oil separator includes: a rotor having an inner peripheral space and configured to be rotated by introducing, into the inner peripheral space, oil for separation and processing-target gas containing mist oil so that the mist oil is separated from the processing-target gas; and a case having an internal space and an inlet hole communicating with the internal space, the internal space housing a separation chamber having the rotor, the case including a plurality of convex portions on an inner wall surface which constitutes the internal space, the plurality of convex portions arranged adjacently in a direction along the inner wall surface, and extending in an up-down direction.

A centrifuge for cleaning a reaction vessel unit, having a rotor for holding at least one reaction vessel unit with its opening(s) directed outwardly, a motor for rotating the rotor around a rotation axis, a housing having a substantially cylindrical inner surface, wherein a drain is provided for discharging fluid expelled from the reaction vessel unit, wherein a gap is provided between the inner surface and the rotor so that by rotating the rotor a wind is generated which drives the expelled fluid on the inner surface to the drain wherein an aspiration pump is connected to the drain for discharging fluid.

A centrifuge for cleaning a reaction vessel unit, having a rotor for holding at least one reaction vessel unit with its opening(s) directed outwardly, a motor for rotating the rotor around a rotation axis, a housing having a substantially cylindrical inner surface, wherein a drain is provided for discharging fluid expelled from the reaction vessel unit, wherein a gap is provided between the inner surface and the rotor so that by rotating the rotor a wind is generated which drives the expelled fluid on the inner surface to the drain wherein an aspiration pump is connected to the drain for discharging fluid.

A separator with a rotating system includes a drum with a vertical axis of rotation, which drum is rotatable during operation, and a drum inner chamber subdivided into a lower double-conical centrifuging chamber and an upper double-conical centrifuging chamber. Both centrifuging chambers have solids discharge openings that are openable and closable in the lower centrifuging chamber by a piston slide and in the upper centrifuging chamber by an auxiliary slide. The mass moment of inertia J.sub.Q of the rotating system about a transverse axis Q extending through the center of gravity S of the rotating system of the drum and which is perpendicular to the vertical axis of rotation D is greater than the mass moment of inertia J.sub.D of the rotating system about the vertical axis of rotation D of the rotating system.

A separator with a rotating system includes a drum with a vertical axis of rotation, which drum is rotatable during operation, and a drum inner chamber subdivided into a lower double-conical centrifuging chamber and an upper double-conical centrifuging chamber. Both centrifuging chambers have solids discharge openings that are openable and closable in the lower centrifuging chamber by a piston slide and in the upper centrifuging chamber by an auxiliary slide. The mass moment of inertia J.sub.Q of the rotating system about a transverse axis Q extending through the center of gravity S of the rotating system of the drum and which is perpendicular to the vertical axis of rotation D is greater than the mass moment of inertia J.sub.D of the rotating system about the vertical axis of rotation D of the rotating system.

A separator for the centrifugal processing of a free-flowing product includes a rotatable drum with a vertical rotation axis. The rotatable drum has a centrifuging chamber and a maximum radial diameter. An annular cover is placed onto an upper end of the drum and is configured as a part that does not rotate with the drum during operation. At least one sealing arrangement with two sealing rings is arranged between the drum and the annular cover. A leakage chamber having an outlet is formed between the two sealing rings of the at least one sealing arrangement. A splash ring, which is fastened to the drum for rotation therewith, is arranged in the leakage chamber.

A separator for the centrifugal processing of a free-flowing product includes a rotatable drum with a vertical rotation axis. The rotatable drum has a centrifuging chamber and a maximum radial diameter. An annular cover is placed onto an upper end of the drum and is configured as a part that does not rotate with the drum during operation. At least one sealing arrangement with two sealing rings is arranged between the drum and the annular cover. A leakage chamber having an outlet is formed between the two sealing rings of the at least one sealing arrangement. A splash ring, which is fastened to the drum for rotation therewith, is arranged in the leakage chamber.

Implementations described herein generally relate to a processing apparatus having a rotor cover for preheating the process gas. The apparatus includes a chamber body having a side wall and a bottom wall defining an interior processing region. The chamber also includes a substrate support disposed in the interior processing region of the chamber body, a ring support, and a rotor cover. The rotor cover is disposed on a ring support. The rotor cover is an opaque quartz material. The rotor cover advantageously provides for more efficient heating of process gases, is composed of a material capable of withstanding process conditions while providing for more efficient and uniform processing, and has a low CTE reducing particle contamination due to excessive expansion during processing.

Implementations described herein generally relate to a processing apparatus having a rotor cover for preheating the process gas. The apparatus includes a chamber body having a side wall and a bottom wall defining an interior processing region. The chamber also includes a substrate support disposed in the interior processing region of the chamber body, a ring support, and a rotor cover. The rotor cover is disposed on a ring support. The rotor cover is an opaque quartz material. The rotor cover advantageously provides for more efficient heating of process gases, is composed of a material capable of withstanding process conditions while providing for more efficient and uniform processing, and has a low CTE reducing particle contamination due to excessive expansion during processing.