A polishing apparatus capable of forming a step-shaped recess having a right-angled cross section in an edge portion of a substrate, such as a wafer, is disclosed. The polishing apparatus includes: a substrate rotating device configured to rotate the substrate about a rotation axis; a first roller having a first circumferential surface configured to press a polishing tape against the edge portion of the substrate; and a second roller having a second circumferential surface in contact with the first circumferential surface. The second roller has a tape stopper surface that restricts movement of the polishing tape in a direction away from the rotation axis. The tape stopper surface is located radially outward of the first circumferential surface.

The polishing apparatus has a polishing unit capable of polishing a peripheral portion of the substrate to form a right-angled cross section. The polishing apparatus includes: a substrate holder that holds and rotates the substrate; guide rollers that support a polishing tape; and a polishing head having a pressing member that presses an edge of the polishing tape against the peripheral portion of the substrate from above. The guide rollers are arranged such that the polishing tape extends parallel to a tangential direction of the substrate and a polishing surface of the polishing tape is parallel to a surface of the substrate. The substrate holder includes: a holding stage that holds the substrate; and a supporting stage that supports a lower surface of the peripheral portion of the substrate in its entirety. The supporting stage rotates in unison with the holding stage.

The polishing apparatus has a polishing unit capable of polishing a peripheral portion of the substrate to form a right-angled cross section. The polishing apparatus includes: a substrate holder that holds and rotates the substrate; guide rollers that support a polishing tape; and a polishing head having a pressing member that presses an edge of the polishing tape against the peripheral portion of the substrate from above. The guide rollers are arranged such that the polishing tape extends parallel to a tangential direction of the substrate and a polishing surface of the polishing tape is parallel to a surface of the substrate. The substrate holder includes: a holding stage that holds the substrate; and a supporting stage that supports a lower surface of the peripheral portion of the substrate in its entirety. The supporting stage rotates in unison with the holding stage.

The belt sander includes a gear casing coupled to a tool housing, the gear casing surrounding one or more gears configured to receive input from a motor to drive a shaft about a drive axis. The belt sander includes a belt arm assembly having a belt arm, the belt configured to translate in response to input from the shaft. The belt sander includes a plurality of incrementally spaced apart receivers on the gear casing and an engagement member in operational communication with the belt arm assembly, the engagement member being movable between a locked position and an unlocked position, wherein in the locked position the engagement member engages a receiver to fix the belt arm assembly incrementally relative to the gear casing, and wherein in the unlocked position the belt arm assembly freely rotates relative to the belt arm assembly to pivot the belt arm about the drive axis.

The belt sander includes a gear casing coupled to a tool housing, the gear casing surrounding one or more gears configured to receive input from a motor to drive a shaft about a drive axis. The belt sander includes a belt arm assembly having a belt arm, the belt configured to translate in response to input from the shaft. The belt sander includes a plurality of incrementally spaced apart receivers on the gear casing and an engagement member in operational communication with the belt arm assembly, the engagement member being movable between a locked position and an unlocked position, wherein in the locked position the engagement member engages a receiver to fix the belt arm assembly incrementally relative to the gear casing, and wherein in the unlocked position the belt arm assembly freely rotates relative to the belt arm assembly to pivot the belt arm about the drive axis.

A platen apparatus includes a housing having multiple vents; a turbine wheel rotatably attached to a rear section of the housing, the wheel having a circular body and a circumferential face without a coating thereon, the body includes vanes, each vane being a hole which extends through the body from one side to an opposing side of the wheel; a support belt engaged in tension about the circumferential face of the wheel; and the rear section of the housing is at least partially open so that a portion of the circumferential face of the wheel is exposed outside the housing. The vanes are arranged adjacent to the vents, and each provide a flow channel through which air is drawn in from a first side of the housing through the wheel body and released at a second, opposite side of the housing.

A platen apparatus includes a housing having multiple vents; a turbine wheel rotatably attached to a rear section of the housing, the wheel having a circular body and a circumferential face without a coating thereon, the body includes vanes, each vane being a hole which extends through the body from one side to an opposing side of the wheel; a support belt engaged in tension about the circumferential face of the wheel; and the rear section of the housing is at least partially open so that a portion of the circumferential face of the wheel is exposed outside the housing. The vanes are arranged adjacent to the vents, and each provide a flow channel through which air is drawn in from a first side of the housing through the wheel body and released at a second, opposite side of the housing.

Equipment (300) for the surface sanding of plate-shaped bodies (101), in particular of tiles, said equipment (300) comprising support and feeding means (100) for supporting said plate-shaped bodies (101) and feeding said plate-shaped bodies (101) along a given feed direction (D), so that during the movement along said given direction (D) the surface of each said plate-shaped body (101) that shall be sanded can be visible and accessed, said equipment (300) including a sanding module (200) provided with sanding means defining a sanding abrasive surface and with moving means for moving said abrasive surface in contact with the visible surface of said plate-shaped bodies (101) in succession during the movement thereof; wherein said sanding means comprise a closed belt (201) that defines said sanding abrasive surface and is suitable to be driven into rotation by means of said moving means.

Equipment (300) for the surface sanding of plate-shaped bodies (101), in particular of tiles, said equipment (300) comprising support and feeding means (100) for supporting said plate-shaped bodies (101) and feeding said plate-shaped bodies (101) along a given feed direction (D), so that during the movement along said given direction (D) the surface of each said plate-shaped body (101) that shall be sanded can be visible and accessed, said equipment (300) including a sanding module (200) provided with sanding means defining a sanding abrasive surface and with moving means for moving said abrasive surface in contact with the visible surface of said plate-shaped bodies (101) in succession during the movement thereof; wherein said sanding means comprise a closed belt (201) that defines said sanding abrasive surface and is suitable to be driven into rotation by means of said moving means.

A grinding element has an abrasive surface and an abutment surface which is offset by an offset from the abrasive surface. A grinding depth can be adjusted by changing the offset. The grinding element may be a grinding belt.