A development device includes a casing, an airflow former and a substrate holding device. The airflow former forms a downward flow of clean air in the inner space of the casing. The development device further includes a plurality of nozzles and a partition mechanism. The plurality of nozzles supply a processing liquid to a substrate held by the substrate holding device. The partition mechanism partitions the inner space of the casing into a processing space and a non-processing space with a substrate held by the substrate holding device. The processing space is a space including a substrate held by the substrate holding device. The partition mechanism includes a cup that receives a processing liquid that splashes from a substrate, a partition plate that has a nozzle opening and a plurality of through holes and is provided above the cup and a cover member that covers the nozzle opening.

A mixing valve for mixing two coating agent components (e.g. master batch and hardener) to form a multi-component mixture, with two coating agent inlets for supplying the two coating agent components and with two coating agent valves for controlling the coating agent flow through the two coating agent inlets, as well as with a coating agent outlet for discharging the multi-component mixture in a specific outflow direction. At least one of the coating agent valves is formed as a rotary slide valve having two plane-parallel valve discs which are rotatable relative to each other about an axis of rotation.

Provided is a system for supplying a photoresist. In an embodiment, a system for supplying a photoresist includes a pressure adjustment container provided to a supply line connected from a chemical liquid bottle to a first tank, and the pressure adjustment container includes a housing having a space formed therein, a separator separating the space of the housing into a first space and a second space, an inflow port making a photoresist flow in the first space, a discharge port discharging the photoresist from the first space, and a pressurized fluid inflow port supplying a pressurized fluid to the second space, and a volume of the first space varies depending on the supply of the pressurized fluid.

In one embodiment, a substrate treatment apparatus includes a mixer configured to mix a first liquid including a metal element and a second liquid being basicity to generate a third liquid including the metal element and being basicity. The apparatus further includes a supplier configured to supply the third liquid to a substrate. The apparatus further includes a first flow path configured to convey the third liquid from the mixer to the supplier not through a filter that removes particles from the third liquid.

A chemical delivery device for use in a vehicle wash system includes a chemical delivery device with a chemical chamber having an inlet, an outlet, and a one-way valve, and a drive mechanism with a drive shaft joined to a piston in the chemical chamber. Upon the drive mechanism driving the piston in a dispensing direction, the one-way valve is closed and chemical in the chemical chamber is pressurized and the piston causes the pressurized chemical to be dispensed from the outlet, e.g., to a vehicle wash component, and during dispensing, a vacuum is created in the chemical chamber such that a corresponding amount of the chemical to an amount dispensed is drawn into the chemical chamber from a chemical supply via the chemical inlet. Upon the drive mechanism retracting the piston in a resetting direction, the one-way valve is open and permits passage of fluid therethrough for subsequent dispensing.

A vehicle wash assembly for distribution of fluids at a vehicle wash location includes a vehicle wash component operable to dispense fluid into a fluid line for application onto a vehicle by a downstream applicator, and an inlet or outlet of the vehicle wash component is associated with a port configured with an adjustable effective orifice area. A control system receives instructions corresponding to timing information, a target flow rate and/or a target volume of the fluid to be dispensed from the outlet, analyzes the instructions, and generates separate instructions that differ from those received. The separate instructions include a time for when the vehicle wash component is to be actuated, a duration of operation upon actuation, and an effective orifice area of the port. Upon transmission, the separate instructions cause the vehicle wash component to dispense the fluid according to such instructions during a dispensing operation.

An apparatus for coating a medical component has a rotation device configured to clamp and rotate the medical component with a defined rotational speed. An application device is rotationally immovable and configured to apply a viscous coating solution onto a lateral face of the rotating medical component with a defined application rate. A linear movement device is configured to move linearly between the application device and the rotation device with a defined advancing speed. A control device is configured to control the rotational speed, the application rate, and the advancing speed in a manner coordinated to one another depending on the viscosity of the viscous coating solution such that the viscous coating solution can be applied over the full surface of the lateral face in the form of a helix which overlaps along the longitudinal axis.