Disclosed herein is a plasma-resistant chamber component and a method for manufacturing the same. A plasma-resistant chamber component of a semiconductor processing chamber that generates a plasma environment includes a ceramic article having multiple polished apertures. A roughness of the multiple polished apertures is less than 32 in.

Disclosed herein are systems and methods for polishing internal surfaces of apertures in semiconductor processing chamber components. A method includes providing a ceramic article having at least one aperture, the ceramic article being a component for a semiconductor processing chamber. The method further includes polishing the at least one aperture based on flowing an abrasive media through the at least one aperture of the ceramic article, the abrasive media including a polymer base and a plurality of abrasive particles.

A curtain assembly comprises a rotatable drive element wherein at least one helical guide structure is formed on, or into, the outer surface of the drive element. A drive attachment element having a structure that communicates with the helical guide structure to move the drive attachment element axially along the drive element when the drive element is rotated. Specific embodiments incorporate either a manual or motor-driven rotation assembly for rotating the drive element. Further specific embodiments involve a helical guide structure that comprises a helical groove and a structure that comprises a tooth that engages with the helical groove.

Disclosed herein are systems and methods for polishing internal surfaces of apertures in semiconductor processing chamber components. A method includes providing a ceramic article having at least one aperture, the ceramic article being a component for a semiconductor processing chamber. The method further includes polishing the at least one aperture based on flowing an abrasive media through the at least one aperture of the ceramic article, the abrasive media including a polymer base and a plurality of abrasive particles.

A rotary boring tool with detachable inserts, including a rotating insert carrier body including cartridges holding detachable cutting inserts configured to machine a cylinder barrel by axial movement of the tool in the barrel, and including a first cutting insert configured to rough-cut grooves in the material to be machined, a second insert configured to finish the grooves roughly cut by the first insert, and a third levelling insert configured to level rough material generated by the first two inserts.

A curtain assembly comprises a rotatable drive element wherein at least one helical guide structure is formed on, or into, the outer surface of the drive element. A drive attachment element having a structure that communicates with the helical guide structure to move the drive attachment element axially along the drive element when the drive element is rotated. Specific embodiments incorporate either a manual or motor-driven rotation assembly for rotating the drive element. Further specific embodiments involve a helical guide structure that comprises a helical groove and a structure that comprises a tooth that engages with the helical groove.

A dual tip cutter (10) includes a body (12) defining a feed direction (F), a cutting direction (C) perpendicular to the feed direction, and a depth direction (D) perpendicular to both feed and cutting directions. A first cutting portion (35) is fixed relative to the body at a body first end. A second cutting portion (45) is fixed relative to the body at the body first end, adjacent the first cutting portion. The first and second cutting portions are stacked in the cutting direction so that the first cutting portion forms a leading cutting portion and the second cutting portion forms a trailing cutting portion for simultaneous cutting. The second cutting portion extends from the body further in the depth direction than the first cutting portion. A relative position between the first and second cutting portions is set such that a total chip load is shared between the first and second cutting portions in a predetermined ratio (K).

A method for roughening an inner surface (8) of a cylindrical bore (9), in particular a running surface in a cylindrical bore or cylinder liner of an internal combustion engine. A rotating tool (1) is moved in a translatory manner in the axial direction of the cylindrical bore (9) and has a radial cutting head (7). A chip (12) is lifted off by at least one cutting edge of the radial cutting head (7) and is broken away via a further edge or face of the radial cutting head (7), in order to produce the roughened surface. The tool (1) is introduced into the cylindrical bore (9) or is passed through it, after which a positioning of the tool (1) in the radial direction takes place, and after which the removal of the material takes place via the rotating tool (1) when the tool is moved in its advancing direction (V) out of the cylindrical bore. A tool (1) is also claimed.