The present invention provides a substrate treating apparatus, including: a treatment container having a treatment space therein; a support unit for supporting and rotating the substrate in the treatment space; and a liquid supply unit for supplying a liquid onto the substrate, in which wherein the support unit includes: a body on which the substrate is seated; and a support shaft coupled to the body, and an upper surface of the body is provided with a central portion including a center of the body and an edge portion surrounding the central portion, and a vacuum hole is formed in the central portion, and a groove is formed in the edge portion.

A clamp for retaining a workpiece onto a fixture whereby the method of connecting the clamp to the fixture provides for a simultaneous combination of both horizontal and vertical clamping forces against the workpiece without locating any portion of the clamp above the upper surface of the workpiece.

A clamping device and a method for handling a workpiece or a unit comprising a workpiece and a workpiece holder. An automatic workpiece exchange is enabled by using a tool spindle. For this a spindle adapter is present that can be releasably connected with the workpiece holder. By means of the spindle adapter, the unit comprising the workpiece and the workpiece holder can be transported. The clamping device can be switched between a release condition and a clamping condition by means of a movement of an operating element. This movement can be carried out by means of the tool spindle, in that the tool spindle engages the operating element directly or indirectly by means of the spindle adapter or an operating tool.

A clamping device and a method for handling a workpiece or a unit comprising a workpiece and a workpiece holder. An automatic workpiece exchange is enabled by using a tool spindle. For this a spindle adapter is present that can be releasably connected with the workpiece holder. By means of the spindle adapter, the unit comprising the workpiece and the workpiece holder can be transported. The clamping device can be switched between a release condition and a clamping condition by means of a movement of an operating element. This movement can be carried out by means of the tool spindle, in that the tool spindle engages the operating element directly or indirectly by means of the spindle adapter or an operating tool.

A workpiece support device includes: a jig, a table, a rotating shaft, a support member, a flow path connector, and a supply-side connecting portion. The jig has a main flow path to flow a fluid for machining and a sub-flow path, and fixes the workpiece. The table has a table flow path to communicate with the main flow path and is attached with the jig. The rotating shaft has a rotating shaft flow path to communicate with the table flow path, and is fixed to the table. The support member rotatably supports the rotating shaft. The flow path connector connects the rotating shaft flow path with a fluid-supply path to communicate with a fluid-supply side so as to relatively rotate with each other about an axis of the rotating shaft. The supply-side connecting portion moves relative to the jig to communicate with and block off the sub-flow path.

A workpiece support device includes: a jig, a table, a rotating shaft, a support member, a flow path connector, and a supply-side connecting portion. The jig has a main flow path to flow a fluid for machining and a sub-flow path, and fixes the workpiece. The table has a table flow path to communicate with the main flow path and is attached with the jig. The rotating shaft has a rotating shaft flow path to communicate with the table flow path, and is fixed to the table. The support member rotatably supports the rotating shaft. The flow path connector connects the rotating shaft flow path with a fluid-supply path to communicate with a fluid-supply side so as to relatively rotate with each other about an axis of the rotating shaft. The supply-side connecting portion moves relative to the jig to communicate with and block off the sub-flow path.

A clamping apparatus includes: locking members (80) insertable into a hole (11) of a workpiece (10); and a clamp rod (70) configured to make a wedge engagement with the locking members (80) from above. Each locking member (80) includes a base portion (85) configured to be inserted into the hole (11); and a protruding portion (87) located above the base portion (85). A relative movement restriction mechanism (M) configured to restrict downward movement of the clamp rod (70) relative to the locking members (80) within a predetermined travel distance allows descent of outer peripheral surfaces (85a) of the base portions (85) relative to an inner peripheral surface of the hole (11) when the locking members (80) are in a diameter-expanded position.

A clamping apparatus includes: locking members (80) insertable into a hole (11) of a workpiece (10); and a clamp rod (70) configured to make a wedge engagement with the locking members (80) from above. Each locking member (80) includes a base portion (85) configured to be inserted into the hole (11); and a protruding portion (87) located above the base portion (85). A relative movement restriction mechanism (M) configured to restrict downward movement of the clamp rod (70) relative to the locking members (80) within a predetermined travel distance allows descent of outer peripheral surfaces (85a) of the base portions (85) relative to an inner peripheral surface of the hole (11) when the locking members (80) are in a diameter-expanded position.

A method and apparatus. The apparatus comprises a first portion of a tool and a second portion of the tool. The first portion of the tool has a first surface. The first surface has a shape that is complementary to a first portion of a part. The second portion has at least one of a second surface configured to be recessed from a second portion of the part or a hollow portion.

A portable press is usable with parts that are assembled by interference fit or friction fit. A force application member slidably engages a plurality of guides. An actuator, such as a pneumatic or hydraulic jack or cylinder, applies force to the force application member to move the force application member toward a static plate. The force application member acts to either press in, or press out, a first part relative to a second part. The press of the invention is portable, so that the press can be moved to the mechanical structure requiring a press for removal or insertion of parts. The press may be constructed in a vertical or horizontal embodiment.