A dry cleaning device adapted to clean a container component of a container of a semiconductor manufacturing process and adapted to clean the container component by carbon dioxide snowflakes. The dry cleaning device can first inspect the container component before and after cleaning, clean the container component by carbon dioxide snowflakes according to a predetermined cleaning working set, and forwards the container component to a next workstation once the cleaning of the container component is complete. The dry cleaning device is adapted to clean a container of a semiconductor manufacturing process in a fast and effective manner without involving any liquid solvents.

A dry cleaning device adapted to clean a container component of a container of a semiconductor manufacturing process and adapted to clean the container component by carbon dioxide snowflakes. The dry cleaning device can first inspect the container component before and after cleaning, clean the container component by carbon dioxide snowflakes according to a predetermined cleaning working set, and forwards the container component to a next workstation once the cleaning of the container component is complete. The dry cleaning device is adapted to clean a container of a semiconductor manufacturing process in a fast and effective manner without involving any liquid solvents.

An illumination and visualization device is provided along with a method of illuminating and visualizing and a formulation for an enhanced visualization (EV) coating for a baking pan or similar implement. The EV coating having a fluorescent component that shows the condition of the coating and any interfering materials that can adhere to the pan during use. The method and device for illumination and visualization can have a conveyance device which moves baked goods pans. The pans are illuminated with a known energy source or light. As noted, the EV coating having been applied as, for instance but not limited to, a release or non-adhesion coating layer reacts with and re-emits or reflects energy when subjected to certain incident energy forms or frequencies in the form of, for instance, light. The device can then provide an image of the pan and highlight any variations in the light re-emitted by the coating which can indicate wear on the coating or, in another non-limiting example, the presence of baked on debris.

An illumination and visualization device is provided along with a method of illuminating and visualizing and a formulation for an enhanced visualization (EV) coating for a baking pan or similar implement. The EV coating having a fluorescent component that shows the condition of the coating and any interfering materials that can adhere to the pan during use. The method and device for illumination and visualization can have a conveyance device which moves baked goods pans. The pans are illuminated with a known energy source or light. As noted, the EV coating having been applied as, for instance but not limited to, a release or non-adhesion coating layer reacts with and re-emits or reflects energy when subjected to certain incident energy forms or frequencies in the form of, for instance, light. The device can then provide an image of the pan and highlight any variations in the light re-emitted by the coating which can indicate wear on the coating or, in another non-limiting example, the presence of baked on debris.

A water inspection apparatus includes an injector, a suction unit, and a water measurement unit. The injector injects a drying gas into a bottle. The suction unit sucks the drying gas from the bottle. The water measurement unit measures the water concentration of the drying gas sucked by the suction unit.

The invention comprises a steam cleaning system that can rapidly handle multiple objects in an efficient and useful way. For example, objects used for shipping or moving food products in the food manufacturing or food services industries must either be new, clean and used once and then discarded, or re-used and thus cleaned to ensure no contamination is present. Layer pad objects or other separating surfaces are often used in these industries and often when these objects are used in stacking and pelletizing large shipments of food products, where the payer pad or other separating or container objects or surfaces help contain or maintain the integrity of the food products during shipment. In an important aspect of the invention, a plastic layer pad cleaning system is described. In other aspects, other surfaces, containers, or other separating objects used in shipping or distribution or food products are efficiently cleaned using a steam cleaning and conveying system. The system can comprise a steam generator, one or more steam cleaning units where optionally an individual object or layer pad is cleaned one at a time, one or more drying units, and specialized conveying and holding units for moving objects through a cleaning apparatus, and then subsequently drying and handling or storing the objects for future use.

Proposed is a POD cleaning chamber including: a cleaning sub-chamber including an entrance door and accommodating and cleaning a separation POD being transported, the separation POD resulting from separating a POD; a drying chamber including an exit door and drying the separations POD transferred from the cleaning sub-chamber; a shutter being arranged between the cleaning sub-chamber and the drying chamber, the shutter being configured to ascend and descend; and a chamber moving mechanism transporting the separation POD from the cleaning sub-chamber to the drying chamber.

A system for cleaning a container such as semiconductor wafer carrier includes a housing, a cleaning unit in the housing, an analyzing unit within the housing, and a vacuum unit within the housing. The cleaning unit comprises a cleaning chamber, and is configured to spray a cleaning medium into the container in the cleaning chamber and dry the container. The analyzing unit is configured to analyze air inside the container coming out of the cleaning chamber, and provide a testing result for each ingredient of possible airborne molecular contamination (AMC) and humidity. The vacuum unit comprises a vacuum chamber configured to apply vacuum onto a container when the testing result for an ingredient is higher than a respective threshold.

A system for cleaning a container such as semiconductor wafer carrier includes a housing, a cleaning unit in the housing, an analyzing unit within the housing, and a vacuum unit within the housing. The cleaning unit comprises a cleaning chamber, and is configured to spray a cleaning medium into the container in the cleaning chamber and dry the container. The analyzing unit is configured to analyze air inside the container coming out of the cleaning chamber, and provide a testing result for each ingredient of possible airborne molecular contamination (AMC) and humidity. The vacuum unit comprises a vacuum chamber configured to apply vacuum onto a container when the testing result for an ingredient is higher than a respective threshold.

A self-contained monitoring assembly and method of self-cleaning for monitoring a process fluid. The assembly and method includes a closed loop of fluid flow having at least one housing having a sensor chamber, a sensor positioned within the sensor chamber, an injection nozzle receiving the process fluid through an inlet fluid passage and discharging the process fluid through an outlet passage into the sensor chamber, and a drain passage. The injection nozzle is positioned at an oblique angle relative to a contact surface of the sensor such that the contact surface is impinged by the process fluid. Impingement by the process fluid against the contact surface allows measurement of the process fluid by the sensor and cleans the contact surface.