An apparatus for trapping an exhaust material from a substrate-processing process includes: a cyclone configured to provide the exhaust material with a swirling flow, wherein the exhaust material is discharged from the substrate-processing process using a reaction gas; an atomization module for providing the cyclone with a mist to convert the exhaust material into a powder through a wet oxidation reaction; and a collector configured to collect the powder.

An apparatus for trapping an exhaust material from a substrate-processing process includes: a cyclone configured to provide the exhaust material with a swirling flow, wherein the exhaust material is discharged from the substrate-processing process using a reaction gas; an atomization module for providing the cyclone with a mist to convert the exhaust material into a powder through a wet oxidation reaction; and a collector configured to collect the powder.

The present invention relates to a hydrocyclone contactor module for use in gas purification. In particular, the present invention relates to a CO.sub.2 removing hydrocyclone contactor module, a system comprising one more CO.sub.2 removing hydrocyclone contactor modules as defined herein, a method of removing CO.sub.2 from gas using the hydrocyclone contactor module, a method of retrofitting the hydrocyclone contactor module or system comprising the hydrocyclone contactor module into a submarine atmospheric control system, and a submarine comprising the hydrocyclone contactor module or system comprising the hydrocyclone contactor module. In a one aspect, the present invention relates to a module for removing CO.sub.2 from gas, the module comprising: a hydrocyclone having a cyclonic cone section constructed from a gas-permeable and liquid-impermeable membrane; an inlet to the cyclonic cone section; and an outlet at the apex of the cyclonic cone section.

The present invention relates to a hydrocyclone contactor module for use in gas purification. In particular, the present invention relates to a CO.sub.2 removing hydrocyclone contactor module, a system comprising one more CO.sub.2 removing hydrocyclone contactor modules as defined herein, a method of removing CO.sub.2 from gas using the hydrocyclone contactor module, a method of retrofitting the hydrocyclone contactor module or system comprising the hydrocyclone contactor module into a submarine atmospheric control system, and a submarine comprising the hydrocyclone contactor module or system comprising the hydrocyclone contactor module. In a one aspect, the present invention relates to a module for removing CO.sub.2 from gas, the module comprising: a hydrocyclone having a cyclonic cone section constructed from a gas-permeable and liquid-impermeable membrane; an inlet to the cyclonic cone section; and an outlet at the apex of the cyclonic cone section.

An apparatus for trapping an exhaust material from a substrate-processing process includes: a cyclone configured to provide the exhaust material with a swirling flow, wherein the exhaust material is discharged from the substrate-processing process using a reaction gas; an atomization module for providing the cyclone with a mist to convert the exhaust material into a powder through a wet oxidation reaction; and a collector configured to collect the powder.

An apparatus for trapping an exhaust material from a substrate-processing process includes: a cyclone configured to provide the exhaust material with a swirling flow, wherein the exhaust material is discharged from the substrate-processing process using a reaction gas; an atomization module for providing the cyclone with a mist to convert the exhaust material into a powder through a wet oxidation reaction; and a collector configured to collect the powder.

A foreign matter removal device removes foreign matter contained in a fluid. The fluid is caused to flow into the trap portion and is separated into an inner fluid flowing inside a separation portion and an outer fluid flowing outside the separation portion. First foreign matter contained in the outer fluid and having a higher specific gravity than the fluid is captured in a gap between an inner wall of the trap portion and the separation portion. Separation of second foreign matter contained in the inner fluid and having a lower specific gravity than the fluid is promoted by a gas-liquid separation portion, and the second foreign matter is discharged to outside, through a foreign-matter-discharging-means-connection portion provided in a ceiling on the vertically upper side at a center part of the trap portion, from foreign-matter-discharging means.

A foreign matter removal device removes foreign matter contained in a fluid. The fluid is caused to flow into the trap portion and is separated into an inner fluid flowing inside a separation portion and an outer fluid flowing outside the separation portion. First foreign matter contained in the outer fluid and having a higher specific gravity than the fluid is captured in a gap between an inner wall of the trap portion and the separation portion. Separation of second foreign matter contained in the inner fluid and having a lower specific gravity than the fluid is promoted by a gas-liquid separation portion, and the second foreign matter is discharged to outside, through a foreign-matter-discharging-means-connection portion provided in a ceiling on the vertically upper side at a center part of the trap portion, from foreign-matter-discharging means.