A fluid temperature control assembly in combination with a machine tool, and a method of adjusting the temperature of a fluid being supplied to a machine tool. The assembly is arranged to adjust the temperature of a fluid being supplied to the machine tool to maintain the fluid at a setpoint temperature at a location downstream of the assembly with a high level of accuracy. The assembly comprises a radio frequency (RF) or microwave energy source to supply energy to the fluid as it passes through the assembly to heat the fluid, a temperature sensing arrangement for outputting a temperature signal responsive to the temperature of the fluid at the downstream location, and a control arrangement configured to receive the temperature signal and control the energy source with reference to the temperature signal to heat the fluid so as to maintain the fluid at the setpoint temperature at the downstream location.

A system includes a closed loop configured to flow a heat transfer fluid to regulate temperature of a process tool. The heat transfer fluid includes a flammable or combustible fluid. The system further includes a temperature control unit configured to receive the heat transfer fluid and regulate temperature of the heat transfer fluid. The system further includes a plurality of sensor configured to measure one or more properties of the heat transfer fluid. The system further includes a controller configured to determine a fault in the closed loop based on sensor data received from the plurality of sensors and to further cause a corrective action responsive to determining the fault.

A flushing duct is installed on both sides of a table of the machine tool in a longitudinal direction of the table, a slope duct is inclinedly disposed below the flushing duct toward the coolant tank, each bottom surface of the flushing duct and the slope duct is formed with a V-shaped inclined surface and a streamlined bending portion to make flows of the coolant containing the microchips smooth, and a coolant supply valve is installed at a rear end of the flushing duct to facilitate flows of the coolant being discharged by supplying additional coolant. Further, a coolant tank is installed below the slope duct, a filter is installed in the coolant tank for filtering the microchips in the coolant. The coolant containing the microchips is transported through a return pump to a centrifugal separator device where the microchips contained in the coolant are centrifugally separated. A refined coolant through centrifugal separation is supplied to the machine tool, thereby preventing abnormal wear due to penetration of the microchips into rotating and sliding portions of the machine tool.

In a processing machine, a machine body drives at least one of a workpiece and a tool to process the workpiece by the tool. A processing chamber isolates the workpiece, the tool, and a nozzle from at least part of the machine body while housing the workpiece, the tool, and the nozzle. An internal temperature sensor measures a temperature of an atmosphere in the processing chamber. An external temperature sensor measures a temperature of an atmosphere around the processing machine. A temperature adjustment part raises a temperature of the processing fluid to be supplied to the nozzle when a measured temperature of the internal temperature sensor is lower than a measured temperature of the external temperature sensor, and/or the temperature adjustment part lowers the temperature of the processing fluid to be supplied to the nozzle when the measured temperature of the internal temperature sensor is higher than the measured temperature of the external temperature sensor.