An apparatus and a method for treating a surface to definitely, and with a high quality, finish an object to be processed, are obtained. In the step of a first check, the numbers of objects (W) that are carried into areas (20A, 42A, 74A) where the steps of pre-cleaning, shot peening, and post-cleaning, are carried out, are counted and the conditions of the surfaces of the objects are detected. In the step of a second check, the numbers of objects (W) that are carried out of the areas are counted and the conditions of the surfaces of the objects are detected.

A cleaning method of sufficiently cleaning a workpiece is provided. The cleaning method, including: rotating or swinging a workpiece having a first cleaning surface about a table rotation axis; ejecting cleaning fluid from a nozzle along an ejection axis; and swinging the nozzle about a nozzle rotation axis parallel to the table rotation axis to keep a constant impact angle formed between the ejection axis and the first cleaning surface for cleaning the workpiece.

A cleaning module for cleaning a wafer comprises a wafer gripping device configured to support a wafer in a vertical orientation and comprises a catch cup and a gripper assembly. The catch cup comprises a wall that has an annular inner surface that defines a processing region and has an angled portion that is symmetric about a central axis of the wafer gripping device. The gripper assembly comprises a first plate assembly, a second plate assembly, a plurality of gripping pin, and a plurality of loading pin. The gripping pins are configured to grip a wafer during a cleaning process and the loading pins are configured to grip the wafer during a loading and unloading process. The cleaning module further comprises a sweep arm coupled to a nozzle mechanism configured to deliver liquids to the front and back side of the wafer.

An apparatus for matting a coating applied on mainly flat panels includes a cleaning workstation and an excimer treatment workstation where the panels are conveyed by a belt conveyor having an upper outward section and a lower return section. In the cleaning workstation, the upper outward section of the belt conveyor has a V-shaped path, which is formed by two rollers in contact with the plane of advancement of the panel, and a roller in lower position, and which is bridged by advancing rollers, among which gaseous nitrogen is supplied that brushes all sides of the panel. In the treatment workstation, the upper outward section of the belt has a V-shaped path, where the panel is irradiated by an excimer emitter, and which is formed by two rollers in contact with the plane of advancement of the panel, and a roller in lower position, and is bridged by advancing rollers.

A method for removing particles from a semiconductor wafer surface is disclosed. A wafer is being spun on a spin coater contained within a condensing environment. Liquid vapor is then infused into the condensing environment to allow some of the liquid vapor to be condensed onto a surface of the wafer on which particles may adhere while the wafer is being spun. Next, a set of light pulses is applied to the surface of the spinning wafer. Finally, an air stream is utilized to carry the particles off the surface of the wafer.

An air shower device with a non-defeatable function of removing contaminants from objects within a receiving space includes a room, a first barrier, a second barrier, and two revolving doors. The room defines the receiving space. The first barrier is disposed in the receiving space. The second barrier is disposed in the receiving space. The first barrier and the second barrier are misaligned with each other. The first barrier and the second barrier divide the receiving space into a plurality of channels connected to each other. The channels are arranged in a zigzag manner. The two revolving doors are installed at two ends of the channels.

A collection system for particulate matter along a conveyor system of products, which advance in an advancing direction, by means of a carrier gas flow; said collection system having a hood made by moulding of polymeric material; wherein the hood has a bent wall, which delimits a suction area, and a connection, which fluidly connects said suction area with a suction conduit through an opening of said bent wall; wherein said bent wall has a longitudinal axis, which in use is transversal, in particular perpendicular, to the advancing direction of the products.

Process and plant for particulate matter along a conveyor system of products, said plant having a collection system which sucks a carrier gas flow and demarcates, in use, a suction chamber, namely a closed volume, with said product which advances in an advancing direction on an advancing plane; the separation plant having a separation system which is connected to said collection system and gets, in use, said carrier gas flow and particulate matter; wherein said separation system separates particulate matter from the carrier gas flow.

An apparatus on a vehicle comprises one or more sensors, one or more nozzles that output fluid to clean the respective one or more sensors, and a compressor that generates fluid such as compressed air. The compressor is in fluid communication with the one or more nozzles. The apparatus further comprises one or more processors, and a memory storing instructions that, when executed by the one or more processors, cause the system to determine a current velocity of the vehicle and control an operation of the compressor based on the current velocity of the vehicle.

A washing system for use with a shopping cart includes at least one cleaning solution dispensing unit within a housing that is configured to broadcast a solution, spray, fog, or light onto at least one surface of the shopping cart. The system is configured to cleanse the cart and optionally sanitize a surface of the cart from transferable diseases and illnesses. The system may include a pump, a solution of liquid, a light emitting UV light, a heater and so forth. The dispensing unit may be a pressure washer and a sanitizer. Optionally a dryer may be included to dry the shopping carts as they pass through the housing of the washing system.