A spin dispenser module and methods for using the same is disclosed. The spin dispenser module includes a cup having a basin with sidewalls and an exhaust, a rotatable platform situated inside the cup adapted for holding and rotating a substrate, a liquid dispenser disposed over the rotatable platform for dispensing a liquid coating material on top of the substrate, one or more ejector inlets disposed over the rotatable platform, the one or more ejectors connected to a negative pressure source, and a motor coupled to the rotatable platform to rate the rotatable platform at different rotational speeds. The one or more ejector inlets may be translatable and/or rotatable with optionally adjustable suction pressure. The ejector inlets operate after a liquid coating material is dispensed to avoid deposition of suspended organic compounds after a coating is formed.

An apparatus for treating a substrate, the apparatus comprising: a processing container having an inner space; a support unit having a support plate configured to support and rotate the substrate in the inner space; a liquid supply unit supplying treating liquid to the substrate supported by the support unit; and an exhaust unit exhausting an air flow in the inner space, wherein the processing container includes a bottom wall and a side wall extending from the outside end of the bottom wall, the processing container including a first gas-liquid separator provided at the side wall.

A Si-containing film forming composition comprising a catalyst and/or a polysilane and a N—H free, C-free, and Si-rich perhydropolysilazane having a molecular weight ranging from approximately 332 dalton to approximately 100,000 dalton and comprising N—H free repeating units having the formula [—N(SiH3)x(SiH2-)y], wherein x=0, 1, or 2 and y=0, 1, or 2 with x+y=2; and x=0, 1 or 2 and y=1, 2, or 3 with x+y=3. Also disclosed are synthesis methods and applications for using the same.

Embodiments of the disclosure are directed to index-gradient antireflective coatings that include a differential concentration of nanovoids versus thickness of the coating. In one embodiment, an index-gradient antireflective coating may have an index of refraction that varies from a first value to that of a second material. In another embodiment, the substrate may be optically transparent, and made of, for example, polymer, glass, or ceramics. The index-gradient antireflective coating can be fabricated using a non-uniform spin-coating process, by successive thermal evaporation, or by a chemical vapor deposition (CVD) process. In another embodiment, the spin-coating process can include multiple steps that include different concentrations of monomers to solvent, different spin-speeds, or different annealing times/temperatures. Similarly, the thermal evaporation can include multiple steps that include different concentrations of monomers, initiators, solvents, and associated processing parameters. Various other methods, systems, apparatuses, and materials are also disclosed.

Disclosed is a method of coating an object made of a first material and a second material that is different from the first material. The method includes dispensing a polymer solution onto the object, wherein the polymer solution has a property that wets one of the first material and the second material and dewets the other one of the first material and the second material.

Provided is a spin-coating device including a film thickness measurement unit (1) and an operation adjustment unit (2). The film thickness measurement unit (1) measures a real-time thickness of a film formed of coating liquid by means of interferometry. The operation adjustment unit (2) adjusts operation of the spin-coating device in accordance with the real-time thickness of the film formed of the coating liquid.

Compositions comprise a perovskite and a non-perovskite. Perovskites comprise A.sub.xA′.sub.yA″.sub.(1−x−y)BX.sub.3, and non-perovskites may comprise A″, B and X, where A is a first cation, A′ is a second cation, A″ is a third cation, B is a fourth cation, X is an anion. In some instances, A, A′, and A″ are each independently (NH.sub.2).sub.2CH.sup.+, CH.sub.3NH.sub.3.sup.+, Cs.sup.+, Rb.sup.+, or (NH.sub.2).sub.2(C═NH.sub.2).sup.+, with the proviso that A, A′, and A″ are each different. The perovskite may have a first crystal structure in which the anion is corner-sharing, the non-perovskite may have a second crystal structure comprising at least one of an orthorhombic structure, a hexagonal structure, or a perovskite-like structure, and 1−x−y may be greater than about 0.15.

Methods for characterizing a nanotube formulation with respect to one or more particular ionic species are disclosed. Within the methods of the present disclosure, this characterization provides control over the surface roughness (or smoothness) and the degree of rafting within a nanotube fabric formed from such a nanotube formulation. In one aspect, the present disclosure provides a nanotube formulation roughness curve (and methods for generating such a curve) that can be used to select a utilizable range of ionic species concentration levels that will provide a nanotube fabric with a desired surface roughness (or smoothness) and degree of rafting. In some aspects of the present disclosure, such a nanotube formulation roughness curve can be used adjust nanotube formulation prior to a nanotube formulation deposition process to provide nanotube fabrics that are relatively smooth with a low degree of rafting.

A system and/or method for coating a substrate. The system may include a chuck for holding and rotating the substrate, a dispensing subsystem for dispensing a coating material onto the substrate, and a shield member. The shield member may be movable towards and away from the substrate during the coating procedure. The shield member may have an inverted funnel shape. The shield member may include a central chamber through which a solvent vapor flows and a peripheral chamber that is fluidly separated from the central chamber through which a gas flows. During a coating procedure, the shield member may be moved very close to the substrate and the solvent vapor and gas may flow onto the substrate to create a solvent rich ambient around the substrate and prevent aerosols of the coating material from redepositing onto the substrate after being flung off due to spinning of the substrate.

An energy-sensitive composition that yields a cured product with excellent thermal resistance and crack resistance, a cured product of the composition, and a method of forming a cured product. The energy-sensitive composition includes a polysilane and a thermal base generator, in which the thermal base generator includes an ionic compound and a nonionic compound. An anion moiety in the ionic compound preferably includes at least one of an anion having an oxaxanthone skeleton, an anion having a ketoprofen skeleton, and an anion having a fluorenone skeleton.