The present inventions relate to the formation of a thin polymer film on a substrate. Apparatus is described for transforming a solid polymer resist into an aerosol of small particles, electrostatically charging and depositing the particles onto a substrate, and flowing the particles into a continuous layer. Apparatus is further described for transforming solid resist into an aerosol of small particles by heating the resist to form a low viscosity liquid such as is compatible with nebulization and applying the techniques of jet or impact nebulization and aerosol particle sizing to form the aerosol. A method is further described of using ionized gas to confer charge onto the aerosol particles and using a progression of charging devices establish an electric field directing the flow of charged particles to the substrate. The progression of charging devices and associated apparatus results in high collection efficiency for the aerosol particles.

This manual gun (2) for applying a coating product comprises a high voltage unit (42), designed for electrostatically charge the coating product at a voltage/flow rate characteristic when it is supplied with electric power, and adjustment means (16), for selecting, from among several pre-adjusted voltage/current characteristics, the voltage/current characteristic according to which the product is electrostatically charged. This gun also comprises a control member (10), which is maneuverable between an inactive configuration, where it opposes the application of the coating product and wherein the high voltage unit (42) is not supplied with electric power, and an active configuration, wherein it does not oppose the application of the coating product and wherein the high voltage unit is supplied with electric power. The adjustment means (16) comprise control buttons, giving the possibility of manually adjusting the flow rate of coating product applied by the gun when the control member (10) is in an active configuration and of selecting the voltage/current characteristic when the control member is in an inactive configuration.

A system capable of depositing a matrix film containing a low amount of impurities (e.g. neutral particles) is provided. The system includes: a first plate electrode 120 having an attachment surface on which a sample plate P is to be attached; a second plate electrode 130 arranged so as to face the attachment surface; a nozzle 110 for spraying a liquid containing a matrix substance into the space between the two electrodes 120 and 130 by an electrospray method, the nozzle 110 arranged so that none of the electrodes 120 and 130 lies on the central axis A of a spray flow of the liquid; and an electric field creator 140 for creating, between the two electrodes 120 and 130, an electric field for forcing electrically charged droplets contained in the spray flow of the liquid containing the matrix substance to move toward the attachment surface.

A system capable of depositing a matrix film containing a low amount of impurities (e.g. neutral particles) is provided. The system includes: a first plate electrode 120 having an attachment surface on which a sample plate P is to be attached; a second plate electrode 130 arranged so as to face the attachment surface; a nozzle 110 for spraying a liquid containing a matrix substance into the space between the two electrodes 120 and 130 by an electrospray method, the nozzle 110 arranged so that none of the electrodes 120 and 130 lies on the central axis A of a spray flow of the liquid; and an electric field creator 140 for creating, between the two electrodes 120 and 130, an electric field for forcing electrically charged droplets contained in the spray flow of the liquid containing the matrix substance to move toward the attachment surface.

A fluid sprayer includes a pump and an electrostatic module configured to provide an electrostatic charge to spray fluid. The electrostatic module is electrically connected to a conductive component of the fluid sprayer, such as a fluid displacement member, fitting, cylinder, or spray tip, to charge the spray fluid via the conductive component. The fluid is electrostatically charged prior to exiting the fluid sprayer.

The present disclosure provides a spray device and a cleaning apparatus. The spray device includes an atomization structure, which is configured to atomize a cleaning liquid when the cleaning liquid is sprayed to form liquid droplets, and a jet structure, which is configured to spray a gas along a determined direction to cause the gas sprayed to collide with the liquid droplets to form atomized particles. The spray device provided by the present disclosure may increase cleaning uniformity and cleaning efficiency to improve cleaning process results, and may further reduce an impact force to the to-be-cleaned surface by the liquid droplets to a certain level. Thus, the damage to a surface pattern of a wafer may be reduced.

The present disclosure provides a spray device and a cleaning apparatus. The spray device includes an atomization structure, which is configured to atomize a cleaning liquid when the cleaning liquid is sprayed to form liquid droplets, and a jet structure, which is configured to spray a gas along a determined direction to cause the gas sprayed to collide with the liquid droplets to form atomized particles. The spray device provided by the present disclosure may increase cleaning uniformity and cleaning efficiency to improve cleaning process results, and may further reduce an impact force to the to-be-cleaned surface by the liquid droplets to a certain level. Thus, the damage to a surface pattern of a wafer may be reduced.

A mounting configuration for an electrostatic spray gun (100) includes a probe having a first non-conductive body encasing a first conductive element and a probe mount extending from the electrostatic spray gun with a second non-conductive body encasing a second conductive element. The mounting configuration includes a first elastomeric ring (140) disposed about the second non-conductive body and configured to interface with the first non-conductive body. The first elastomeric ring (140) is configured to exert a force on the first non-conductive body to bias the first non-conductive body away from the electrostatic spray gun (100) such that the probe is secured in a home position. A pin (128) extending from one of the first non-conductive body and the second non-conductive body is seated in a notch (138) formed in the other one of the first non-conductive body and the second non-conductive body.

An apparatus and methods are provided for a remotely operable sanitation sprayer for quickly disinfecting large indoor spaces. The sanitation sprayer includes a body supported by drive wheels and one or more casters. The drive wheels are configured to rotate at different speeds to steer the sanitation sprayer. A boom comprising a generally elongate member is vertically coupled with the body. Nozzles disposed along the length of the boom are configured to disperse a disinfectant into the indoor space. The nozzles are of an electrostatic variety configured to electrostatically charge the disinfectant exiting the sanitation sprayer. The sanitation sprayer further includes electronic equipment for remotely operating the sanitation sprayer. A front of the sanitation sprayer may be equipped with one or more cameras and sensors that facilitate detecting nearby objects. The cameras and sensors may be configured provide a first-person view to a practitioner remotely operating the sanitation sprayer.

An apparatus and methods are provided for a remotely operable sanitation sprayer for quickly disinfecting large indoor spaces. The sanitation sprayer includes a body supported by drive wheels and one or more casters. The drive wheels are configured to rotate at different speeds to steer the sanitation sprayer. A boom comprising a generally elongate member is vertically coupled with the body. Nozzles disposed along the length of the boom are configured to disperse a disinfectant into the indoor space. The nozzles are of an electrostatic variety configured to electrostatically charge the disinfectant exiting the sanitation sprayer. The sanitation sprayer further includes electronic equipment for remotely operating the sanitation sprayer. A front of the sanitation sprayer may be equipped with one or more cameras and sensors that facilitate detecting nearby objects. The cameras and sensors may be configured provide a first-person view to a practitioner remotely operating the sanitation sprayer.