Disclosed herein is a plasma-resistant chamber component and a method for manufacturing the same. A plasma-resistant chamber component of a semiconductor processing chamber that generates a plasma environment includes a ceramic article having multiple polished apertures. A roughness of the multiple polished apertures is less than 32 .Math.in.

Disclosed herein is a plasma-resistant chamber component and a method for manufacturing the same. A plasma-resistant chamber component of a semiconductor processing chamber that generates a plasma environment includes a ceramic article having multiple polished apertures. A roughness of the multiple polished apertures is less than 32 μin.

Disclosed herein is a plasma-resistant chamber component and a method for manufacturing the same. A plasma-resistant chamber component of a semiconductor processing chamber that generates a plasma environment includes a ceramic article having multiple polished apertures. A roughness of the multiple polished apertures is less than 32 μin.

An insert apparatus for protecting a curved inner surface within a passageway from abrasion during an abrasive machining operation is disclosed. In various embodiments, the insert apparatus includes a shield having a shell shaped to match a curved portion of the curved inner surface of the passageway and a shaft having a first end connected to the shell and a second end connected to a member configured to maintain the shaft within the passageway and the shell positioned against the curved inner surface during the abrasive machining operation.

An insert apparatus for protecting a curved inner surface within a passageway from abrasion during an abrasive machining operation is disclosed. In various embodiments, the insert apparatus includes a shield having a shell shaped to match a curved portion of the curved inner surface of the passageway and a shaft having a first end connected to the shell and a second end connected to a member configured to maintain the shaft within the passageway and the shell positioned against the curved inner surface during the abrasive machining operation.

This document discloses a system and method for polishing a metal surface, using a grinding machine and a burnishing machine. The grinding machine comprises an arm coupled with a grinding wheel for grinding the internal surface of a workpiece, an arm rotation drive block configured to drive rotation of the arm around its longitudinal axis, an arm movement drive block configured to move the arm longitudinally and vertically, and rollers for rotating the workpiece around its cylindrical axis via friction with an external surface of the workpiece. The arm comprises a fixed main shaft, a universal joint shaft and a head section coupled with the grinding wheel, wherein the head section is configured to oscillate vertically, allowing the grinding wheel to follow up-and-down fluctuations of the workpiece. The burnishing machine is configured to tumble the workpiece including a tumbling detergent and tumbling beads therein.

This document discloses a system and method for polishing a metal surface, using a grinding machine and a burnishing machine. The grinding machine comprises an arm coupled with a grinding wheel for grinding the internal surface of a workpiece, an arm rotation drive block configured to drive rotation of the arm around its longitudinal axis, an arm movement drive block configured to move the arm longitudinally and vertically, and rollers for rotating the workpiece around its cylindrical axis via friction with an external surface of the workpiece. The arm comprises a fixed main shaft, a universal joint shaft and a head section coupled with the grinding wheel, wherein the head section is configured to oscillate vertically, allowing the grinding wheel to follow up-and-down fluctuations of the workpiece. The burnishing machine is configured to tumble the workpiece including a tumbling detergent and tumbling beads therein.

A center shaft machining apparatus includes: a grinding structure that moves on a machining central axis while rotating about the machining central axis and machines an end surface on one end side of a workpiece arranged on the machining central axis; an end portion support structure that supports an opposite end side of the workpiece; and a shaft portion support structure that supports a shaft support portion set at an intermediate portion of the workpiece. The end portion support structure includes an eccentric mechanism capable of supporting an opposite end of the workpiece in a state where a workpiece central axis of the workpiece is eccentric with respect to the machining central axis.

A grinding apparatus includes: a grinding stone in which an outer circumferential surface thereof is pressed against the workpiece while being rotated and driven; and a fluid injection apparatus that has a fluid injection nozzle including an injection port from which a fluid is injected to the outer circumferential surface of the grinding stone, and a grinding oil supply apparatus that supplies a grinding oil to a processing point and that includes a grinding oil supply nozzle separate from the fluid injection nozzle, the processing point being an abutting section of the grinding stone and the workpiece, wherein the injection port is arranged so as to face the outer circumferential surface of the grinding stone in a state capable of injecting the fluid to a position different from the processing point in a radial direction of the grinding stone among the outer circumferential surface of the grinding stone.

A grinding apparatus includes: a grinding stone in which an outer circumferential surface thereof is pressed against the workpiece while being rotated and driven; and a fluid injection apparatus that has a fluid injection nozzle including an injection port from which a fluid is injected to the outer circumferential surface of the grinding stone, and a grinding oil supply apparatus that supplies a grinding oil to a processing point and that includes a grinding oil supply nozzle separate from the fluid injection nozzle, the processing point being an abutting section of the grinding stone and the workpiece, wherein the injection port is arranged so as to face the outer circumferential surface of the grinding stone in a state capable of injecting the fluid to a position different from the processing point in a radial direction of the grinding stone among the outer circumferential surface of the grinding stone.