An application apparatus includes: an application needle that applies, to a target, an application material having its viscosity changing under shear; a drive unit that moves the application needle up and down; and a controller that controls the drive unit to move the application needle such that shear is applied to the application material at a shear speed depending on a type of the application material and depending on a target application amount or a target application diameter.

An adhesive coating device for coating an inner wall surface of a workpiece provided with holes with an adhesive. A control device automatically executes an operation of applying the adhesive, the operation including positioning of the workpiece, relative positioning of a nozzle that applies the adhesive in a non-contact manner with respect to the workpiece, and moving of the nozzle, in which the adhesive is ejected and applied in an oblique direction from the nozzle to the inner wall surface of the hole, and the angle of the oblique direction is such an angle that the adhesive linearly ejected from the nozzle located outside the hole can be applied to the inner wall surface of the hole with a desired depth without interfering with an opening part of the hole.

An apparatus for monitoring particles in a chemical solution includes a chemical solution supply device that stores a chemical solution and supplies the chemical solution according to a work start signal of a control unit, a first supply channel that is connected with the chemical solution supply device to supply the chemical solution, a filter that is connected with the first supply channel to purify the chemical solution, a branch channel and a main channel that are branched from the filter, a drain valve that is connected with the branch channel to open and close the branch channel, a particle monitor that is connected with the main channel to detect the amount of particles in the chemical solution, and a dispenser unit that receives the chemical solution from the particle monitor to supply the chemical solution to an object to be worked.

A manifold having a first side, a second side, a first channel extending from the first side to the second side, and a second channel extending from the first side to the second side is disclosed. The first channel and the second channel each define a linear longitudinal axis. In one embodiment, the first channel longitudinal axis and the second channel longitudinal axis are oblique to the first side and the second side of the manifold. The manifold of the present disclosure provides channels that can be easily cleaned and allow for an increased flow performance.

An adhesive dispensing system for applying liquid adhesive to a substrate using different nozzles with the same manifold is disclosed. The adhesive dispensing system includes a manifold having a body, a first clamp configured to engage the body of the manifold, a second clamp configured to engage the body of the manifold, and a nozzle. The first and second clamps secure the nozzle to the body of the manifold. The body of the manifold has a first contact surface that engages the first clamp and a second contact surface that engages the second clamp and the nozzle, where the second contact surface is angularly offset from the first contact surface.

To provide a viscous material supply device facilitating removal operation of viscous material that could be adhered to a platen, a covering sheet used in the viscous material supply device, and a viscous material supply method. A viscous material supply device can include a tank provided with a storage space storing viscous material; a piston slidably inserted into the tank, and is provided with a pressing surface that presses the viscous material and a suction passage through which the viscous material inside the tank flows by pressing force of the pressing surface; and a covering sheet including a covering part covering the pressing surface in the piston and a communication hole communicating with the suction passage.

Provided is a slot die coater including: at least two die blocks; a shim plate provided between the two die blocks to form a slot; and a manifold provided in the die block and configured to accommodate a coating solution, wherein the slot die coater is configured to discharge and apply the coating solution to a substrate. The shim plate includes an open portion such that a coating width of a coating layer applied on the substrate is determined, and a part of a corner of the shim plate defining the open portion from which the coating solution is discharged, is chamfered. When a thickness of the coating solution applied on the substrate is A, the chamfered part has a shape cut by a depth equal to or greater than A to inside of the corner in a region away inward by A from the end of the shim plate.

A supply device includes a collect tank which collects a process liquid from a substrate processing device and heats the collected liquid, and a supply tank connected to the collect tank and which supplies, to the substrate processing device, the process liquid heated in the collect tank. The collect tank includes a collect container that stores the process liquid, a first dividing plate that divides the collect container into a first region where the process liquid is introduced from the substrate processing device, and a second region that introduces the process liquid to the supply tank, piping that feeds, to the second region, the process liquid introduced in the first region, a first heater provided on a path through the piping and which heats the process liquid, and feed piping that feeds, to the supply tank, the process liquid in the second region and heated by the first heater.

Aspects herein relate to coating apparatus and methods for coating medical devices. In an embodiment, a coating system is included having a valve, a fluid supply reservoir in fluid communication with the valve, a reciprocating positive displacement pump in fluid communication with the valve, and a fluid applicator in fluid communication with the three-way valve. The valve can be configured to assume a first fluid transport state and a second fluid transport state, wherein the valve provides fluid communication between the fluid supply reservoir and the reciprocating positive displacement pump when in the first fluid transport state for filling of the reciprocating positive displacement pump, and wherein the valve provides fluid communication between the reciprocating positive displacement pump and the fluid applicator when in the second fluid transport state for applying a coating suspension to a medical device surface. Other embodiments are also included herein.

A liquid supplying device includes: a first pump and a second pump respectively provided in a liquid supplying path that supplies liquid contained in a liquid accommodating portion to an applicator; a filter passing through the liquid that flows toward the applicator; and a return flow path that returns the liquid passing through the filter to the liquid accommodating portion. In a circulating mode that supplies the liquid to the return flow path and stops supply of the liquid to the applicator, any of the first pump and the second pump continuously supplies the liquid to the return flow path.