There is provided a substrate support device. The substrate support device includes a substrate support part on which a wafer is deposited, the substrate support part including a first mesh electrode and a second mesh electrode disposed under the first mesh electrode; a chucking circuit configured to apply a DC voltage to the first mesh electrode; and an edge control circuit configured to control timings of operations related to the first mesh electrode and the second mesh electrode and control RF (Radio Frequency). The second mesh electrode is divided into a plurality of second sub-mesh electrode to remove an induced electromotive force generated due to a closed loop.

A magnetic drill is provided with an alternate power source. The drill is comprises of: an electric motor for driving a tool; a controller configured to receive an AC input signal and operable to control a drive signal to the electric motor; an electromagnet arranged in a base of the drill housing and operable, in response to a DC voltage, to magnetically couple the base to a surface proximate to the base; an AC/DC converter configured to receive the AC input signal and operates, independent from the controller and in the presence of the AC input signal, to output a DC voltage to the electromagnet; and an alternate power source circuit that monitors the DC voltage output by the converter and, in the absence thereof, provides an alternate DC voltage to the electromagnet.

The invention is directed to a magnetic chuck and a method for producing a magnetic chuck. The magnetic chuck comprises an upper base made of a single piece of magnetic-conductive material and having a top surface, sidewalls extending orthogonally from the top surface, a cavity formed within the upper base with an open end opposite to the top surface and an opposite closed end directed toward the top surface. A plurality of cores extends orthogonally from the top surface and into the cavity, wherein a plurality of permanent magnets is arranged in the cavity. A reversible magnet is arranged between each of the cores and a lower base; and an excitation coil is arranged around the circumference of each reversible magnet. A portion of the cavity between the permanent magnets and the closed end of the cavity is filled with non-magnetic-conductive material.

A portable meter (1) for measuring a force generated by a magnetic apparatus (2), comprising a mobile probe (3) configured to be coupled to the magnetic apparatus (2) whose force needs to be measured, the probe (3) comprising at least one active ferromagnetic element (4) which has a configuration corresponding to that of a pole (N, S) on the magnetic apparatus whose force needs to be measured, the probe being equipped with alignment means (5, 6) configured to align the at least one active ferromagnetic element (4) with at least one magnetic pole (N, S) on the magnetic apparatus (2), the at least one active ferromagnetic element (4) having at least one turn (B)made of an electrically conductive materialwound around it, and a detection unit (7) interfaced with the at least one turn (B) in order to detect a magnetic flux flowing through the coil at least during a transient of activation/deactivation of the magnetic apparatus.

A portable meter (1) for measuring a force generated by a magnetic apparatus (2), comprising a mobile probe (3) configured to be coupled to the magnetic apparatus (2) whose force needs to be measured, the probe (3) comprising at least one active ferromagnetic element (4) which has a configuration corresponding to that of a pole (N, S) on the magnetic apparatus whose force needs to be measured, the probe being equipped with alignment means (5, 6) configured to align the at least one active ferromagnetic element (4) with at least one magnetic pole (N, S) on the magnetic apparatus (2), the at least one active ferromagnetic element (4) having at least one turn (B)made of an electrically conductive materialwound around it, and a detection unit (7) interfaced with the at least one turn (B) in order to detect a magnetic flux flowing through the coil at least during a transient of activation/deactivation of the magnetic apparatus.

A magnetic drill is provided with an alternate power source. The drill is comprises of: an electric motor for driving a tool; a controller configured to receive an AC input signal and operable to control a drive signal to the electric motor; an electromagnet arranged in a base of the drill housing and operable, in response to a DC voltage, to magnetically couple the base to a surface proximate to the base; an AC/DC converter configured to receive the AC input signal and operates, independent from the controller and in the presence of the AC input signal, to output a DC voltage to the electromagnet; and an alternate power source circuit that monitors the DC voltage output by the converter and, in the absence thereof, provides an alternate DC voltage to the electromagnet.

A fixture is provided for retaining a metal workpiece for contact by finishing media during operation of a media based finishing operation. The fixture comprises a body and a magnet for retaining the workpiece in contact with the body. By use of super-magnetic materials a significant holding force may be achieved.

A holding member contains alpha-type alumina as a main component and is configured to hold a target object. The holding member has a holding surface that is a surface on which the target object is to be held. The holding surface has a projection and a recess formed thereon and therein. A bottom surface that defines a bottom portion of the recess contains gamma-type alumina.

A holding member contains alpha-type alumina as a main component and is configured to hold a target object. The holding member has a holding surface that is a surface on which the target object is to be held. The holding surface has a projection and a recess formed thereon and therein. A bottom surface that defines a bottom portion of the recess contains gamma-type alumina.

A magnetic base for an electric power tool, in particular for a magnetic core drilling machine. The magnetic base having a base body, in which at least one first solenoid coil forming an electromagnet is accommodated in a receiving space, whose magnetic force is switchable between a maximum resulting holding force and a minimum resulting holding force. A first side that is adapted to be coupled with the electric power tool. An oppositely situated second side, which is adapted to be placed on a workpiece to be processed. The receiving space is designed such that an insertion of the at least one solenoid coil into the receiving space is possible only from the first side.