Patent classifications
B23H1/028
Electric discharge machining apparatus, electric discharge machining method, and semiconductor substrate manufacturing method
An electric discharge machining apparatus includes: electrodes the total quantity of which is equal to N; an alternating-current power source; and capacitors the total quantity of which is equal to N. The alternating-current power source applies an alternating voltage commonly to the electrodes. One end of each of the capacitors is connected to a corresponding one of the electrodes, whereas the other ends of the capacitors are commonly connected to the alternating-current power source.
Multiwire electric discharge machine and multiwire electric discharge machining system
A multiwire electric discharge machine includes: a machining power source that applies a machining pulse voltage between a workpiece and a cutting wire section; and a wire breakage detection unit that detects breakage of a wire electrode. The wire breakage detection unit is electrically connected in parallel to a wire electrode portion stretched over a section from one location on the feeding side of the wire electrode to one location on the ejection side of the wire electrode, and the wire breakage detection unit includes: a wire breakage detection circuit in which a wire breakage detection power source constantly supplying direct current to the wire electrode portion at least while the workpiece is undergoing a cutting process and a current limiting resistor are connected in series; and a wire breakage determination unit that determines breakage of the wire electrode based on current flowing through the current limiting resistor.