The present invention relates to a control system and control method. The control system is applied to a machine tool and includes a horizontal monitor unit, a temperature monitor unit, a temperature adjustment device and a controller. The horizontal monitor unit is configured to measure a horizontal angle of a table and the temperature monitor unit is configured to measure a temperature information of a sensing area in a machining device. The controller receives the horizontal angle and the temperature information, then generates a compensation signal to the temperature adjustment device to change the temperature of an adjusting area in the machining device so that the horizontal angle of the table and the vertical inclination of the machining device are orthogonal to each other.

A fluid temperature control assembly in combination with a machine tool, and a method of adjusting the temperature of a fluid being supplied to a machine tool. The assembly is arranged to adjust the temperature of a fluid being supplied to the machine tool to maintain the fluid at a setpoint temperature at a location downstream of the assembly with a high level of accuracy. The assembly comprises a radio frequency (RF) or microwave energy source to supply energy to the fluid as it passes through the assembly to heat the fluid, a temperature sensing arrangement for outputting a temperature signal responsive to the temperature of the fluid at the downstream location, and a control arrangement configured to receive the temperature signal and control the energy source with reference to the temperature signal to heat the fluid so as to maintain the fluid at the setpoint temperature at the downstream location.

A swapper assembly of a cluster tool includes a housing, at least two swappers, and a motor assembly. The at least two swappers are at least partially disposed within and rotatable relative to the housing. Each swapper includes a body, a first arm, and a second arm. The first arm and second arm are rotatable relative to the body. The motor assembly includes at least one motor, and the motor assembly is configured to operate the at least two swappers simultaneously to change the position of the first arm and second arm.

A machine tool includes a table, a main shaft, and an electric heating piece. The table includes an upright post and a main shaft support element connected to the upright post. The main shaft is rotatably disposed at the main shaft support element of the table. The electric heating piece is disposed at the main shaft support element of the table and positioned on a side of the main shaft, wherein the side of the main shaft manifests a lower thermal deformation level. The regulation of the electric heating piece minimizes the nonlinear thermal deformation of the main shaft, thereby enhancing processing precision.

An electrostatic chuck apparatus is provided that is capable of effectively reducing temperature imbalance of a wafer substrate that is heated to a high temperature. The electrostatic chuck apparatus includes a base including a cooling flow path through which a refrigerant may flow, an adiabatic layer on the base, a uniform heating plate on the adiabatic layer, a heating element between the adiabatic layer and the uniform heating plate, an insulating layer on the uniform heating plate and including a ceramic, a conductive layer on the insulating layer and having an area smaller than an area of the insulating layer, and a dielectric layer on the conductive layer and including a ceramic.