A deposit removing device disclosed herein removes a deposit that adheres to an exhaust pipe through which gas is exhausted from a chamber that manufactures a semiconductor crystal. The deposit removing device includes: a valve that opens and closes an exhaust outlet that communicates with the exhaust pipe; a sealing cover and a fixed table configured to store the valve, into which an inert gas is introduceable, and configured to isolate the exhaust outlet from the outside; and an exhaust outlet opening/closing portion that includes a cylinder for driving the valve and a cylinder for driving the sealing cover or the fixed table. The cylinder drives the valve to open and close the exhaust outlet, and the cylinder drives the sealing cover or the fixed table to introduce the atmosphere into the sealing cover.

A cleaning apparatus of an exhaust path of a process reaction chamber used in a manufacturing of articles including a semiconductor or an LCD. The cleaning apparatus of the exhaust path includes a housing having an inflow pipe, connected to an upstream end of the exhaust path, an outflow pipe, connected to a downstream end of the exhaust path, and a connecting pipe disposed between the inflow pipe and the outflow pipe. A radio frequency generator in the housing applies radio frequency power to the inflow pipe and to the outflow pipe via respective coils. Plasma induced within the inflow and outflow pipes from RF power applied via the respective coils causes the generation of radicals from the exhaust gas flowing within. The radicals act to dislodge accumulated particulates within the exhaust path downstream of the cleaning apparatus.

A cleaning apparatus of an exhaust path of a process reaction chamber used in a manufacturing of articles including a semiconductor or an LCD. The cleaning apparatus of the exhaust path includes a housing having an inflow pipe, connected to an upstream end of the exhaust path, an outflow pipe, connected to a downstream end of the exhaust path, and a connecting pipe disposed between the inflow pipe and the outflow pipe. A radio frequency generator in the housing applies radio frequency power to the inflow pipe and to the outflow pipe via respective coils. Plasma induced within the inflow and outflow pipes from RF power applied via the respective coils causes the generation of radicals from the exhaust gas flowing within. The radicals act to dislodge accumulated particulates within the exhaust path downstream of the cleaning apparatus.

An electro-anti deposit device is coupled to an irrigation pipe for removing mineral deposit from drippers of the pipe. The electro-anti deposit device includes an engine configured to move the electro-anti deposit device along the pipe. The electro-anti deposit device also includes a mineral deposit removal module. The mineral deposit removal module includes a water container, a battery, and two electrodes. The water container may be configured to create an ionic environment at a dripper. The dripper may be covered with the mineral deposit. The battery may be configured to generate electric current. The two electrodes may be connected to two poles of the battery with a space separating tips of the two electrodes.

An electro-anti deposit device is coupled to an irrigation pipe for removing mineral deposit from drippers of the pipe. The electro-anti deposit device includes an engine configured to move the electro-anti deposit device along the pipe. The electro-anti deposit device also includes a mineral deposit removal module. The mineral deposit removal module includes a water container, a battery, and two electrodes. The water container may be configured to create an ionic environment at a dripper. The dripper may be covered with the mineral deposit. The battery may be configured to generate electric current. The two electrodes may be connected to two poles of the battery with a space separating tips of the two electrodes.

Provided is a method for removing deposited solid residue from equipment used in the processing of (meth)acrylic acid or esters, including the steps of dissolving the solid residue in a cleaning solution comprising an organic carboxylic acid to produce a solid residue slurry; and removing the solid residue slurry from the equipment.

An injection device having an inlet for receiving a fluid, an outlet for injecting the fluid and a chamber therebetween. A control rod is provided in the chamber and includes a duct extending through said control rod. A central rod extends in the duct and is movable between a retracted position and an active position. The central rod and the duct being arranged to prevent fluidic communication between the duct and the chamber when the central rod moves between its retracted and active positions. The central rod and the control rod are further movable relative to each other into a cleaning position, in which the duct is placed in fluidic communication with the chamber.

An injection device having an inlet for receiving a fluid, an outlet for injecting the fluid and a chamber therebetween. A control rod is provided in the chamber and includes a duct extending through said control rod. A central rod extends in the duct and is movable between a retracted position and an active position. The central rod and the duct being arranged to prevent fluidic communication between the duct and the chamber when the central rod moves between its retracted and active positions. The central rod and the control rod are further movable relative to each other into a cleaning position, in which the duct is placed in fluidic communication with the chamber.

A showerhead cleaning and disinfecting system including an injection device located between a showerhead extension pipe and a showerhead. The injection device includes a port configured to receive an agent for cleaning and disinfecting the showerhead.

A showerhead cleaning and disinfecting system including an injection device located between a showerhead extension pipe and a showerhead. The injection device includes a port configured to receive an agent for cleaning and disinfecting the showerhead.