A laser processing apparatus includes two chuck tables for holding workpieces on their holding surfaces, an X-axis feed unit for moving the chuck tables which are being arrayed in an X-axis direction, a laser beam applying unit for applying a laser beam to the workpiece on one at a time of the chuck tables to process the workpiece, and a pair of delivery areas arrayed in the X-axis direction on both sides of the laser beam applying unit, for delivering workpieces to and from the chuck tables. The laser beam applying unit includes a laser oscillator, a beam condenser, and a laser beam scanning unit for displacing a position where the laser beam is applied to the holding surface of the one of the chuck tables.

A processing method of a workpiece used when the workpiece is processed is provided. The processing method of a workpiece includes a disposing step of disposing the workpiece in a gas containing a substance that generates an active species that reacts with the workpiece, a measurement step of measuring the distribution of the thickness of the workpiece disposed in the gas, and a laser beam irradiation step of irradiating the workpiece in the gas with a laser beam of which the power is adjusted based on the distribution of the thickness measured in the measurement step. In the laser beam irradiation step, the removal amount by which a region irradiated with the laser beam in the workpiece is removed by the active species is controlled by irradiating the workpiece with the laser beam of which the power is adjusted.

A method for producing a cavity in a substrate composed of hard brittle material is provided. A laser beam of an ultrashort pulse laser is directed a side surface of the substrate and is concentrated by a focusing optical unit to form an elongated focus in the substrate. Incident energy of the laser beam produces a filament-shaped flaw in a volume of the substrate. The filament-shaped flaw extends into the volume to a predetermined depth and does not pass through the substrate. To produce the filament-shaped flaw, the ultrashort pulse laser radiates in a pulse or a pulse packet having at least two successive laser pulses. After at least two filament-shaped flaws are introduced, the substrate is exposed to an etching medium which removes material of the substrate and widens the at least two filament-shaped flaws to form filaments. At least two filaments are connected to form a cavity.

A laser crystallizing apparatus includes a first light source unit configured to emit a first input light having a linearly polarized laser beam shape. A second light source unit is configured to emit a second input light having a linearly polarized laser beam shape. A polarization optical system is configured to rotate the first input light and/or the second input light at a predetermined rotation angle. An optical system is configured to convert the first input light and the second input light, which pass through the polarization optical system, into an output light. A target substrate is seated on a stage and output light is directed onto the target substrate. A monitoring unit is configured to receive the first input light or the second input light from the polarization optical system and measure a laser beam quality thereof.

Examples of a laser additive manufacturing system are described. The system comprises a laser configured to generate a laser beam, a fiber optic coupled to the laser to transmit the laser beam to a laser optic head that is coupled to the fiber optic and comprises a focus lens to focus the light beam. The laser optic head is configured to slide along a sliding mechanism in X-direction. A powder feeder is used to continuously move in Y-direction and dispense an uniform layer of powdered material onto a powder bad that is positioned on a build plate of the building chamber. The build plate is configured to move in Z-direction. The light beam generated by the laser is focused using the laser optic head onto a small region of the powder bed where the powdered material is positioned producing small volumes of melt pools that are then cooled and a new layer of powdered material is dispensed over it.

A method of laser machining a workpiece includes the steps of: radiating a laser beam onto at least one workpiece, the laser beam having a core beam and a ring beam extending coaxially with one another, wherein the laser beam is moved over the workpiece along a pre-determined machining path, and adjusting a laser power of the core beam and/or a laser power of the ring beam as a function of a position of the laser beam on the workpiece. An associated laser machining system is also disclosed.

A mask includes a mask sheet including an upper surface and a lower surface facing the upper surface, the mask sheet including an opening passing through the upper surface and the lower surface; and a mask frame that supports the mask sheet, the mask sheet includes a protrusion adjacent to the opening and protruding from the lower surface, and a recess adjacent to the protrusion and recessed from the lower surface toward the upper surface of the mask sheet.

Provided is a two-photon spectroscopy including a light source configured to generate first laser light having a pulse, a pulse width correction device configured to receive the first laser light to output a second laser light, an optical system through which the second laser light passes, a first two-photon sensor configured to measure a first pulse width of the first laser light generated from the light source, and a second two-photon sensor configured to measure a second pulse width of the second laser light passing through the optical system, wherein the pulse width correction device corrects a difference between the first pulse width and the second pulse width.

An additive manufacturing system may include an energy source, an optical system to modify and direct an energy beam from the energy source toward a component to form a melt pool, and a material delivery device to deliver material to the melt pool. The optical system may form an annular energy beam, direct the annular energy beam toward the component, receive at least a portion of thermal emissions produced by the annular energy beam and the melt pool, and direct the portion of the thermal emissions toward an imaging device, which may be used to control the energy source.

A method for additive manufacturing an object is disclosed. The method includes, for a first portion of the object to be built in a first overlapping field region of a plurality of melting beams of a metal powder AM system, sequentially forming each layer of the first portion by: forming only a border section of the first portion of the object using a first melting beam of the plurality of melting beams in the first overlapping field region; and forming an internal section of the first portion of the object within the border section using at least one second, different melting beam from the first melting beam in the first overlapping field region. An entirety of an internal edge of the border section of the first portion of the object is overlapped with an entirety of an external edge of the internal section of the first portion of the object.