The present invention includes a table (2) for placing a workpiece (Wa) thereon, a supporting mechanism (10) including a rotary shaft (15, 16) and supporting the table (2) so as to be able to rock the table (2) about an axial center of the rotary shaft (15, 16), a first drive motor (20) rotating the rotary shaft (15) of the supporting mechanism (10) to rock the table (2), a balance imparting mechanism (30) imparting a balance load to the rotary shaft (15) in accordance with a position of rocking of the table (2), and a controller (50) controlling the first drive motor (20). The balance imparting mechanism (30) includes an eccentric disc (31) having a circular plate shape and connected at a position eccentric from a center thereof to the rotary shaft (15), a housing (32) holding an outer periphery of the eccentric disc (31) via a bearing (33), and a load imparting unit (35) imparting the balance load to the housing (32) in a direction intersecting an axis of the rotary shaft (15).

The present invention includes a table (2) for placing a workpiece (Wa) thereon, a supporting mechanism (10) including a rotary shaft (15, 16) and supporting the table (2) so as to be able to rock the table (2) about an axial center of the rotary shaft (15, 16), a first drive motor (20) rotating the rotary shaft (15) of the supporting mechanism (10) to rock the table (2), a balance imparting mechanism (30) imparting a balance load to the rotary shaft (15) in accordance with a position of rocking of the table (2), and a controller (50) controlling the first drive motor (20). The balance imparting mechanism (30) includes an eccentric disc (31) having a circular plate shape and connected at a position eccentric from a center thereof to the rotary shaft (15), a housing (32) holding an outer periphery of the eccentric disc (31) via a bearing (33), and a load imparting unit (35) imparting the balance load to the housing (32) in a direction intersecting an axis of the rotary shaft (15).

Provided is a machine tool including: a movable drum base (4); a drum (5) that is incorporated in the drum base (4) and is circular in outline; and a quill main spindle (6) penetrating through the drum (5) in a central axis direction of the drum (5), wherein protrusion allowance from the drum (5) is adjustable, wherein a bearing provided along an outer circumference of the drum (5) is interposed between the drum base (4) and the drum (5) such that the drum (5) is rotatable in the drum base (4), and movement of the drum base (4), rotation of the drum (5), and protrusion allowance adjustment of the quill main spindle (6) from the drum (5) allow a tool (10) mounted on the quill main spindle (6) to be positioned.

Provided is a machine tool including: a movable drum base (4); a drum (5) that is incorporated in the drum base (4) and is circular in outline; and a quill main spindle (6) penetrating through the drum (5) in a central axis direction of the drum (5), wherein protrusion allowance from the drum (5) is adjustable, wherein a bearing provided along an outer circumference of the drum (5) is interposed between the drum base (4) and the drum (5) such that the drum (5) is rotatable in the drum base (4), and movement of the drum base (4), rotation of the drum (5), and protrusion allowance adjustment of the quill main spindle (6) from the drum (5) allow a tool (10) mounted on the quill main spindle (6) to be positioned.

A substrate processing apparatus includes a pair of first substrate chucks each configured to hold a substrate from below while allowing a first main surface of the substrate to face upwards; a pair of second substrate chucks each configured to hold the substrate from below while allowing a second main surface of the substrate opposite to the first main surface to face upwards; a rotary table which is configured to be rotated about a rotation axis; a first processing unit equipped with a first processing tool configured to process the first main surface of the substrate held by the first substrate chuck; and a second processing unit equipped with a second processing tool configured to process the second main surface of the substrate held by the second substrate chuck.

A mobile fluid transfer system. The system includes a fluid evacuation system, a fluid refill system, a sensing system and a control system. The fluid evacuation system comprises a first fluid storage container. The fluid refill system comprises a second fluid storage container. The sensing system is coupled to the fluid evacuation system and the fluid refill system. The control system is coupled to the sensing system, the fluid evacuation system and the fluid refill system. The control system is configured to determine an amount of a first fluid in the first fluid storage container based on a first signal from the sensing system, and determine an amount of a second fluid in the second fluid storage container based on a second signal from the sensing system.

A mobile fluid transfer system. The system includes a fluid evacuation system, a fluid refill system, a sensing system and a control system. The fluid evacuation system comprises a first fluid storage container. The fluid refill system comprises a second fluid storage container. The sensing system is coupled to the fluid evacuation system and the fluid refill system. The control system is coupled to the sensing system, the fluid evacuation system and the fluid refill system. The control system is configured to determine an amount of a first fluid in the first fluid storage container based on a first signal from the sensing system, and determine an amount of a second fluid in the second fluid storage container based on a second signal from the sensing system.

A pipe rotator assembly includes a frame upon which a cylindrical pipe is supportable, and a wheel rotatably coupled to the frame and engageable with the pipe for imparting rotation thereto in response to rotation of the wheel. The pipe rotator assembly additionally includes a drive shaft coupled to the wheel for transferring torque thereto, causing the wheel to rotate, and a drive unit for providing torque to the drive shaft. The drive unit includes an electric motor and an onboard power source for powering the motor.

A pipe rotator assembly includes a frame upon which a cylindrical pipe is supportable, and a wheel rotatably coupled to the frame and engageable with the pipe for imparting rotation thereto in response to rotation of the wheel. The pipe rotator assembly additionally includes a drive shaft coupled to the wheel for transferring torque thereto, causing the wheel to rotate, and a drive unit for providing torque to the drive shaft. The drive unit includes an electric motor and an onboard power source for powering the motor.

An automated workpiece conveying vehicle included in a conveyance system that conveys a workpiece to each of a plurality of processing apparatuses is provided. The automated workpiece conveying vehicle includes: a workpiece support part that supports the workpiece; a traveling mechanism provided on the workpiece support part; a vibration detection unit that detects vibration of the workpiece support part and records the vibration as vibration data; and a receiver that receives a control signal transmitted from a control unit included in the conveyance system, the control signal instructing conveyance of the workpiece to the processing apparatus.