Embodiments described herein generally related to a substrate processing apparatus, and more specifically to an improved showerhead assembly for a substrate processing apparatus. The showerhead assembly includes a chill plate, a gas plate, and a gas distribution plate having a top surface and a bottom surface. A plurality of protruded features contacts the top surface of the gas distribution plate. A fastener and an energy storage structure is provided on the protruded features. The energy storage structure is compressed by the fastener and axially loads at least one of the protruded features to compress the chill plate, the gas plate and the gas distribution plate.

A cooling system for the decoating system includes a sensor, a control device, and a controller communicatively coupled with the sensor and the control device. The sensor is configured to measure a characteristic of the cooling system in the decoating system, the control device controls the characteristic of the cooling system, and the controller is configured to adjust the control device to adjust the characteristic of the cooling system based on at least one of a measured temperature within the decoating system or the measured characteristic. A method of controlling a temperature of the decoating system includes measuring a temperature within a piece of equipment of the decoating system and measuring a characteristic the cooling system in the piece of equipment of the decoating system. The method includes controlling the cooling system to adjust the characteristic based on at least one of the measured temperature or the measured characteristic.

A cooling system for the decoating system includes a sensor, a control device, and a controller communicatively coupled with the sensor and the control device. The sensor is configured to measure a characteristic of the cooling system in the decoating system, the control device controls the characteristic of the cooling system, and the controller is configured to adjust the control device to adjust the characteristic of the cooling system based on at least one of a measured temperature within the decoating system or the measured characteristic. A method of controlling a temperature of the decoating system includes measuring a temperature within a piece of equipment of the decoating system and measuring a characteristic the cooling system in the piece of equipment of the decoating system. The method includes controlling the cooling system to adjust the characteristic based on at least one of the measured temperature or the measured characteristic.

A coating device for applying a coating agent to the surface of a workpiece. The coating device includes a frame having a workpiece receptacle, a coating agent source, a compressed air source, and a rotary unit which is rotatable in relation to the frame. The rotary unit has a pump and a plurality of spray units, the pump on the suction side being connected to the coating agent source by a fluid-conducting rotary joint connection, and on the pressure side being connected to the spray units. The rotary unit has a pneumatic valve device, and the spray units have in each case one compressed air controlled valve for controlling the delivery of coating agent. The valve on the inlet side is connected to the compressed air source by a fluid-conducting rotary feedthrough and on the exhaust air side is connected to the compressed air controlled valves of the spray units.

A coating device for applying a coating agent to the surface of a workpiece. The coating device includes a frame having a workpiece receptacle, a coating agent source, a compressed air source, and a rotary unit which is rotatable in relation to the frame. The rotary unit has a pump and a plurality of spray units, the pump on the suction side being connected to the coating agent source by a fluid-conducting rotary joint connection, and on the pressure side being connected to the spray units. The rotary unit has a pneumatic valve device, and the spray units have in each case one compressed air controlled valve for controlling the delivery of coating agent. The valve on the inlet side is connected to the compressed air source by a fluid-conducting rotary feedthrough and on the exhaust air side is connected to the compressed air controlled valves of the spray units.

The disclosure relates to a device that saves water, energy, and money and may record the savings with a software analytics dashboard. The device allows cold water to flow out when the shower is first turned on and slows or shuts water flow once the water is heated and the shower is unoccupied. After the presence of the user is detected, the shower flow may resume.

The disclosure relates to a device that saves water, energy, and money and may record the savings with a software analytics dashboard. The device allows cold water to flow out when the shower is first turned on and slows or shuts water flow once the water is heated and the shower is unoccupied. After the presence of the user is detected, the shower flow may resume.

A simulator comprises a fluid property acquiring unit for acquiring the properties of a fluid to be discharged; a mesh division unit for dividing the surface of a CAD model for a workpiece into meshes; an application amount calculation unit for calculating the amount of the fluid applied to each mesh; a maximum film thickness calculation unit for calculating the maximum film thickness of the fluid that each mesh can hold; and a first moving amount calculation unit for calculating, for each mesh, a first moving amount by which the fluid in an amount determined by the properties of the fluid moves relative to the mesh located at a position lower than said each mesh among the meshes adjacent to said each mesh when the film thickness of the applied fluid is larger than the maximum film thickness of the fluid that each mesh can hold.

A dishwasher and method for treating dishes according to a cycle of operation, the dishwasher comprising a tub at least partially defining a treating chamber and a dish rack movably received within the treating chamber. The dishwasher configured for receiving dishes for treatment during the cycle of operation, and moveable relative to the tub. A sprayer located within the treating chamber, configured to emit spray into the dish rack, where a diverter and thermally-responsive actuator within the sprayer can change the direction of the spray.

A dishwasher and method for treating dishes according to a cycle of operation, the dishwasher comprising a tub at least partially defining a treating chamber and a dish rack movably received within the treating chamber. The dishwasher configured for receiving dishes for treatment during the cycle of operation, and moveable relative to the tub. A sprayer located within the treating chamber, configured to emit spray into the dish rack, where a diverter and thermally-responsive actuator within the sprayer can change the direction of the spray.