Systems and methods related to manufacturing of Lithium-Ion cells and Lithium-Ion cell cathode materials are disclosed. In one exemplary implementation, there is provided a method of using a Nitrogen-containing plasma to treat the Lithium-Ion cell cathode materials. Moreover, the method may include treating the cathode materials before and/or after coating the cathode materials on a metal foil.

A coat forming apparatus 100 includes a droplet supply unit 110 and an active species supply unit 120. The droplet supply unit 110 is adapted to spray or drop a droplet for coat forming toward an object 116. The active species supply unit 120 is adapted to supply an active species to be brought into contact with the droplet moving from the droplet supply unit 110 toward the object 116. The coating is formed on a surface of the object 116 by the droplet that has been brought into contact with the active species.

A pharmaceutical packaging comprising a silicone-free lubricating film of crosslinked organic molecules. The method for producing the pharmaceutical packaging comprises: applying a silicone-free organic fluid as a film on a surface of a hollow substrate for the lubricating film; placing the substrate in a vacuum reactor; evacuating the vacuum reactor; generating an alternating electromagnetic field by an AC voltage source; and introducing the alternating electromagnetic field into the interior of the substrate, a field strength thereof in the gas which is present in or introduced into the evacuated cavity of the substrate being sufficient to cause a homogeneous glow discharge under the pressure prevailing in the cavity of the substrate.

A plasma treatment apparatus and a plasma treatment method are provided. The apparatus includes a chamber, a planar plasma-generating electrode, a sample suspension and holding system, and an optical observation system. The chamber defines a processing inner chamber, and the top portion of the chamber has a window. The planar plasma-generating electrode is located in the processing inner chamber for generating a planar plasma. The sample suspension and holding system is disposed opposite to the planar plasma-generating electrode in the processing inner chamber to suspend and hold a sample. The optical observation system is located in the processing inner chamber adjacent to the sample suspension and holding system to measure the thickness range of a planar plasma effective influence region through the window of the chamber.

Embodiments described herein provide methods and apparatus for forming graphitic carbon such as graphene on a substrate. The method includes providing a precursor comprising a linear conjugated hydrocarbon, depositing a hydrocarbon layer from the precursor on the substrate, and forming graphene from the hydrocarbon layer by applying energy to the substrate. The precursor may include template molecules such as polynuclear aromatics, and may be deposited on the substrate by spinning on, by spraying, by flowing, by dipping, or by condensing. The energy may be applied as radiant energy, thermal energy, or plasma energy.

Provided is a heat ray reflective material including, on a support in the following order from the support side: a conductive particle-containing layer that includes fibrous conductive particles having an average length of 5 m to 20 m, and a binder, in which an expansion factor of a thickness before and after the passage of time in a case where 24 hours have elapsed under environmental conditions of a temperature of 63 C. and relative humidity of 50%, is 2.2% or less; and a protective layer that includes a metal oxide derived from a metal alkoxide.

Provided is a heat ray reflective material including, on a support in the following order from the support side: a conductive particle-containing layer that includes the fibrous conductive particles, and a binder having a water absorption rate of 10% or less; and the protective layer.

A method of enhancing hydrophilicity of a hydrophobic polymer material includes pre-treating the hydrophobic polymer material. The pre-treating includes treating the hydrophobic polymer material with a first atmospheric pressure plasma discharge in a first atmosphere including carbon dioxide to obtain a pre-treated polymer material. The method includes treating the pre-treated polymer material with a second atmospheric pressure plasma discharge in a second atmosphere in which an aerosol of an amine is introduced; the amine includes at least one hydrocarbon substituent. A substrate is provided that includes a hydrophobic polymer material having a modified interface. The modified interface includes amine functional groups grafted on the hydrophobic polymer material, the modified interface having a surface energy, which, measured after immersion in water at 20? C. for 3 days, differs from a surface energy of the hydrophobic polymer material by 20 mN/m or less.

Embodiments described herein provide methods and apparatus for forming graphitic carbon such as graphene on a substrate. The method includes providing a precursor comprising a linear conjugated hydrocarbon, depositing a hydrocarbon layer from the precursor on the substrate, and forming graphene from the hydrocarbon layer by applying energy to the substrate. The precursor may include template molecules such as polynuclear aromatics, and may be deposited on the substrate by spinning on, by spraying, by flowing, by dipping, or by condensing. The energy may be applied as radiant energy, thermal energy, or plasma energy.

A method of enhancing hydrophilicity of a hydrophobic polymer material includes pre-treating the hydrophobic polymer material, comprising treating the hydrophobic polymer material with a first atmospheric pressure plasma discharge in a first atmosphere. The first atmosphere includes ammonia to obtain a pre-treated polymer material. The method includes treating the pre-treated polymer material with a second atmospheric pressure plasma discharge in a second atmosphere in which an aerosol of a carboxylic acid is introduced. A substrate is provided as well, the substrate including a hydrophobic polymer material having a modified interface, wherein the modified interface includes carboxylic functional groups grafted on the hydrophobic polymer material, the modified interface having a contact angle with water, which, measured after immersion in water at 20? C. for 3 days, is at least 25? less than a contact angle with water of the hydrophobic polymer material.

Disclosed are sulfur-containing compounds for plasma etching channel holes, gate trenches, staircase contacts, capacitor holes, contact holes, etc., in Si-containing layers on a substrate and plasma etching methods of using the same. The plasma etching compounds may provide improved selectivity between the Si-containing layers and mask material, less damage to channel region, a straight vertical profile, and reduced bowing in pattern high aspect ratio structures.