The disclosure relates to homing methods for lift assemblies, and related apparatus and components, for processing chambers. In one or more embodiments, a non-transitory computer readable medium includes instructions that cause a plurality of operations to be conducted. The operations include detecting a fault condition, and determining a first position of a first support frame along a first movement range. The operations include determining a second position of a second support frame along a second movement range. The second movement range overlaps with the first movement range by an overlap range. The operations include determining if the first position is in an inside condition or an outside condition. The inside condition is within the overlap range, and the outside condition is outside of the overlap range. The operations include moving the first support frame and the second support frame respectively to a first retracted position and a second retracted position.

Systems, methods, and computer-readable media are provided for machining a feature on a work piece along a curving tool path including a spiral pattern with continuously varying radius. In particular, the feature is scribed by a tool while varying an angle of rotation of a cutting surface of the tool with respect to the work piece to maintain a substantially constant angle between the cutting surface and a corresponding relative translational movement between the cutting surface and the work piece along the spiral pattern. A dynamic feed rate of the tool also is varied continuously with respect to the work piece based on the continuously varying radius of the at least one spiral pattern to substantially maintain a target centripetal acceleration of the tool with respect to the work piece.

Systems, methods, and computer-readable media are provided for machining a feature on a work piece along a curving tool path including a spiral pattern with continuously varying radius. In particular, the feature is scribed by a tool while varying an angle of rotation of a cutting surface of the tool with respect to the work piece to maintain a substantially constant angle between the cutting surface and a corresponding relative translational movement between the cutting surface and the work piece along the spiral pattern. A dynamic feed rate of the tool also is varied continuously with respect to the work piece based on the continuously varying radius of the at least one spiral pattern to substantially maintain a target centripetal acceleration of the tool with respect to the work piece.

A machine tool includes a rotation table unit including a rotation table configured to rotate with respect to a first axis. The rotation table unit is configured to move along a second axis that is orthogonal to the first axis. The machine tool includes a spindle unit including a spindle configured to rotate with respect to a third axis that is orthogonal to the first axis and the second axis. The spindle unit is configured to move along the third axis. The machine tool includes a bed that supports the rotation table unit and the spindle unit. A front part of an upper surface of the bed includes a recess in which the rotation table unit is arranged. The spindle unit is located at a rear part of the upper surface of the bed.

A machine tool for machining a workpiece is provided with a cutting tool holder for holding a cutting tool and a rotation mechanism for holding the workpiece. One or both of the cutting tool holder and the rotation mechanism are movable on multiple axes so that the cutting tool is movable relative to the workpiece in multiple axial directions. A control device is provided for controlling the movement of one or both of the cutting tool holder and the rotation mechanism to synchronously vibrate the workpiece and the cutting tool relative to each other at a low frequency in multiple axial directions.

A machine tool for machining a workpiece is provided with a cutting tool holder for holding a cutting tool and a rotation mechanism for holding the workpiece. One or both of the cutting tool holder and the rotation mechanism are movable on multiple axes so that the cutting tool is movable relative to the workpiece in multiple axial directions. A control device is provided for controlling the movement of one or both of the cutting tool holder and the rotation mechanism to synchronously vibrate the workpiece and the cutting tool relative to each other at a low frequency in multiple axial directions.

The present application provides a multi-motion-platform parallel robot and a method of constructing the same. The parallel robot comprises a symmetrical basic parallel mechanism and one or more symmetrical branch parallel mechanism. The basic parallel mechanism comprises a symmetrical basic foundation platform, a symmetrical basic motion platform, and symmetrical main branched-chains. The branch parallel mechanism comprises a symmetrical branch foundation platform, a symmetrical branch motion platform, and symmetrical branch branched-chains. The basic parallel mechanism and the branch parallel mechanism are connected by means of a multiple-output motion pair having symmetrical output ends, and share one set of driving pairs and drive and control devices. The multi-motion-platform parallel robot and it's method of construction can be used for various industrial robots, three-dimensional profile modeling and scaling robots and walking robots, and have the advantages of having a simple structure, being easy to standardize, having a high production efficiency, and the like.

The present application provides a multi-motion-platform parallel robot and a method of constructing the same. The parallel robot comprises a symmetrical basic parallel mechanism and one or more symmetrical branch parallel mechanism. The basic parallel mechanism comprises a symmetrical basic foundation platform, a symmetrical basic motion platform, and symmetrical main branched-chains. The branch parallel mechanism comprises a symmetrical branch foundation platform, a symmetrical branch motion platform, and symmetrical branch branched-chains. The basic parallel mechanism and the branch parallel mechanism are connected by means of a multiple-output motion pair having symmetrical output ends, and share one set of driving pairs and drive and control devices. The multi-motion-platform parallel robot and it's method of construction can be used for various industrial robots, three-dimensional profile modeling and scaling robots and walking robots, and have the advantages of having a simple structure, being easy to standardize, having a high production efficiency, and the like.

The present invention discloses a single-drive rigid-flexible coupling precision motion platform, including a machine base, a linear guide rail, a rigid-flexible coupling motion platform, a linear driver and a displacement sensor, wherein the rigid-flexible coupling motion platform includes a rigid frame, flexible hinges and a core motion platform; and the core motion platform of the rigid-flexible coupling motion platform is connected with the rigid frame through the flexible hinges. In this arrangement, the single-drive rigid-flexible coupling precision motion platform disclosed by the present invention can realize high-accuracy continuous change displacements of the platform, thereby avoiding displacement jitter caused by sudden change of acceleration. The present invention further discloses a realization method and an application including the above platform.

The present invention provides an electromagnetically driven fast tool servo system based on a flexible hinge combination mechanism, including a base, a voice coil motor arranged in the base, a tool mounting base connected to a coil of the voice coil motor by a first connecting portion, and a grating measurement device connected to the first connecting portion by a guide shaft arranged at a center of the voice coil motor, where the first connecting portion includes a first flexible hinge, a second flexible hinge, a first connecting member located between the first flexible hinge and the second flexible hinge, and a second connecting member located between the second flexible hinge and the coil of the voice coil motor; the tool mounting base, the first flexible hinge, the first connecting member, the second flexible hinge, the second connecting member, and an end of the guide shaft are coaxially connected in series by a first horizontal screw; the first flexible hinge and the second flexible hinge have sheet-like cross structures with the same shape, with end portions of cross arms fixedly connected to the base. In the present invention, axial and lateral precision of the system in a machining process is improved.