Patent classifications
B23H1/028
WIRE ELECTRICAL DISCHARGE MACHINING APPARATUS AND METHOD OF MANUFACTURING SEMICONDUCTOR WAFER
A controller controls cutting of simultaneously cutting wafers by performing electrical discharge machining while moving a workpiece relative to cutting wire sections in a direction at right angles to the cutting wire sections in a plane perpendicular to the axial direction of main guide rollers and leaving a connection at which a part of each wafer that has been incompletely cut is still connected to the workpiece, and shape correction of causing the cutting wire sections to perform scanning while performing electrical discharge machining along a path of the cutting wire sections in a cutting direction at the time of the cutting to simultaneously correct the shape of a plurality of cut surfaces that are cut at the time of the cutting.
SYSTEM AND METHODS OF MULTIPLE ELECTRODE ELECTRIC DISCHARGE MACHINING
An electric discharge machining (EDM) system includes an electrode set having a plurality of electrodes. Each electrode is electrically-isolated from the other electrodes. The EDM system includes a power supply configured to generate an electric discharge between a workpiece and the electrode set to remove material from the workpiece. The power supply includes a multi-loop driver system and an AC-to-DC component that outputs DC electric power. The multi-loop driver system includes a plurality of power loop circuits coupled to an output of the AC-to-DC component. Each power loop circuit is electrically-isolated from other power loop circuits and is coupled to at least one electrode. The multi-loop driver system includes a drive controller coupled to the power loop circuits. The drive controller is configured to transmit at least one control signal to at least one power loop circuit to drive the AC-to-DC component to generate the electric discharge.
WIRE ELECTRICAL DISCHARGE MACHINE
A wire electrical discharge machine includes: an electrode unit for supplying a machining current to an electrode gap; a switch for changing impedance between a machining power source and the electrode unit; and a controller for, at the time of a core retaining process, controlling the switch to set the impedance to be higher than the impedance in a cutting process and thereby suppressing the machining current flowing through the electrode gap.
Electro discharge machining system with batch processing of holes and manufacturing method therefor
An electro discharge machining system, and manufacturing method therefor, including: providing an electro discharge machining unit and control; providing a workpiece holder; providing a tool holder for a tool having an electrode array; and operatively connecting the workpiece holder and the tool holder to the electro discharge machining unit and control for batch electro-discharge machining of a workpiece to a configuration compatible with the electrode array.
Wire electric discharge machining apparatus
A wire electric discharge machining apparatus is constructed in such a manner as to include: a wire electrode having a plurality of cutting wire portions that are separated from one another in parallel and are opposed to a workpiece; a machining power supply that generates a pulsed machining voltage; a plurality of power feed contact units that are electrically connected to the cutting wire portions and apply the machining voltage between the cutting wire portions and the workpiece; and a nozzle that ejects machining liquid from an ejection opening toward an electrode gap along the cutting wire portions.
WIRE ELECTRICAL DISCHARGE MACHINE
A wire electrical discharge machine includes a first voltage applying circuit, a second voltage applying circuit, and a switch controller. The first voltage applying circuit includes a first DC power source for applying a positive polarity voltage across an electrode gap, and a first switch for on/off-switching of application of the positive polarity voltage. The second voltage applying circuit includes a second DC power source for applying a reverse polarity voltage to the electrode gap, and a second switch for on/off-switching of application of the reverse polarity voltage. The switch controller controls the first switch and the second switch so that the first switch and the second switch are not turned on simultaneously. The first DC power source and the second DC power source are set up so that the absolute value of the reverse polarity voltage is lower than the absolute value of the positive polarity voltage.
Electrical discharge machining system having independent electrodes
An electrical discharge machining (EDM) system according to embodiments includes: a guide structure; a plurality of electrode devices positioned at least partially within the guide structure, the plurality of electrode devices aligned to provide a plurality of electrical discharges to a workpiece, each of the plurality of electrode devices including: an electrode for positioning proximate the workpiece; an electrode holder coupled to the electrode for holding the electrode proximate the workpiece; and a driver coupled to the electrode holder, the driver adapted to modify a position of the electrode holder and the electrode; and a control system operably connected with the driver, the control system configured to provide instructions to the driver of at least one of the plurality of electrode devices to modify a position of the at least one of the plurality of electrodes independently of at least one other one of the plurality of electrodes.
Method and System of Surface Polishing
A method of polishing a surface of an object disposed within a gas chamber is provided. The method includes filling the gas chamber with a discharging medium to a predefined pressure, applying a voltage between an electrode and the surface, calibrating a height of the electrode relative to the surface so as to establish electrical breakdown threshold criteria, and scanning the electrode with respect to the surface so as to sequentially position the electrode over a plurality of locations on the surface, each location characterized by a surface error. When a respective location in the plurality of locations has a surface error that meets the electrical breakdown threshold criteria, electrical breakdown occurs, whereby the electrical breakdown results in a discharging pulse that polishes the surface.
ELECTRICAL DISCHARGE MACHINING APPARATUS
An EDM machine includes a machine head, a wire guide, a machining wire extending from the wire guide to the machine head, a rotary table mounted to a first surface and a fixed table mounted to the rotary table, and a fixture mounted to the fixed table. The fixture includes a mounting portion substantially circumscribing the fixture. The mounting portion further includes a mounting surface. The mounting surface is closer to a first surface than an upper surface of the fixed table.
Wire electric-discharge machining device, wire electric-discharge machining method, thin-plate manufacturing method, and semiconductor wafer manufacturing method
A wire electric-discharge machining device includes a control unit that selects a cutting wire to which a pulse voltage is applied by a pulse-voltage generation unit on a basis of an angle formed between an end face of a workpiece and a plane including a plurality of cutting wires, which are not parallel to the end face, an interval between parallel cutting wires, and a relative distance between the cutting wires and the workpiece. A drive unit drives a workpiece in a direction not vertical to the plane including the cutting wires, and the workpiece is cut by electric-discharge machining by applying a pulse voltage.