Disclosed herein is a plasma-resistant chamber component and a method for manufacturing the same. A plasma-resistant chamber component of a semiconductor processing chamber that generates a plasma environment includes a ceramic article having multiple polished apertures. A roughness of the multiple polished apertures is less than 32 μin.

Disclosed herein is a plasma-resistant chamber component and a method for manufacturing the same. A plasma-resistant chamber component of a semiconductor processing chamber that generates a plasma environment includes a ceramic article having multiple polished apertures. A roughness of the multiple polished apertures is less than 32 .Math.in.

Disclosed herein is a plasma-resistant chamber component and a method for manufacturing the same. A plasma-resistant chamber component of a semiconductor processing chamber that generates a plasma environment includes a ceramic article having multiple polished apertures. A roughness of the multiple polished apertures is less than 32 .Math.in.

Disclosed herein is a plasma-resistant chamber component and a method for manufacturing the same. A plasma-resistant chamber component of a semiconductor processing chamber that generates a plasma environment includes a ceramic article having multiple polished apertures. A roughness of the multiple polished apertures is less than 32 μin.

Disclosed herein is a plasma-resistant chamber component and a method for manufacturing the same. A plasma-resistant chamber component of a semiconductor processing chamber that generates a plasma environment includes a ceramic article having multiple polished apertures. A roughness of the multiple polished apertures is less than 32 μin.

An abrasive flow machine is indicated, having a media drive device which is adapted to move the abrasive medium over a surface of a workpiece and/or through the opening of the workpiece in a flow direction, having a workpiece holder for mounting the workpiece with two parts adapted to be positioned on opposite sides of the workpiece, having a structure-borne sound sensor for measuring structure-borne sound generated in a workpiece when the latter is machined with an abrasive medium, and having an evaluation unit which is adapted to infer a cutting power of the abrasive medium and/or a rate of material removal on the workpiece based on an integrated measurand of the root mean square of the structure-borne sound measured by the structure-borne sound sensor over time. Further indicated are a method of ascertaining a material removal on a workpiece and a method of determining the cutting power of an abrasive medium.

An abrasive flow machine is indicated, having a media drive device which is adapted to move the abrasive medium over a surface of a workpiece and/or through the opening of the workpiece in a flow direction, having a workpiece holder for mounting the workpiece with two parts adapted to be positioned on opposite sides of the workpiece, having a structure-borne sound sensor for measuring structure-borne sound generated in a workpiece when the latter is machined with an abrasive medium, and having an evaluation unit which is adapted to infer a cutting power of the abrasive medium and/or a rate of material removal on the workpiece based on an integrated measurand of the root mean square of the structure-borne sound measured by the structure-borne sound sensor over time. Further indicated are a method of ascertaining a material removal on a workpiece and a method of determining the cutting power of an abrasive medium.

A hollow spring includes a steel tube in which the average of surface roughness is smaller than 10 μm across the entire inner surface of the steel tube and/or compressive residual stress is given to the entire inner surface of the steel tube. The hollow spring may be manufactured by a step of polishing the inner surface of the steel tube by flowing a viscoelastic abrasive medium (200) within the tubular member (10), between a first opening (11) and a second opening (12) of the tubular member (10). The abrasive medium (200) may include a viscoelastic base material and a granular abrasive. The inner surface of the steel tube is polished evenly to reduce the surface roughness and/or is given compressive residual stress to increase the fatigue life of the hollow spring.

A hollow spring includes a steel tube in which the average of surface roughness is smaller than 10 μm across the entire inner surface of the steel tube and/or compressive residual stress is given to the entire inner surface of the steel tube. The hollow spring may be manufactured by a step of polishing the inner surface of the steel tube by flowing a viscoelastic abrasive medium (200) within the tubular member (10), between a first opening (11) and a second opening (12) of the tubular member (10). The abrasive medium (200) may include a viscoelastic base material and a granular abrasive. The inner surface of the steel tube is polished evenly to reduce the surface roughness and/or is given compressive residual stress to increase the fatigue life of the hollow spring.

The present subject matter relates to a method and an apparatus in the form of a machine system (1200) for machining a component (100) with an internal passage (115). In an aspect, the method comprises periodically injecting 5 abrasive slurry back and forth through the internal passage (115) at a pressure ranging from about 25 bar to about 35 bar. The abrasive slurry comprises a mixture of abrasive particles having a size in the range of about 40 m to about 60 m, and a slurry medium. The volume fraction of the abrasive particles in the slurry medium is about 40% to about 50%. Further, the injection of the abrasive 10 slurry is performed for a predefined number of process cycles at predetermined time versus pressure changes to obtain the component having a final average surface roughness of less than about 3.0 m.