Patent classifications
B24B7/22
Stone slab manufacturing methods and systems
This document describes systems and processes manufacturing and distributing stone slabs, such as including distributing a stone slab and a slab image file associated with the stone slab. The slab image file may include an image and associated information to facilitate one or more operations related to the stone slab.
Management method of machining system
A management method of a machining system includes a chuck table, a machining unit, a transfer unit that transfers a wafer onto the chuck table, a camera unit that acquires an image containing a pattern formed on a side of a front surface of the wafer, and an information recording section. The management method is applied when the pattern is recorded in association with machining conditions in the information recording section; and records in the information recording section new machining conditions to be used when machining a new type of wafer, causes an automatic machining program, which automatically machines the new type of wafer, to start, forms an image, which contains a new pattern of the new type of wafer, by the camera unit, and records the new pattern in association with the new machining conditions in the information recording section.
Polishing head and polishing apparatus
A polishing head having a simple construction and a compact size is disclosed. The polishing head includes: a polishing-tool pressing member for supporting a polishing tool; a movable shaft coupled to the polishing-tool pressing member; a housing which houses the movable shaft therein; and a diaphragm which forms a pressure chamber between an end portion of the movable shaft and the housing, the diaphragm including a central portion in contact with the end portion of the movable shaft, an inner wall portion connecting with the central portion and extending along a side surface of the movable shaft, a folded-back portion connecting with the inner wall portion and having a curved cross section, and an outer wall portion connecting with the folded-back portion and located outside the inner wall portion.
Method and apparatus for manufacturing semiconductor device
A method for manufacturing a semiconductor device includes chucking in which a semiconductor device wafer is attached to an upper surface of a chuck mechanism with its device surface down; and edge trimming performed after the chucking, wherein the edge trimming comprises: rotating the semiconductor device water horizontally by the chuck mechanism; rotating a rotating blade horizontally by a vertical spindle to which an ultrasonic wave is applied and trimming a circumferential side surface of the semiconductor device wafer by the rotating blade.
Processing apparatus
A processing apparatus includes: a selection section that selects two or more components from a plurality of components including a holding table, a processing unit, a robot, a temporary placing unit, a carrying-in mechanism, a cleaning unit, and a carrying-out mechanism; and a control unit that handles a workpiece at part of routes that correspond to the components selected by the selection section, of the routes for passage of the workpiece at the time of processing the workpiece full-automatically by use of the plurality of components.
BACK GRINDING ADHESIVE SHEET, AND METHOD FOR MANUFACTURING SEMICONDUCTOR WAFER
Provided is a back grinding adhesive sheet which can adequately protect protrusions provided to a semiconductor wafer, and with which back grinding can be adequately performed. The present invention provides a back grinding adhesive sheet for a semiconductor wafer having protrusions, the back grinding adhesive sheet comprising a non-adhesive cushion layer, and an adhesive layer provided on the cushion layer. The adhesive layer has an opening with a smaller diameter than the diameter of the semiconductor wafer, and the outer edge of the semiconductor wafer is adhered to the adhesive layer such that the protrusions on the semiconductor wafer are positioned inside the opening. The protrusions are protected by the cushion layer when the semiconductor wafer is in the state of being adhered to the adhesive layer. The adhesive sheet satisfies at least one of the following conditions (1)-(2). (1) When the cushion layer is cut out using the dumbbell from JISZ1702 and is stretched 25% at a gauge length of 40 mm and a tensile speed of 300 mm/min, the tensile stress is 2-30N/10 mm. (2) The cushion layer is formed from a thermoplastic resin that has a melt flow rate (JISK7210, 125° C./10.0 kg load) of 0.2-30 g/10 min, and a melting point of 60-110° C.
GRINDING APPARATUS
A grinding apparatus includes a chuck table that holds under suction a workpiece through a protective tape, where the protective tape is attached to one surface of an annular frame so as to cover an opening of the annular frame and the workpiece is attached to the protective tape on an inner side than an inner circumferential edge of the opening of the annular frame; a grinding unit that has a grindstone for grinding the workpiece held by the chuck table; and a frame cleaning unit that cleans the other surface located on a side opposite to the one surface of the annular frame obtained after grinding of the workpiece.
EASY-DETACHABLE GRINDING DEVICE FOR CEMENT WALK-BEHIND TROWEL MACHINE
An easy-detachable grinding device for a cement walk-behind trowel machine comprises a plurality of installing units arranged on a seat which is installed with the central disk and the outer rotary disks. In use, it is only needed to buckle the installing units to the grinding knives of a power source of a cement walk-behind trowel machine so that the central disk and the outer rotary disks are assembled to the cement walk behind trowel machine. The original grinding knives are unnecessary to be detached from the cement walk behind trowel machine. Furthermore the grinding device can be detached easily as it is not used, while the original used grinding knives can be used again. No more vehicle is needed. Outer rotary disks are arranged on the periphery of the central disk so as to have a large grinding area.
EASY-DETACHABLE GRINDING DEVICE FOR CEMENT WALK-BEHIND TROWEL MACHINE
An easy-detachable grinding device for a cement walk-behind trowel machine comprises a plurality of installing units arranged on a seat which is installed with the central disk and the outer rotary disks. In use, it is only needed to buckle the installing units to the grinding knives of a power source of a cement walk-behind trowel machine so that the central disk and the outer rotary disks are assembled to the cement walk behind trowel machine. The original grinding knives are unnecessary to be detached from the cement walk behind trowel machine. Furthermore the grinding device can be detached easily as it is not used, while the original used grinding knives can be used again. No more vehicle is needed. Outer rotary disks are arranged on the periphery of the central disk so as to have a large grinding area.
Wafer processing method
A wafer processing method in which a wafer including devices on a front surface side is processed. The method includes a wafer-with-protective-component forming step of forming the wafer with a protective component through sticking the protective component formed of a resin that softens by heat to the front surface side by pressing and heating the protective component, a thickness measurement step of measuring a thickness of the protective component in the wafer with the protective component, and a grinding step of holding the wafer with the protective component by a chuck table and grinding a back surface side of the wafer until a thickness of the wafer becomes an intended finished thickness. In the grinding step, the thickness of the protective component measured in the thickness measurement step is subtracted from a total thickness of the wafer with the protective component to calculate the thickness of the wafer.