An apparatus for fabricating a semiconductor device may include a nozzle having a slit configured to eject solution and an ultraviolet emitter provided outside the nozzle. The ultraviolet emitter and the nozzle may be configured to move horizontally. The slit may be provided on a bottom surface of the nozzle.

An apparatus for cleaning HVAC cooling coils comprises a supply and collection assembly having a housing defining an interior space for containing a quantity of cleaning solution. A pump has a pump inlet positioned to be in fluid communication with the cleaning solution and is operative to deliver the cleaning solution to a supply outlet of the supply and collection assembly. A vacuum source has a vacuum inlet positioned to be in fluid communication with an ullage space above the quantity of cleaning solution such that the vacuum source creates negative pressure in the ullage space during operation. A collection inlet is in fluid communication with the ullage space such that the cleaning solution is returned to the interior space through the collection inlet during operation of the vacuum source. A nozzle device is in fluid communication with the supply outlet via outlet piping so as to deliver the cleaning solution to a surface of an HVAC coil unit. A fluid return tool is in fluid communication with the collection inlet via return piping so as to collect used cleaning solution from the HVAC coil unit.

The invention relates to a device for cleaning the surface of a tool for shaping the surface of a large-area fiber composite material body using a highly pressurized cleaning liquid, having a nozzle support which is held on a central bearing in a rotatable manner, at least one jet nozzle which is held in an arm of the nozzle support and out of which the highly pressurized cleaning liquid exits during operation, and a control unit for controlling the cleaning liquid pressure to be applied, wherein the nozzle support is surrounded by a housing which is provided with an opening towards the tool surface to be cleaned. The housing is connected to a suction device by means of which a housing interior equipped with the nozzle support can be suctioned. The housing interior is connected to an outer surrounding area via a pressure valve, and a liquid-tight seal with a flexible shape is arranged on a housing end which forms the opening, wherein the seal can be used to seal the space between the nozzle support and the body surface to be cleaned from the outer surrounding area, and the control unit has at least two pressure range settings. The invention additionally relates to a method for cleaning a surface of a tool.

The inventive concept provides a substrate treating apparatus. The substrate treating apparatus includes a treating bath for liquid treating a plurality of substrates and having an accommodation space for accommodating a treating liquid; and a posture changing member for changing a posture of a substrate which is immersed in the treating liquid from a vertical posture to a horizontal posture.

A method and washer head assembly for washing a surface of a solar panel, includes lowering a washer head frame onto a solar panel. The washer head frame includes a washer frame cross member having a swivel mounted thereon. The swivel is mounted below a center of gravity. The frame includes a top frame rail and a bottom frame rail. A plurality of lath brushes together extend, generally, the length of the washer head frame. The lath brushes are made up to include a plurality of bristles being of sufficient number to support the washer head frame against the surface of the solar panel without damage to the solar panel. The lightness of the frame and the resilience of the brush bristles assure that the washer head frame will not come into damaging contact with the solar panel.

A method and washer head assembly for washing a surface of a solar panel, includes lowering a washer head frame onto a solar panel. The washer head frame includes a washer frame cross member having a swivel mounted thereon. The swivel is mounted below a center of gravity. The frame includes a upper frame rail and a lower frame rail. A plurality of lath brushes together extend, generally, the length of the washer head frame. The lath brushes are made up to include a plurality of bristles being of sufficient number to support the washer head frame against the surface of the solar panel without damage to the solar panel. The lightness of the frame and the resilience of the brush bristles assure that the washer head frame will not come into damaging contact with the solar panel.

A solar panel cleaning apparatus includes at least two rails in which a fluid pipe moves over the surface of a solar panel and sprays a fluid onto the surface of the solar panel in order to remove dust, dirt, film and debris. Nozzles are part of the fluid pipe which sprays the fluid on the surface of the solar panel. Each rail includes grooves along a surface of the rail and wheels are propelled along the grooves the rail. A fluid conduit is attached to at least one wheel within one of the rails and is in fluid communication with the fluid pipe. A self-aligning bearing is connected to the wheels to keep the fluid conduit from winding around itself or the wheel. Humidity and wind sensors control the start and stop of a pump.

A vehicle washing system includes a vehicle treatment area that is configured to receive a vehicle to be dried. At least one dryer media device is positioned in the vehicle treatment area. The at least one dryer media device is configured to dry the vehicle upon contact with the vehicle. An air moving assembly is located adjacent to the at least one dryer media device in the vehicle treatment area, and is configured to remove excess moisture from the at least one dryer media device.

A continuous dryer heat exchanger device has a plurality of heat exchanger units. Waste air of an associated dryer section of the associated continuous dryer is guided through an individual heat exchanger unit and contaminants from the waste air are deposited in the heat exchanger unit. A cleaning device for cleaning the continuous flow heat exchanger device of the contaminants is thereby provided, which cleaning device has a plurality of cleaning units. An associated heat exchanger unit is to be cleaned by means of the individual cleaning unit. A switching device is provided, by means of which the cleaning units are to be switched in series one after the other.

The invention provides a sensor, which includes a sensing surface; a housing including a recess, the sensing surface is located at the bottom of the recess, and the recess includes at least one side wall and an opening circumferentially surrounding the sensing surface. A compressed fluid nozzle is provided in the at least one side wall to nozzle compressed fluid from the compressed fluid nozzle to force the substance on the sensing surface to leave from the opening. This design makes it possible to refresh in situ with good efficiency without involving additional mechanical parts, thus reducing the risk of sensing surface damage, such as scratch wear, in the presence of wear particles.