A dry cleaning apparatus includes a chamber, a substrate support supporting a substrate within the chamber, a shower head arranged in an upper portion of the chamber to supply a dry cleaning gas toward the substrate, the shower head including an optical window transmitting a laser light therethrough toward the substrate support, a plasma generator generating plasma from the dry cleaning gas, and a laser irradiator irradiating the laser light on the substrate through the optical window and the plasma to heat the substrate.

This new application collects data from indoor and outdoor environments and with that data compiles databases, analyzes that data and finds relationships between pollutants, microbes, matter and diseases in humans, plants and animals. This new application is called the Artificial Intelligence Doctor. The application utilizes artificial intelligence, machine learning and parallel conveyor belts with imbedded microscope slides for the identification and analysis of microbes and matter. The application identifies microbes and matter using static electricity applied to microscope slides imbedded in conveyor belts using light microscopes, electron microscopes, polarized light microscopes, x ray machines, artificial intelligence and machine learning algorithms. The easy transfer conveyor belt system utilizes migration of microbes and microbes from drones and robots for easier identification.

There is provided a maintenance device comprising: a case having an opening whose size corresponds to a second gate of a vacuum processing device disposed in a processing chamber having a first gate and the second gate different from the first gate, the first gate and the second gate being used for loading and unloading substrates, the opening being capable of being attached to the second gate in a detachable manner and an airtight manner; a depressurization mechanism configured to reduce a pressure in the case; and a suction mechanism disposed in the case and configured to enter the processing chamber through the opening and conduct suction of deposits on an object in the processing chamber.

A method for cleaning a semiconductor fabrication equipment part having gas holes used in single-wafer type semiconductor fabrication equipment for processing semiconductor wafers, wherein the semiconductor fabrication equipment part having gas holes is formed of aluminum or an aluminum alloy, and has a distribution plate having a plurality of gas holes, the method including: a step (1) of scanning a gas injection surface of the distribution plate, which is a surface facing the wafer, with a laser beam; and a step (2) of bringing the gas injection surface and insides of the gas holes into contact with a cleaning liquid containing an inorganic acid.

A structural coupling for use within a laser system. In a preferred embodiment, a laser system for cleaning purposes would be displaced within a facility having dangerous conditions which could potentially damage the components of the laser, such as within a nuclear power facility. Protecting the laser components typically requires shielding which can fail, resulting in potential contamination of laser generator and components. The structural coupling would allow the laser to pass through a structural element to be used on the interior of the facility such that the end effector may be freely used within the facility while the mobile laser unit itself is safely stored outside of the dangerous area. The coupling allows the laser to pass through the structural element or opening to the end effector without exposing the laser itself to potential contamination

A system for use in maintaining a pipe having a sidewall is provided. The system includes a motorized apparatus sized to fit within the pipe and configured to travel along the pipe through an interior cavity. The motorized apparatus includes a plurality of leg assemblies coupled circumferentially around a body assembly. The body assembly includes an actuator assembly coupled to each leg assembly and configured to independently actuate each leg assembly to adjust a position of each leg assembly. The body assembly also includes at least one sensor configured to collect information associated with the position of each leg assembly. The body assembly also includes a controller communicatively coupled to the motorized apparatus and configured to receive the information from the sensor, and to determine at least one of a pipe diameter and a pitch of the motorized apparatus based on the information from the at least one sensor.

A tire mold cleaning device includes a protective cover, a cleaning mechanism, a loading mechanism and a limiting mechanism. The cleaning mechanism is disposed in the protective cover; the loading mechanism includes linear sliding rails and a loading platform, the linear sliding rails are mounted at a bottom end of an interior of the protective cover, and the loading platform is connected to movable ends of the linear sliding rails. The limiting mechanism includes a base plate and limiting rods, and the base plate is disposed on a bottom end of the interior of the protective cover. A tire mold is cleaned through cooperation of the linear sliding rails and the loading platform, the limiting rods can limit a moving range of the tire mold, thereby preventing the tire mold from sliding under the action of inertia.

A method of making a part is provided. The method includes the step of welding at least two work pieces together to form a weld joint which contains at least one silicate island. The method proceeds with the step of laser cleaning the weld joint to remove at least a portion of the at least one silicate island from a top surface of the weld joint.

An automated or manual laser ablation system and method of use to enable safe, non-user-contact, rapid, and remote cleaning of industrial tubular equipment, e.g. heat-exchangers and reactors. The laser ablation system comprises: a fiber optic cable (12) with a laser probe output end (20), connected to an optics unit (5 or 6) enclosed within a laser probe housing (14). The optics unit comprises: a double convex and/or one or two plano-convex lens; and an Axicon prism, mirror cone, and/or galvo-scanning mirror to emit a rotating or a fixed circular beam. The laser beam cleans a plurality of reactor tubes' internal wall to cause the evaporation of deposit buildups and rust. The laser ablation system further comprises: an air vacuum system (30) positioned to cool the ablation system while removing the debris to a vacuum generator (35); and/or a push motor (60) that pushes and pulls the system through the tubes.

Various embodiments comprise apparatuses and related methods for cleaning a substrate. In one embodiment, an apparatus includes a substrate holder to hold and rotate the substrate at various speeds. An optional inner shield and an optional outer shield, when in a closed position, surround the substrate holder during operation of the apparatus. Each of the inner shield and the outer shield can operate independently in at least one of rotational speed and direction from the other shield. At least one of a front-side laser and a back-side laser are arranged to clean one or both sides of the substrate and edges of the substrate substantially concurrently or independently by impinging a light onto at least one surface of the substrate. A gas flow, combined with a high rotational-speed of the shields and substrate, assists in removing effluents from the substrate. Additional apparatuses and methods of forming the apparatuses are disclosed.