An additive manufactured workpiece includes one or more cavities having an inner surface. A dielectric interface is formed in the cavity, and conforms to the inner surface. The additive manufactured workpiece further includes an in-situ electrode in the cavities. The dielectric interface is interposed between the in-situ electrode and the inner surface of the workpiece.

A substrate processing apparatus includes a substrate rotator, a processing liquid supply, an anode and a cathode, and a controller. The substrate rotator is configured to hold and rotate a substrate. The processing liquid supply is configured to supply a processing liquid to the substrate held by the substrate rotator. The anode and the cathode are configured to apply a voltage to the processing liquid supplied from the processing liquid supply. The controller is configured to control the substrate rotator, the processing liquid supply, and the anode and the cathode. The controller allows, by contacting the anode and the cathode with the processing liquid independently, the processing liquid in contact with the anode and the processing liquid in contact with the cathode to be supplied to the substrate while being spaced apart from each other when the substrate is rotated.

A substrate processing apparatus includes a substrate rotator, a processing liquid supply, an anode and a cathode, and a controller. The substrate rotator is configured to hold and rotate a substrate. The processing liquid supply is configured to supply a processing liquid to the substrate held by the substrate rotator. The anode and the cathode are configured to apply a voltage to the processing liquid supplied from the processing liquid supply. The controller is configured to control the substrate rotator, the processing liquid supply, and the anode and the cathode. The controller allows, by contacting the anode and the cathode with the processing liquid independently, the processing liquid in contact with the anode and the processing liquid in contact with the cathode to be supplied to the substrate while being spaced apart from each other when the substrate is rotated.

A machine tool includes a machining unit for feeding cutting oil to a work surface of a workpiece and machining the work surface, an optical sensor body unit dividing light outputted from a frequency sweep light source for outputting light whose frequency varies periodically into irradiation light with which the workpiece is to be irradiated and reference light, irradiating the workpiece with the irradiation light, detecting a peak frequency of interference light between reflected light which is irradiation light reflected by the workpiece, and the reference light, and measuring the distance from the machine tool to the work surface on the basis of the peak frequency, and a shape calculation unit calculating the shape of the workpiece on the basis of the distance measured by the optical sensor body unit.

A machine tool includes a machining unit for feeding cutting oil to a work surface of a workpiece and machining the work surface, an optical sensor body unit dividing light outputted from a frequency sweep light source for outputting light whose frequency varies periodically into irradiation light with which the workpiece is to be irradiated and reference light, irradiating the workpiece with the irradiation light, detecting a peak frequency of interference light between reflected light which is irradiation light reflected by the workpiece, and the reference light, and measuring the distance from the machine tool to the work surface on the basis of the peak frequency, and a shape calculation unit calculating the shape of the workpiece on the basis of the distance measured by the optical sensor body unit.

A wire electrical discharge machine for performing electrical discharge machining on a workpiece to be machined by applying voltage to an electrode gap formed between a wire electrode and the workpiece to generate electrical discharge at the electrode gap under predetermined machining conditions while conveying the wire electrode along a transfer path, includes: a wire breakage detector for detecting a breakage of the wire electrode; a position calculator for calculating the breakage position of the wire electrode in the transfer path; and an adjustment unit for adjusting the machining conditions when the breakage position is in a predetermined section of the transfer path.

A wire electrical discharge machine for performing electrical discharge machining on a workpiece to be machined by applying voltage to an electrode gap formed between a wire electrode and the workpiece to generate electrical discharge at the electrode gap under predetermined machining conditions while conveying the wire electrode along a transfer path, includes: a wire breakage detector for detecting a breakage of the wire electrode; a position calculator for calculating the breakage position of the wire electrode in the transfer path; and an adjustment unit for adjusting the machining conditions when the breakage position is in a predetermined section of the transfer path.

An additive manufactured workpiece includes one or more cavities having an inner surface. A dielectric interface is formed in the cavity, and conforms to the inner surface. The additive manufactured workpiece further includes an in-situ electrode in the cavities. The dielectric interface is interposed between the in-situ electrode and the inner surface of the workpiece.

An additive manufactured workpiece includes one or more cavities having an inner surface. A dielectric interface is formed in the cavity, and conforms to the inner surface. The additive manufactured workpiece further includes an in-situ electrode in the cavities. The dielectric interface is interposed between the in-situ electrode and the inner surface of the workpiece.

A method includes producing a bulk substrate and beveling an edge of the bulk substrate using an electrical discharge machining (EDM) process and/or an electrochemical discharge machining (ECDM) process.