A vacuum substrate transport apparatus including a frame, a drive section having a drive axis, at least one arm, having an end effector for holding a substrate, having at least one degree of freedom axis effecting extension and retraction, and a bearing defining a guideway that defines the axis, the bearing including at least one rolling load bearing element disposed in a bearing case, interfacing between a bearing raceway and bearing rail to support arm loads, and effecting sliding of the case along the rail, and at least one rolling, substantially non-load bearing, spacer element disposed in the case, intervening between each of the load bearing elements, wherein the spacer element is a sacrificial buffer material compatible with sustained substantially unrestricted service commensurate with a predetermined service duty of the apparatus in a vacuum environment at temperatures over 260 C. for a specified predetermined service period.

A boom has a cylindrical body with a coupling flange at each end. The body is manufactured from a carbon fiber material. During construction of the carbon fiber body, an electronic feedback mechanism is embedded into the carbon fiber. The electronic feedback mechanism may be a simple electronic strain gauge. Optionally, the feedback mechanism may include a fiber optic cable woven into the carbon fiber weave.

The invention relates to a multi-axis robot (100) comprising a plurality of gearboxes, wherein each of the plurality of gearboxes is configured to operate on a respective robot axis (A1-A6) and comprises one or more gears formed of a plastics material. The invention also relates to a gearbox for use in a robot (100) and the use of a gearbox in a robot (100) and robot subsystems.

The present invention describes a method for manufacturing a robotic gripper using multi-material 3D printing technology. The method involves creating a hard skeletal structure and soft interconnections, inserting conductive traces within these structures, threading cables through pre-designed channels, connecting these cables to the skeletal structure, forming a soft outer shell with specific indentations for sensor electronics, installing sensors and signal conditioning chips, and coating the entire assembly in a protective resin layer. The resulting robotic gripper closely replicates the mechanical properties of a human hand, demonstrating high precision and cost-effectiveness.

An arm-shaped structure includes a pipe-shaped main body and an attachment interface joined to at least one end of the main body and securable to another component. At least a portion of the main body and the attachment interface is formed by resin containing a continuous reinforcement fiber. The main body and the attachment interface are joined to each other in a state where relative movement along a longitudinal axis of the main body and around the longitudinal axis is prevented in accordance with engagement between a recess provided in one of the main body and the attachment interface and a protrusion provided in the other one of the main body and the attachment interface.

A method may include articulating a first link and a second link relative to each other about a pair of outer hinge portions on a first end of a first link and in mating engagement with a pair of inner hinge portions on a second end of a second link. Each outer hinge portion comprises an outer ear extending in a first axial direction away from the first end of the first link, and an inner bearing surface substantially oriented in the first axial direction, and each inner hinge portion comprises an inner ear extending in a second axial direction away from the second end of the second link, and an outer bearing surface positioned oriented in the second axial direction. During the articulating, the outer bearing surfaces support the outer ears and the inner bearing surfaces support the inner ears.

Methods and apparatus for manufacturing and controlling an elongate robotic instrument, or robotic endoscope, are provided which may include any number of features. One feature is a robotic link that can be easily manufactured and can withstand the forces related to use within a robotic instrument. Another feature is a joint on the link that increases compressive strength and minimizes stress between links. Yet another feature is an elongate robotic instrument that is constructed from a single type of link.

The invention relates, inter alia, to a hole gripper which has a pressurized air connection, an elastically deformable bellows portion which can be inflated by the application of pressurized air for clamping in a component hole of a component, and a connecting portion with a connecting channel which connects the pressurized air connection and the bellows portion for supplying pressurized air from the pressurized air connection to the bellows portion. The pressurized air connection, the connecting portion, and the bellows portion are integrally connected to one another in one piece.

Disclosed herein, a contact pad for use on a robot arm in transfer chamber in a wafer processing tool is provided, comprising an elastomer body and a high hardness powder doping a surface of the elastomer body.

A method may include articulating a first link and a second link relative to each other about a pair of outer hinge portions on a first end of a first link and in mating engagement with a pair of inner hinge portions on a second end of a second link. Each outer hinge portion comprises an outer ear extending in a first axial direction away from the first end of the first link, and an inner bearing surface substantially oriented in the first axial direction, and each inner hinge portion comprises an inner ear extending in a second axial direction away from the second end of the second link, and an outer bearing surface positioned oriented in the second axial direction. During the articulating, the outer bearing surfaces support the outer ears and the inner bearing surfaces support the inner ears.