An apparatus for separating particles from an air stream, the apparatus having an inlet region for the waste air stream, an outlet region for the waste air stream, a separating device arranged along the waste air stream, and at least one electrode arrangement which is connected to a high voltage source, wherein a charging region having one or more electrodes is provided to form a layer enriched with electrical charges, and wherein a separating region having separating surfaces is provided, which is subordinate to the charging region. The invention also relates to a method for separating particles from the waste air stream of a coating booth, wherein the waste air stream through a charging region in which particles of the waste air stream are charged, and the waste air stream after leaving the charging region flows through a separating region in which charged particles are deposited on separating surfaces.

An apparatus for separating particles from an air stream, the apparatus having an inlet region for the waste air stream, an outlet region for the waste air stream, a separating device arranged along the waste air stream, and at least one electrode arrangement which is connected to a high voltage source, wherein a charging region having one or more electrodes is provided to form a layer enriched with electrical charges, and wherein a separating region having separating surfaces is provided, which is subordinate to the charging region. The invention also relates to a method for separating particles from the waste air stream of a coating booth, wherein the waste air stream through a charging region in which particles of the waste air stream are charged, and the waste air stream after leaving the charging region flows through a separating region in which charged particles are deposited on separating surfaces.

A substrate treating method for treating substrates with a substrate treating apparatus having an indexer section, a treating section and an interface section includes performing resist film forming treatment in parallel on a plurality of stories provided in the treating section and performing developing treatment in parallel on a plurality of stories provided in the treating section.

A painting booth includes a pair of first inner surfaces facing each other in a first horizontal direction with a painting treatment area therebetween, an air supply duct arranged at the center, in the first horizontal direction, of the upper part of the inside of the painting booth, and an air blow-out port which is formed ranging from a central part to both side parts, in the first horizontal direction, of the air supply duct and which blows out air right downward at the central part and blows out air in an obliquely downward direction of each of the first inner surfaces on the both side parts.

A painting booth includes a pair of first inner surfaces facing each other in a first horizontal direction with a painting treatment area therebetween, an air supply duct arranged at the center, in the first horizontal direction, of the upper part of the inside of the painting booth, and an air blow-out port which is formed ranging from a central part to both side parts, in the first horizontal direction, of the air supply duct and which blows out air right downward at the central part and blows out air in an obliquely downward direction of each of the first inner surfaces on the both side parts.

A robotic system is provided for repeatedly and reproducibly applying a sealant to a seam in an assembled HVAC duct component. The applied sealant has a predetermined location on the assembled HVAC duct component to seal the seam. An assembled HVAC duct component is thus provided having a robot applied sealant on at least one seam in the assembled HVAC duct component, wherein the applied sealant has at least one of a predetermined location, thickness or coverage. The robotically applied sealant can be applied to a blank for forming the assembled HVAC duct component, wherein the sealant is located at locations forming a seam in the assembled HVAC duct component.

A substrate treating method for treating substrates with a substrate treating apparatus having an indexer section, a treating section and an interface section includes performing resist film forming treatment in parallel on a plurality of stories provided in the treating section and performing developing treatment in parallel on a plurality of stories provided in the treating section.

The objective of this invention is to provide a filter module for coating equipment that can improve the efficiency in removing coating-material mist and preventing the outflow of such coating-material mist to the outside. The filter module of this invention is made of a flammable material and includes an outer box, an eliminator and a baffle plate. Of the outer box, the air A2 containing the coating-material mist flows into the outer box from the outer-box inlet and is discharged from the outer-box outlet. The eliminator is formed by arranging zigzag-shaped eliminator elements in parallel to separate the coating-material mist from the air A2. The baffle plate is formed by arranging baffle-plate elements having an inclined surface for guiding the air A2 in parallel into the inflow-side space S2 of the eliminator, and guides the air A2 that has been introduced from the outer-box inlet to the inflow-side space S2.

The objective of this invention is to provide a filter module for coating equipment that can improve the efficiency in removing coating-material mist and preventing the outflow of such coating-material mist to the outside. The filter module of this invention is made of a flammable material and includes an outer box, an eliminator and a baffle plate. Of the outer box, the air A2 containing the coating-material mist flows into the outer box from the outer-box inlet and is discharged from the outer-box outlet. The eliminator is formed by arranging zigzag-shaped eliminator elements in parallel to separate the coating-material mist from the air A2. The baffle plate is formed by arranging baffle-plate elements having an inclined surface for guiding the air A2 in parallel into the inflow-side space S2 of the eliminator, and guides the air A2 that has been introduced from the outer-box inlet to the inflow-side space S2.

A painting booth includes a pair of first inner surfaces facing each other in a first horizontal direction with a painting treatment area therebetween and a pair of first inclined ceiling surfaces inclined downward from a position close to a center, in the first horizontal direction, in an upper part of the inside to an upper end part of each of the pair of first inner surfaces. An air supply duct is disposed at a center of the upper part of the inside, and a side air blow-out port is provided on the air supply duct to blow air against the pair of first inclined ceiling surfaces.