B23D57/0046

Method for slicing semiconductor single crystal ingot
09876078 · 2018-01-23 · ·

An amount of warp of a wafer is not only reduced, but the amount of warp of the wafer is also accurately controlled to a desired amount. The present invention relates to a method for slicing a semiconductor single crystal ingot, by which a cylindrical semiconductor single crystal ingot is bonded to and held by a holder in a state where the ingot is rotated at a predetermined rotation angle around a crystal axis of the ingot different from a center axis of a cylinder of this ingot and the ingot is sliced by a cutting apparatus in this state. The predetermined rotation angle at the time of bonding and holding the ingot with the use of the holder in such a manner that an amount of warp of a wafer sliced out by the cutting apparatus becomes a predetermined amount.

Wire saw

Provided is a wire saw (1) that cuts an ingot (I) while swinging the ingot. The wire saw (1) includes a first driving block (100), a second driving block (110), and an ingot holder (120). When the first driving block (100) moves, the second driving block (110) moves in a direction perpendicular to a moving direction of the first driving block (100), and simultaneously the ingot holder (120) is swung. The ingot holder (120) is transferred to a z-axial direction in which the ingot is cut by a lifting block (73), and the lifting block (73) moves independently of the first or second driving block (100 or 1110). Thus, the ingot (I) can be swung separately from the lifting block (73), and be inhibited from moving left and right. Since only the first driving block (100) is controlled, easy control and a simple structure are provided.

Method for cutting a shell-type object, a cutter system and a vessel equipped with the cutter system

An object of the invention is achieved by a method for cutting an elongated shell-type object. The method may include steps of providing a gantry defining a portal and comprising a wire grid operable in the portal; operating the wire grid, whilst moving the shell-type object through the wire grid along a lateral-axis (Z) substantially perpendicular to the portal. The method is performed by a stationary gantry, where the shell-type object is moved through the portal. Thereby, the method is simplified as there is no need for a rail system for moving the gantry.