Patent classifications
B08B9/0821
Method of cleaning reaction tube, method of manufacturing semiconductor device, and substrate processing apparatus
There is provided a technique that includes a first annealing step of annealing the reaction tube; a first cleaning step of cleaning an inner surface of the reaction tube, after the first annealing step, with a liquid including a fluorine compound having a first concentration; a first rinsing step of washing away the fluorine compound used in the first cleaning step with pure water; a second annealing step of annealing the reaction tube; a second cleaning step of cleaning the inner surface of the reaction tube, after the second annealing step, with a liquid including a fluorine compound having a second concentration higher than the first concentration; and a second rinsing step of washing away the fluorine compound used in the second cleaning step with pure water.
AUTOMATIC CLEANER
In the present application, the automatic cleaner comprises a housing, a first pipeline for extracting liquid from a bucket to be cleaned, and a second pipeline for injecting detergent into the bucket to be cleaned; the first pipeline and the second pipeline are both disposed on an inner wall of the housing, and the housing is configured to be enclosed to form a receiving space for receiving the bucket to be cleaned.
RINSING AND MIXING LIDS, VESSELS AND CONTAINERS
A reusable vessel comprises a first compartment to store therein a substance and a second compartment separated from the first compartment by a boundary element comprising a wall or membrane having one or more apertures therein. A valve is movable between a closed position, in which the valve seals the one or more apertures, and an open position allowing the substance to be released from the first compartment into the second compartment, or a substance in the second compartment to mix with the substance in the first compartment. A triggering mechanism is coupled to the valve to move the valve between the open and closed positions. The triggering mechanism comprises one or more external elements coupled to one or more internal cam elements to control the valve, which, when triggered causes the one or more external elements to exhibit a visible change to indicate the open and closed positions of the valve.
DEVICE FOR CLEANING AN OBJECT
A cleaning device for cleaning an object having a peripheral edge defining a tubular portion of the object that is open at least one of its ends. The cleaning device has a cleaning enclosure, a first fluid feed duct for feeding fluid to the enclosure, and a first fluid discharge duct for discharging fluid from the enclosure. The cleaning enclosure has first and second enclosure portions. When the device is in its closed configuration at least one central zone of the second enclosure portion extends inside the first enclosure portion in order to define a reception space for receiving the object between the first enclosure portion and the central zone, which reception space extends all around the central portion.
Improved Laser Cleaning System
An automated cleaning system for cleaning an object, comprising a laser configured to be directed at the object, to remove contaminants from the object; detection system to identify details about the object; rotation apparatus to rotate the object in a cleaning position; and control apparatus to direct the laser at the object in the cleaning position, and operate the laser to clean the object.
INVERTING AND CLEANING DEVICE
An inverting and cleaning device includes a positioning mechanism, an inverting mechanism, and a cleaning mechanism. The positioning mechanism is adapted to move a drum to a first position. The inverting mechanism includes a holding member. When the drum is located at the first position, the holding member clamps a drum body of the drum and inverts the drum to a second position where an opening on a top of the drum faces downward. The cleaning mechanism includes a cleaning tool. When the drum is located at the second position, the cleaning tool enters the drum through the opening of the drum for cleaning an inside of the drum.
INSTALLATION INTENDED TO AUTOMATICALLY REMOVE LABELS OF CRATES
Installation provided with at least one high-pressure circuit comprising at least one high-pressure pump and rotating nozzles attacking the four sides of crates in order to automatically remove labels, wherein the installation further comprises a low-pressure circuit able to clean the installation inwardly and to transport labels to specific filters so that stoppages are diminished and further able to recirculate the water of the high-pressure and low-pressure circuits, and wherein trolleys holding the crates are able to rotate by means of a predefined path on perimetral guides of the frame so that the jets of the nozzles attack the required walls of the crates on four sides.
Compressed Gas Tank or Cylinder Rotating Clean-Out Apparatuses and Methods of Using the Same
A compressed gas tank or cylinder rotating clean-out apparatus comprises a rotating apparatus for clamping and rotating a compressed gas tank or cylinder for aiding in clean-out of the same. More specifically, the apparatus comprises a platform and strap for holding a compressed gas tank or cylinder, such as a SCUBA tank, and providing for the rotating of the same to dispose in various rotated positions so that the same may be more easily cleaned. Systems and methods for using the same are further provided.
Cleaning systems and methods for semiconductor substrate storage articles
Provided are methods and systems for cleaning various semiconductor substrate storage articles, in particular, FOUP doors. The FOUP doors and other similar articles often have openings that may get contaminated with cleaning liquids if not covered. The described cleaning system includes contact points for engaging the article and covering these openings. The contact points may be also used for supporting the article and for pressurizing the openings in the article with a gas. The gas may be supplied through one or more contact points. It prevents liquids from getting into the openings if even the openings are not completely sealed. The pressurization may be maintained through the entire wet portion of the cleaning process. The article may be rotated within the cleaning system while cleaning and/or other liquids or gases are dispensed through a set of spraying nozzles. Spraying nozzles may move to enhance cleaning of the article.
Apparatus and process for processing of glass containers and process for manufacturing glass containers including such a processing
An apparatus and process for processing outer surfaces of glass containers (50) for use in pharmaceutical, medical or cosmetic applications, said glass containers (50) having a cylindrical main body (52). The process comprises: providing (S1) a plurality of containers (50); separating individual containers from said plurality of containers (50); and sequentially conveying said individual containers (50) through a processing station (1; 61). In the processing station (1; 61), the individual containers (50) are rotated about a longitudinal axis thereof while outer surfaces of the cylindrical main bodies (52) are in contact with a scrubbing member (27; 30, 35), for reducing an adhesive surface behavior of the outer surfaces of the cylindrical main bodies (52) of the individual containers. In this manner the surface properties of glass containers may be enhanced significantly with a cost-efficient and simple processing to thereby prevent undesired ‘stickiness behavior’ of the glass containers.