A dispenser for compound-containing containers includes a receiving chamber for a container; at least one push rod displaceable relative to the receiving chamber; a motor for moving the at least one push rod; a control unit for controlling the motor; a main switch for activating the motor; an operation selection switch for switching between different operation modes; and a first sensor configured to detect a position or movement of the push rod. The operation selection switch is configured to select an amount of the compound to be dispensed in one application run. The dispenser will warn the user once the remaining amount of the compound in the container is less than the needed amount for next application, so that the user will notice the compound shortage and prepare an additional container before starting the next application. Accordingly, rework of cured chemical compounds will be avoided.

A method of processing a plurality of substrates includes immersing the plurality of substrates into a bath solution contained in a bath chamber; generating gas bubbles in the bath solution; projecting light from a light source toward the bath chamber; generating light sensor data by capturing light emanating off the bath chamber after interacting with the gas bubbles with a light sensor; and converting the light sensor data into a metric for the bath solution.

A substrate processing apparatus includes a rotational holding member that rotates a substrate around a predetermined rotational axis while holding the substrate, a liquid supply member that supplies a liquid to the substrate held by the rotational holding member, and a resin-made tubular guard that surrounds the substrate held by the rotational holding member. The tubular guard has an inner peripheral surface and an uneven portion disposed at the inner peripheral surface. The uneven portion has a plurality of recessed portions and a plurality of protruding portions placed between the recessed portions adjacent to each other. The recessed portion has a width smaller than a diameter of a liquid droplet scattering from the substrate held by the rotational holding member and a depth in which the liquid droplet does not come into contact with a bottom portion of the recessed portion in a state in which the liquid droplet is in contact with the protruding portions. The protruding portion has a width that is smaller than the diameter of the liquid droplet and that is smaller than the width of the recessed portion.

A method for operating a double-action piston pump of an application system for applying a fluid medium to a substrate, wherein the piston pump has a piston which is movable between a first reversal point and a second reversal point for delivering the fluid medium, wherein on reaching the first reversal point and the second reversal point, the movement direction of the piston is reversed, wherein during an output period, the fluid medium is output by means of an output device, and during an interruption period, an output of the fluid medium by means of the output device is interrupted, wherein during the interruption period, the movement direction of the piston is reversed, wherein on reversal of the movement direction during the interruption period, the piston is situated at an intermediate position between the first reversal point and the second reversal point.

A substrate processing apparatus includes a placing table configured to hold a substrate having a processing target film, which is decomposed by irradiating an ultraviolet ray thereto under an oxygen-containing atmosphere; a processing chamber, configured to accommodate therein the substrate placed on the placing table, having therein the oxygen-containing atmosphere; and an ultraviolet ray irradiation device configured to irradiate the ultraviolet ray to the substrate within the processing chamber. Further, the placing table is provided with a surrounding member configured to surround the substrate placed on the placing table and restrict a gas introduction amount from an outside of the substrate toward above the substrate.

The present invention provides a draw device. The draw device includes a draw head, a draw opening, a draw tube, at least one pressure hole, and at least one flow guiding channel. The at least one flow guiding channel is respectively arranged corresponding to the at least one pressure hole. Each flow guiding channel communicates with the corresponding pressure hole to take out a drawn liquid inside the pressure hole.

A robot synchronization sealer discharge system is provided. The robot synchronization sealer discharge system is interlocked with a robot for a sealer work of a vehicle factory and includes: a sealer gun mounted on a robot and moving along an application path of a vehicle body to discharge a sealer and a communication unit for receiving a TCP speed of the sealer gun moving based on robot operation. A synchronization controller assigns a unique ID and a received TCP time to the TCP speed and generates a discharge instruction message recording the sealer discharge amount according to the TCP speed. A sealer controller adjusts a discharge of the sealer gun based on the discharge instruction message and feeds back the sealer time according to a discharge completion to the synchronization controller.

Provided is a slot die with variable manifolds and a controlling method thereof. The slot die with the variable manifolds, which applies ink on a substrate to perform a coating process, includes: a first body having a length corresponding to a width of the substrate and having a cavity configured to accommodate the ink supplied from the outside; a second body having a length corresponding to the first body and having an discharge port, from which the ink is discharged, formed in one side thereof when the second body is coupled to the first body; a plurality of variable manifolds disposed in the cavity in a width direction of the substrate and installed so as to reciprocate in the cavity; and a plurality of manifold drivers disposed at one side of the first body and connected to the plurality of variable manifolds to allow the plurality of variable manifolds to reciprocate, respectively, wherein each of the plurality of variable manifolds is independently driven according to a state of the ink coated on the substrate and adjusts a partial discharge amount of the ink discharged from the discharge port by changing a partial volume of the cavity at an arrangement position thereof.

A controller controls a plunger to operate at a measurement speed and discharge the viscous material from the nozzle before applying the viscous material to the workpiece. The controller measures a period of time, from when the plunger starts operating at the measurement speed until a discharge amount of the viscous material reaches a predetermined value, as a time delay amount. The controller further determines an operation speed of the plunger and/or a moving speed of the nozzle during application of the viscous material to the workpiece according to the measured time delay amount.

An apparatus for dispensing a flowable material is disclosed. The apparatus comprises a rotary actuator, a reservoir, containing a hydraulic fluid, a piston, movable inside the reservoir, a linear actuator, coupled to the piston, a gear train, coupling the rotary actuator with the linear actuator, and a flowable-material dispenser, hydraulically coupled with the reservoir.