Disclosed herein is a surface treating method using a Taylor reactor wherein a washing, neutralization, heavy metal removal, etc. can be efficiently carried out, while saving a surface treating time and a treatment liquid and enhancing a treatment efficiency by using a Taylor eddy current which in general is formed at a Taylor reactor. The surface treatment method using a Taylor reactor formed of a cylindrical reaction chamber and a cylindrical rotation body which is configured to rotate in the reaction chamber may include (1) a supply step wherein a surface treatment thing and a surface treatment liquid are supplied into the reaction chamber; and (2) a treatment step wherein the surface treatment thing is stayed in the reaction chamber while rotating the cylindrical rotation body, and the stay time of the surface treatment thing is in a range of 1 minute to 6 hours.

Disclosed herein is a surface treating method using a Taylor reactor wherein a washing, neutralization, heavy metal removal, etc. can be efficiently carried out, while saving a surface treating time and a treatment liquid and enhancing a treatment efficiency by using a Taylor eddy current which in general is formed at a Taylor reactor. The surface treatment method using a Taylor reactor formed of a cylindrical reaction chamber and a cylindrical rotation body which is configured to rotate in the reaction chamber may include (1) a supply step wherein a surface treatment thing and a surface treatment liquid are supplied into the reaction chamber; and (2) a treatment step wherein the surface treatment thing is stayed in the reaction chamber while rotating the cylindrical rotation body, and the stay time of the surface treatment thing is in a range of 1 minute to 6 hours.

An apparatus and method for reprocessing a medical device includes a decontamination basin, a first flush conduit, a second flush conduit, and a manifold. The first and second flush conduits have respective first and second coupling ports configured to fluidly connect to the medical device positioned within the decontamination basin. The manifold is fluidly connected to the first and second flush conduits and configured to distribute the fluid received therein accordingly. The apparatus also includes a first valve, a second valve, and a primary pump configured to discharge the fluid into the manifold at a predetermined supply flow rate. The first and second valve are positioned respectively in the first and second flush conduits for balancing the respective flow rates discharged therefrom at a first predetermined conduit flow rate and a second predetermined conduit flow rate.

An apparatus and method for reprocessing a medical device includes a decontamination basin, a first flush conduit, a second flush conduit, and a manifold. The first and second flush conduits have respective first and second coupling ports configured to fluidly connect to the medical device positioned within the decontamination basin. The manifold is fluidly connected to the first and second flush conduits and configured to distribute the fluid received therein accordingly. The apparatus also includes a first valve, a second valve, and a primary pump configured to discharge the fluid into the manifold at a predetermined supply flow rate. The first and second valve are positioned respectively in the first and second flush conduits for balancing the respective flow rates discharged therefrom at a first predetermined conduit flow rate and a second predetermined conduit flow rate.

A soil remediation facility includes a first screen apparatus including a vibratory screen, a drum mixer apparatus mixing the contaminated soil with a diluent, a saturated steam and hot water, a scrubbing apparatus including a mixing container and an impeller, a second screen apparatus including a vibratory screen. The facility further includes a floatation apparatus which adds a chemical agent for generating bubbles to the soil mixture, injects an air into the soil mixture to desorb contaminants from the soil mixture, and separates the desorbed contaminants by causing the desorbed contaminants to float. The facility further includes a hydro-cyclone apparatus which swirls substances contained in the soil mixture to sort the substances depending on a particle size and a desilter which swirls substances in the soil mixture at a higher angular velocity than an angular velocity in the hydro-cyclone apparatus to sort the substances.

Embodiments of the present disclosure generally relate to cleaning substrates, and more particularly, to methods and apparatus for endpoint detection of a cleaning process. The apparatus includes an outer cleaning basin, a liner, and a circulation system coupled to the liner. The circulation system includes a filter for removing particles from a fluid. A liquid particle counter is fluidly coupled to fluid in the liner for performing particle counting. Methods for using the apparatus are also described.

In a method of cleaning a substrate, a protecting liquid may be sprayed to a surface of the substrate from a first position in a first spray direction. Cleaning droplets may be injected on to the surface of the substrate. The protecting liquid may be sprayed to the surface of the substrate from a second position different from the first position in a second spray direction. For example, the protecting liquid may be always sprayed from the central portion toward the edge portions in the substrate so that the protecting liquid on the substrate may have a uniform thickness.

In a method of cleaning a substrate, a protecting liquid may be sprayed to a surface of the substrate from a first position in a first spray direction. Cleaning droplets may be injected on to the surface of the substrate. The protecting liquid may be sprayed to the surface of the substrate from a second position different from the first position in a second spray direction. For example, the protecting liquid may be always sprayed from the central portion toward the edge portions in the substrate so that the protecting liquid on the substrate may have a uniform thickness.

Provided is a liquid supply unit for supplying a treatment liquid to a nozzle that discharges the treatment liquid to a substrate, the liquid supply unit including: a tank for storing the treatment liquid; a main circulation line for supplying the treatment liquid from an internal space of the tank to the nozzle or for recovering the treatment liquid to the internal space of the tank; a supply line connected to the main circulation line to supply the treatment liquid to the nozzle; and a heater module installed in the main circulation line and heating the treatment liquid flowing through the main circulation line to a predetermined temperature, in which the heater module includes: a pipe in which the treatment liquid flows and which is made of a quartz material; and a heating element provided on a surface of the pipe.

Provided is a liquid supply unit for supplying a treatment liquid to a nozzle that discharges the treatment liquid to a substrate, the liquid supply unit including: a tank for storing the treatment liquid; a main circulation line for supplying the treatment liquid from an internal space of the tank to the nozzle or for recovering the treatment liquid to the internal space of the tank; a supply line connected to the main circulation line to supply the treatment liquid to the nozzle; and a heater module installed in the main circulation line and heating the treatment liquid flowing through the main circulation line to a predetermined temperature, in which the heater module includes: a pipe in which the treatment liquid flows and which is made of a quartz material; and a heating element provided on a surface of the pipe.