A spindle device includes a spindle shaft, a spindle housing, and a chuck portion as a rotating member. The chuck portion has, formed therein, a suctioning passage through which air suctioned from the outside flows. The spindle shaft has a first guide passage which guides air flowing through the suctioning passage to a clearance between the inner wall of the spindle housing defining a through hole in which the spindle shaft is inserted and the outer wall of the spindle shaft facing the inner wall, by way of the interior of the spindle shaft. The spindle housing has, formed therein, a second guide passage configured to guide the air guided to the clearance, to the outside.

A spindle device includes a spindle housing, a spindle shaft rotatably supported inside the spindle housing, a spindle mount having an insertion cavity into which the spindle housing is inserted along the axial direction of the spindle shaft, and a mount cover covering the spindle mount. A temperature regulator for adjusting the temperature inside the mount cover is provided inside the mount cover.

A fluid supply apparatus according to an embodiment of the invention includes a housing and an internal structure which is housed in the hosing. The internal structure includes a shaft portion and a plurality of protrusions protruding from the outer circumferential surface of the shaft portion. A plurality of flow paths are formed between the plurality of protrusions, and a groove having a predetermined depth from the outer circumferential surface of the shaft portion is formed in each of at least a part of the plurality of flow paths.

Disclosed herein is a cyclonic system for performing subtractive machining in microgravity systems. The cyclonic system comprises: an enclosure, a blower, and a debris collection module to collect the debris from the milling machine. The enclosure includes a top plate, a base plate, and a tapered side wall joining the top plate to the base plate. The enclosure defines a chamber to house a milling machine having a cutter tool. The blower generates an airstream that induces a cyclonic airflow to achieve cyclonic separation of debris within the enclosure. In operation, the cyclonic airflow urges the debris from the milling machine toward the base plate and into the milling machine.

Provided are a silicon ingot slicing apparatus capable of slicing silicon ingots in various forms such as blocks or wafers using microbubbles and wire electric discharge machining.