A method of processing a plate-shaped workpiece includes a workpiece supporting step of placing a plate-shaped workpiece on an upper surface of a sheet whose area is larger than that of the plate-shaped workpiece through a liquid resin interposed therebetween and supporting the plate-shaped workpiece on only the liquid resin that has solidified and the sheet, a processing step of processing the plate-shaped workpiece to divide the plate-shaped workpiece into a plurality of chips, and a pick-up step of picking up the chips from the sheet.

A solder material is provided. The solder material may include a first amount of particles having particle sizes forming a first size distribution, a second amount of particles having particle sizes forming a second size distribution, the particle sizes of the second size distribution being larger than the particle sizes of the first size distribution, and a solder base material in which the first amount of particles and the second amount of particles is distributed. The first amount of particles and the second amount of particles consist of or essentially consist of a metal of a first group of metals. The first group of metals includes copper, silver, gold, palladium, platinum, iron, cobalt, and aluminum. The solder base material includes a metal of a second group of metals. The second group of metals includes tin, indium, zinc, gallium, germanium, antimony, and bismuth.

A method for dicing a substrate includes setting a target height for forming a first reforming region inside a target substrate, the target height being a distance from an upper surface of the target substrate to the first reforming region; irradiating a laser beam to a first sample substrate including a first film and a second film being in contact with the first film, and setting a target condition on the basis of a sample condition that results in forming a condensing point of the laser beam on an upper surface of the first film being in contact with the second film; and irradiating the target substrate with the laser beam according to the target condition to form the first reforming region inside the target substrate, wherein a thickness of the second film is the target height.

A laser light irradiation device includes: a laser light source; a spatial light modulator including a display unit configured to display a phase pattern; an objective lens configured to condense a laser light emitted from the spatial light modulator at the object; an image-transfer optical system configured to transfer an image of the laser light on the display unit to an entrance pupil plane of the objective lens; a reflected light detector configured to detect reflected light of the laser light which is incident in the object and reflected by an opposite surface opposite to a laser light entrance surface; and a controller configured to control the phase pattern. When the reflected light detector detects the reflected light, the controller displays a reflected light aberration correction pattern which is the phase pattern correcting aberration generated in the event of the laser light being transmitted through the object having twice the predetermined thickness.

A processing method of a workpiece includes an integration step of heating and compression bonding a thermocompression bonding sheet to an annular frame that has an opening to receive the workpiece therein and to the workpiece received in the opening, whereby the annular frame and the workpiece are integrated via the thermocompression bonding sheet, and a processing step of processing the workpiece integrated with the annular frame via the thermocompression bonding sheet. In the integration step, the thermocompression bonding sheet is pressed against the annular frame that has been heated by a heat table with a heat source included therein, by a heat roller with a heat source included therein while being heated by the heat roller, whereby the thermocompression bonding sheet is fixed to the annular frame.

A laser apparatus includes: a first vacuum chamber, wherein machining is performed on a target substrate in the first vacuum chamber; a laser facing the first vacuum chamber; a carrier disposed in the first vacuum chamber, wherein the target substrate is seated on the carrier; a chamber window disposed in one surface of the first vacuum chamber, wherein a laser beam emitted by the laser passes through the chamber window; a first protection window positioned between the carrier and the chamber window; a second vacuum chamber disposed at a first side of the first vacuum chamber; and a transfer unit configured to transfer the first protection window to the second vacuum chamber.

A bonding member (10) includes surface-processed silver surfaces (11a, 11b).

Any metal having a low α-ray emission, the metal being any one of tin, silver, copper, zinc, or indium, wherein an emission of an α-ray after heating the metal at 100° C. in an atmosphere for six hours is 0.002 cph/cm.sup.2 or less. Any metal of tin, silver, copper, zinc and indium each including lead as an impurity is dissolved to prepare a hydrosulfate aqueous solution of the metal and lead sulfate is precipitated and removed in the solution. The lead sulfate is precipitated in the hydrosulfate aqueous solution by adding a lead nitrate aqueous solution including lead having an α-ray emission of 10 cph/cm.sup.2 or less to the hydrosulfate aqueous solution, from which the lead sulfate has been removed, and, at the same time, the solution is circulated while removing the lead sulfate to electrowinning the metal using the hydrosulfate aqueous solution as an electrolytic solution.

A laser irradiation apparatus includes: a laser generation apparatus configured to generate first laser light for performing heat treatment of an object to be processed; a measurement-laser emission unit configured to emit linearly-polarized second laser light toward an irradiation area on the object to be processed to which the first laser light is applied; a first polarizing plate configured to let, of the whole reflected light of the second laser light reflected by the object to be processed, a part of the reflected light that has a first polarization direction pass therethrough; and a measurement-laser detection unit configured to detect the reflected light that has passed through the first polarizing plate.

Proposed is a method for controlling a boat carrier/substrate strip type solder ball placement system that allows solder ball mounting processes for a boat carrier type of a material and a substrate strip type of a material to be all performed in one system. In specific, the method allows the components or operation setting of the system to be automatically controlled according to the types of materials loaded on a magazine, thereby performing solder ball mounting processes for the two types of materials with high speed and high accuracy. In more specific, the method allows a component applied only to the solder ball mounting process for the boat carrier type of material and a component applied to the solder ball mounting process for the substrate strip type of material to be integrated with each other as a single component in the process of mounting the solder balls on the material on-loaded, thereby making it possible to perform the solder ball mounting processes for the two different types of materials in one system.