A coating frame, a coating system, and methods of coating a component using one or more coating frames are disclosed. The coating frame includes a frame member and at least one bracket coupled to the frame member. The bracket includes at least one hanger attachment point extending into a hollow interior of the at least one bracket. The at least one bracket isolates the at least one hanger attachment point from a coating material when the coating frame is used in a coating process. The method includes suspending a component from the coating frame, conveying the coating frame and the component to a coating applicator, and applying a coating material to the coating frame and the component while isolating the at least one hanger attachment point from the coating material via an air pocket formed within the at least one bracket.

Provided is a mist generator including: a container that stores a liquid; a gas supply unit that supplies a gas into the container; and an electrode that generates plasma of the gas between the electrode and the liquid, where the supply direction of the gas fed from the gas supply opening of the gas supply unit is different from a direction in which gravity acts.

According to an embodiment of the present invention, a substrate processing apparatus including: a chamber in which a process is performed on a substrate; a susceptor installed in the chamber to support the substrate; and a showerhead installed above the susceptor, and the showerhead includes: a plurality of inner injection holes defined in an inner area corresponding to a portion above the substrate and injecting a reaction gas downward; and a plurality of outer injection holes defined in an outer area corresponding to a portion outside the inner area and injecting an inert gas along an inner wall of the chamber.

A method of controlling application of at least one material onto a substrate includes configuring a material applicator having an array plate with an applicator array. The applicator array has a plurality of micro-applicators with a first subset of micro-applicators and a second subset of micro-applicators. Each of the plurality of micro-applicators has a plurality of apertures through which fluid is ejected. The first subset of micro-applicators and the second subset of micro-applicators are individually addressable, and a liquid flows through the first subset of micro-applicators and a shaping gas, e.g., air, flows through the second subset of micro-applicators. The flow of shaping gas shapes the flow of the liquid from the first subset of micro-applicators to the substrate.

A method of controlling application of at least one material onto a substrate includes configuring a material applicator having an array plate with an applicator array. The applicator array has a plurality of micro-applicators with a first subset of micro-applicators and a second subset of micro-applicators. Each of the plurality of micro-applicators has a plurality of apertures through which fluid is ejected. The first subset of micro-applicators and the second subset of micro-applicators are individually addressable, and a liquid flows through the first subset of micro-applicators and a shaping gas, e.g., air, flows through the second subset of micro-applicators. The flow of shaping gas shapes the flow of the liquid from the first subset of micro-applicators to the substrate.

Treatment system (100) for treating workpieces (102), having a treatment region (108) for receiving workpieces (102) to be treated, and a plurality of operating devices (130) for performing one or more operations on the workpieces (102) to be treated.

A spray mist assist assembly for a liquid sprayer utilizes an auxiliary blower positioned below the sprayer's nozzle. The positioning of the blower in vertical alignment with but in vertically spaced relation below the nozzle permits the mist expelled from the nozzle to extend farther from the sprayer to enhance the performance of the sprayer.

Embodiments of the disclosed subject matter provide a device including a micronozzle array having separate redundant groups of depositors that each include a delivery aperture disposed between two exhaust apertures. The device may include a first row of depositors of a first redundant group, each of which may be connected in parallel to first common delivery lines and first common exhaust lines. The device may include a second row of depositors of a second redundant group, each of which is connected in parallel to second common delivery and second common exhaust lines. The first row of depositors and the second row of depositors may operate independently from one another. The device may be disposed within a deposition chamber and in proximity of a substrate.

Embodiments of the disclosed subject matter provide a device including a micronozzle array having separate redundant groups of depositors that each include a delivery aperture disposed between two exhaust apertures. The device may include a first row of depositors of a first redundant group, each of which may be connected in parallel to first common delivery lines and first common exhaust lines. The device may include a second row of depositors of a second redundant group, each of which is connected in parallel to second common delivery and second common exhaust lines. The first row of depositors and the second row of depositors may operate independently from one another. The device may be disposed within a deposition chamber and in proximity of a substrate.

The invention relates to a spray unit comprising an axle (10), a disc (20), a liquid applicator (40) and a spray direction assembly (50). The disc is configured to spin about the axle centred on the centre of the disc. The liquid applicator is configured to apply liquid to a surface of the disc. The spray direction assembly partially surrounds the disc. The inner surface of the spray direction assembly is configured to modify the trajectory of all liquid that leaves the outer edge of the disc.