The invention relates to a transport apparatus (10) for the collision-free loading and unloading of a material machining unit (1) with a workpiece (5) comprising a guide apparatus (60), a plurality of transport devices (15, 16, 17, 18), wherein one of the transport devices (15) is arranged on a first transport device level (20), as well as another transport device (16) being arranged on another transport device level (21). A multifunctional tooling apparatus (25) for transporting and/or machining the workpiece (5) or the workpiece part is arranged on the transport device (15). Furthermore, the invention relates to a method for loading and unloading the material machining unit (1) using such a transport apparatus (10), as well as a computer program product for loading and unloading according to this method and using such a transport device (10).

A substrate processing apparatus includes a process mechanism that processes a substrate. The process mechanism includes: a processing container that accommodates therein the substrate; a first supporting member that horizontally supports the substrate; and a second supporting member that horizontally supports the substrate at an outside of the processing container. The first supporting member and the second supporting member support the substrate such that a center axis of the substrate in the processing container and a center axis of the substrate at an outside of the processing container match, in a case where at least viewed from a direction where the substrate is carried-in to the container and carried-out from the container.

A plate material conveyance apparatus, disposed next to a plate processing machine, includes an unprocessed plate material placement unit, a processed plate material placement unit, a loader, an unloader and a temporary placement table. The loader reciprocally moves between the unprocessed plate material placement unit and the plate processing machine to deliver an unprocessed plate material onto the plate processing machine. The unloader reciprocally moves in parallel to and below the loader between the unprocessed plate material placement unit and the plate processing machine, and delivers a processed plate material from the plate processing machine to the temporary placement table positioned above the unprocessed plate material placement unit. The temporary placement table slides between the unprocessed plate material placement unit and the plate processing machine, and transfers the processed plate material, received from the unloader, to the processed plate material placement unit.

A button member loading jig includes a base extending along a first direction, and a plurality of supports each protruding from the base in a second direction intersecting the first direction, aligned at intervals between the plurality of supports along the first direction, and configured to support a button member in the intervals.