Provided is a laser machine which achieves an enhanced durability against laser beam irradiation. A workpiece transfer device for carrying a workpiece into and out of a workpiece machining chamber, has a turntable device and a partition wall. The partition wall is secured to the top surface of the turntable device, partitioning the top surface of the turntable device into a plurality of workpiece mounting tables on which workpieces can be mounted. The partition wall has: a first plate forming one surface of the partition wall and formed of aluminum alloy; a second plate forming the other surface of the partition wall and formed of aluminum alloy; and a frame for securing the first plate and the second plate in a spaced apart relationship.

Provided is a laser machine which achieves an enhanced durability against laser beam irradiation. A workpiece transfer device for carrying a workpiece into and out of a workpiece machining chamber, has a turntable device and a partition wall. The partition wall is secured to the top surface of the turntable device, partitioning the top surface of the turntable device into a plurality of workpiece mounting tables on which workpieces can be mounted. The partition wall has: a first plate forming one surface of the partition wall and formed of aluminum alloy; a second plate forming the other surface of the partition wall and formed of aluminum alloy; and a frame for securing the first plate and the second plate in a spaced apart relationship.

A variable pitch device includes a body, a drive unit fixed to the body, a plurality of movable fingers disposed movably along a longitudinal direction of the body, and a driving force transmission mechanism that transmits a driving force of the drive unit to the movable fingers. The driving force transmission mechanism is formed of a connecting block connected to an end block driven in a vertical direction, a cam plate accommodated in the body and connected to the connecting block, and four finger pins inserted through first to fourth cam grooves of the cam plate. The finger pins are disposed movably in the longitudinal direction along guide holes of the body and connected to the movable fingers.

A variable pitch device includes a body, a drive unit fixed to the body, a plurality of movable fingers disposed movably along a longitudinal direction of the body, and a driving force transmission mechanism that transmits a driving force of the drive unit to the movable fingers. The driving force transmission mechanism is formed of a connecting block connected to an end block driven in a vertical direction, a cam plate accommodated in the body and connected to the connecting block, and four finger pins inserted through first to fourth cam grooves of the cam plate. The finger pins are disposed movably in the longitudinal direction along guide holes of the body and connected to the movable fingers.

A pin lifting device (1) for lowering a substrate (2) onto a substrate carrier (15) and for lifting the substrate (2) off the substrate carrier (15) in a process chamber, in particular a vacuum process chamber. The pin lifting device (1) includes at least one lifting pin holder (4) and at least one lifting drive (5) for moving the lifting pin holder (4), which has a lifting pin (6) mounted thereon, in a reciprocating manner along a linear lifting motion path (7). The lifting pin holder (4) is mounted on the lifting drive (5) by a compensation bearing (8), and the compensation bearing (8) facilitates a relative movement between the lifting drive (5) and the lifting pin holder (4) in at least one direction (9) orthogonal to the linear lifting motion path (7).

A pin lifting device (1) for lowering a substrate (2) onto a substrate carrier (15) and for lifting the substrate (2) off the substrate carrier (15) in a process chamber, in particular a vacuum process chamber. The pin lifting device (1) includes at least one lifting pin holder (4) and at least one lifting drive (5) for moving the lifting pin holder (4), which has a lifting pin (6) mounted thereon, in a reciprocating manner along a linear lifting motion path (7). The lifting pin holder (4) is mounted on the lifting drive (5) by a compensation bearing (8), and the compensation bearing (8) facilitates a relative movement between the lifting drive (5) and the lifting pin holder (4) in at least one direction (9) orthogonal to the linear lifting motion path (7).

The collecting mechanism includes a holding unit and a controller. The holding unit has a pair of arms, and can sandwich a machined portion with the pair of arms. The holding unit can be switched between a holding state and a standby state. In the holding state, the pair of arms is closed to be in contact with the circumferential surface of the machined portion to sandwich the machined portion. In the standby state, the pair of arms is opened so as to stay near the circumferential surface of the machined portion with a space between the arms and the circumferential surface of the machined portion. The controller monitors whether cutting-off of the machined portion has been completed to keep the holding unit in the standby state before completion of the cutting-off and to switch the holding unit from the standby state to the holding state at the time of completion of the cutting-off.

The collecting mechanism includes a holding unit and a controller. The holding unit has a pair of arms, and can sandwich a machined portion with the pair of arms. The holding unit can be switched between a holding state and a standby state. In the holding state, the pair of arms is closed to be in contact with the circumferential surface of the machined portion to sandwich the machined portion. In the standby state, the pair of arms is opened so as to stay near the circumferential surface of the machined portion with a space between the arms and the circumferential surface of the machined portion. The controller monitors whether cutting-off of the machined portion has been completed to keep the holding unit in the standby state before completion of the cutting-off and to switch the holding unit from the standby state to the holding state at the time of completion of the cutting-off.

A workpiece holder, measuring device, and a method for executing a measurement by using the workpiece holder. The workpiece holder is configured to hold a workpiece with two opposite arranged workpiece surfaces to be measured in a way that both are accessible by a moveable probe unit and can thus be measured in one setting of the workpiece. For this the workpiece holder comprises a support and a holding body. The holding body has a holding end away from the support with at least one holding surface at which the workpiece is held. In the holding body a free space is formed that adjoins the workpiece surface facing the support when a workpiece is held and makes the workpiece surface accessible for measuring or probing. The accessibility for the probe unit is provided by a transverse channel extending obliquely or orthogonally to the longitudinal axis of the workpiece holder.

A workpiece holder, measuring device, and a method for executing a measurement by using the workpiece holder. The workpiece holder is configured to hold a workpiece with two opposite arranged workpiece surfaces to be measured in a way that both are accessible by a moveable probe unit and can thus be measured in one setting of the workpiece. For this the workpiece holder comprises a support and a holding body. The holding body has a holding end away from the support with at least one holding surface at which the workpiece is held. In the holding body a free space is formed that adjoins the workpiece surface facing the support when a workpiece is held and makes the workpiece surface accessible for measuring or probing. The accessibility for the probe unit is provided by a transverse channel extending obliquely or orthogonally to the longitudinal axis of the workpiece holder.