A waterjet system in accordance with at least some embodiments includes a carriage, a motion assembly configured to move the carriage horizontally relative to a workpiece, and a cutting head carried by the carriage. The waterjet system can also include a kinematic chain through which the cutting head is operably connected to the carriage. The kinematic chain can include first, second, and third joints rotatably adjustable about different first, second, and third axes, respectively. The carriage and the first and second joints can be configured to move the cutting head along a path relative to the workpiece while the cutting head directs a jet toward the workpiece to form a product. The third joint can be configured to shift a kinematic singularity away from the path to reduce or eliminate delay and corresponding reduced cutting accuracy associated with approaching the kinematic singularity.

A waterjet system in accordance with at least some embodiments includes a carriage, a motion assembly configured to move the carriage horizontally relative to a workpiece, and a cutting head carried by the carriage. The waterjet system can also include a kinematic chain through which the cutting head is operably connected to the carriage. The kinematic chain can include first, second, and third joints rotatably adjustable about different first, second, and third axes, respectively. The carriage and the first and second joints can be configured to move the cutting head along a path relative to the workpiece while the cutting head directs a jet toward the workpiece to form a product. The third joint can be configured to shift a kinematic singularity away from the path to reduce or eliminate delay and corresponding reduced cutting accuracy associated with approaching the kinematic singularity.

A substrate cleaning line and a substrate cleaning system including the same are disclosed. The substrate cleaning line may include a chamber portion including a plurality of cleaning chambers to clean a substrate, and a first return robot to load, unload, or transfer the substrate from or to the plurality of cleaning chambers, wherein the cleaning chambers may be stacked on each other in a vertical direction.

An industrial robot for material processing includes a manipulator with a base, a link, an arm and a hand. A processing device of the industrial robot is movable by the manipulator and is attached to the hand of the manipulator, and is supplied with a medium via a medium line. Provided for the medium line is a drag chain subjected to a traction directed away from a connection of the drag chain close to a processing location by a tensioning device. The tensioning device has a tensioning lever and a restoring device. The tensioning lever is attached to a partial length of the drag chain. The tensioning lever is deflectable, counter to an action of a restoring force generated by the restoring device, towards the connection of the drag chain close to the processing location such that the tensioning lever performs a pivoting movement about a lever pivot axis.

A ball screw spline assembly includes a ball screw spline including a first nut including a first mounting surface adapted to receive a first fastening element; a second nut including a second mounting surface adapted to receive a second fastening element; and a shaft passing through the first nut and the second nut; the housing including a first portion and a second portion, the first portion extends in a direction substantially parallel to the shaft, and the second portion extends in a direction substantially perpendicular to the shaft; a connecting plate coupling the second nut to the first portion, the first nut is installed to the second portion; the first mounting surface and the second mounting surface are located within a space defined by the first portion, the second portion and the connecting plate, such that the ball screw spline is integrally installable to the housing.

According to one embodiment, a control system controls a robot. The control system includes a first system and a second system. The first system transmits a first command and supplementary data. The first command is represented using a specification different from a control command specification used by a controller of the robot. The supplementary data corresponds to the first command. The second system generates a second command based on the first command, attaches the supplementary data to the second command, and transmits the second command to the controller. The second command corresponds to the control command specification.

An obstacle avoidance method for a robot arm is provided, including a modeling step, a collecting and evaluating coordinates step, an obtaining control parameter step, an establishing an occupation function step, and a finding an obstacle avoiding posture step. The present invention pre-stores the data obtained in performing the modeling step, the step of collecting and evaluating coordinates, the step of obtaining control parameter, and the step of establishing the occupation function into a database, thereby allowing the robot arm to quickly evaluate whether a collision behavior will occur in subsequent execution of a task. If a collision will occur, the robot arm executes the step of the finding the obstacle avoiding posture to dodge obstacles. The invention uses a non-contact approach for anti-collision design, which can improve the shortcomings faced by the existing contact type anti-collision design.

A travel robot for moving a substrate transfer robot in a transfer chamber includes: an elevating part for driving an elevating drive shaft installed in the transfer chamber, a first travel link arm engaged with the elevating drive shaft, a second and a third travel link arm respectively having a first and a second driving motors installed therein, wherein two travel drive shafts are interlocked with the first driving motor and their corresponding travel output shafts, wherein the travel drive shafts and the travel output shafts are installed on the first travel link arm, wherein a rotation drive shaft interlocked with the second driving motor and a rotation output shaft interlocked with the rotation drive shaft and the substrate transfer robot are installed on the third travel link arm, and wherein the travel output shafts are engaged with the first and the third travel link arm.

A surgical robot includes a surgical tool including a bendable joint portion, and a bending tendon connected to the joint portion and configured to bend the joint portion, a tube connected to the surgical tool and configured to accommodate the bending tendon therein, a base housing configured to rotatably support the tube and accommodate the bending tendon that passes through the tube, a bending driver configured to grasp the bending tendon, and translate in a longitudinal direction parallel to a rotation axis of the tube with respect to the base housing, and a rotation driver configured to rotatably support the tube with respect to the base housing, wherein when the tube rotates, the rotation driver is connected to one portion of the bending driver that grasps the bending tendon, and rotates the tube and the bending tendon together.

A surgical robot includes a surgical tool including a bendable joint portion, and a bending tendon connected to the joint portion and configured to bend the joint portion, a tube connected to the surgical tool and configured to accommodate the bending tendon therein, a base housing configured to rotatably support the tube and accommodate the bending tendon that passes through the tube, a bending driver configured to grasp the bending tendon, and translate in a longitudinal direction parallel to a rotation axis of the tube with respect to the base housing, and a rotation driver configured to rotatably support the tube with respect to the base housing, wherein when the tube rotates, the rotation driver is connected to one portion of the bending driver that grasps the bending tendon, and rotates the tube and the bending tendon together.