A food processing and/or packaging device comprises at least one food chamber. Via a conduit system, the at least one food chamber is connected to a vacuum pump for generating vacuum in the at least one food chamber. For sterilizing the conduit system and/or the food chamber, a sterilization device is provided. The sterilization device comprises e.g. spray nozzles for introducing cleaning liquid into the conduit system. The cleaning liquid is separated by a liquid separator arranged upstream of the vacuum pump in flow direction.

An approach for treating a fluid transport conduit with ultraviolet radiation is disclosed. A light guiding unit, operatively coupled to a set of ultraviolet radiation sources, encloses the fluid transport conduit. The light guiding unit directs ultraviolet radiation emitted from the ultraviolet radiation sources to ultraviolet transparent sections on an outer surface of the fluid transport conduit. The emitted ultraviolet radiation passes through the ultraviolet transparent sections, penetrates the fluid transport conduit and irradiates the internal walls. A control unit adjusts a set of operating parameters of the ultraviolet radiation sources as a function of the removal of contaminants from the internal walls of the fluid transport conduit.

A system includes a UV light source and an optical medium coupled to receive UV light from the UV light source. The optical medium is configured to emit UV light proximate to a surface from which biofouling is to be removed once the biofouling has adhered to the protected surface. A method corresponds to the system.

The present disclosure relates to a device which charges and cleans a personal wearable device. The device includes a wireless charging circuit disposed within the device, and an ultraviolet light source disposed within the device. Further disclosed is a system which includes a device and a personal wearable device. The device includes a charging unit including wireless charging circuitry, and a cleaning unit including at least one ultraviolet light source; and a personal wearable device.

A washing device comprises a fluid dispenser that operably directs a cleaning fluid to contact one or more objects to be cleaned, the one or more objects to be cleaned being contained by the washing device, a dispensing line directing the cleaning fluid to the fluid dispenser, a compressed air source, an air valve selectively controlling flow of air from the compressed air source into the dispensing line, a cleaning fluid source, a pump selectively pumping the cleaning fluid from the cleaning fluid source into the dispensing line, and a controller. The controller alternatingly activates (a) the pump to pump the cleaning fluid from the cleaning fluid source into the dispensing line and (b) the air valve to force the cleaning fluid from the dispensing line via the fluid dispenser.

Disclosed is a method for manufacturing a semiconductor device, including a step of yielding a pattern 2a of a polysiloxane-containing composition over a substrate 1, and a step of forming an ion impurity region 6 in the substrate, wherein, after the step of forming an ion impurity region, the method further includes a step of firing the pattern at a temperature of 300 to 1,500° C. This method makes it possible that after the formation of the ion impurity region in the semiconductor substrate, the pattern 2a of the polysiloxane-containing composition is easily removed without leaving any residual. Thus, the yield in the production of a semiconductor device can be improved and the tact time can be shortened.

Provided are a mask inspection apparatus and a mask inspection method that can prevent a reduction in a reflectance of a drop-in mirror, which is caused by carbon contaminants. A mask inspection apparatus according to the present invention includes a drop-in mirror including multi-layer film and a reflective surface. The drop-in mirror is configured to reflect illumination light incident on the reflective surface and illuminate the mask. An area of the reflective surface is configured to be greater than an area of an illuminated spot irradiated with the illumination light on the reflective surface. The drop-in mirror is configured to be movable. A position of the illuminated spot on the reflective surface is configured to be moved when the drop-in mirror is moved.

A wafer cleaning module and a method for cleaning a wafer with the wafer cleaning module are disclosed. For example, the wafer cleaning module includes a wafer chuck to hold a wafer, an ozone source to provide ozone gas towards the wafer, and an ultraviolet (UV) lamp module to provide UV light. The UV lamp module includes a UV light source and a rotatable reflector around the UV light source. The rotatable reflector is movable to adjust an amount of UV light directed towards a surface of the wafer.

A wafer cleaning module and a method for cleaning a wafer with the wafer cleaning module are disclosed. For example, the wafer cleaning module includes a wafer chuck to hold a wafer, an ozone source to provide ozone gas towards the wafer, and an ultraviolet (UV) lamp module to provide UV light. The UV lamp module includes a UV light source and a rotatable reflector around the UV light source. The rotatable reflector is movable to adjust an amount of UV light directed towards a surface of the wafer.

Systems, apparatus, methods, and articles of manufacture provide for cleaning a mobile device and other types of portable user devices. In one embodiment, a controller of a mobile device cleaning system may control a sterilization device for cleaning a mobile device (e.g., a phone). In one embodiment, one or more display devices may provide information to observers during a cleaning process.